Mixed memory integration with NVRAM, dram and sram cell structures on same substrate

• US 6,424,011 B1
• Filed: 08/31/1999
• Issued: 07/23/2002
• Est. Priority Date: 04/14/1997
• Status: Expired due to Term

• Current Assignee: GlobalFoundries, Inc.
• Original Assignee: International Business Machines Corporation
• Inventors: Hsu, Louis Lu-Chen, Mandelman, Jack A., Assaderaghi, Fariborz
• Primary Examiner(s): Bowers, Charles
• Assistant Examiner(s): LEE, HSIEN MING
• Application Number:
  US09/387,059
• Time in Patent Office: 1,057 Days
• Field of Search: 438/241, 438/238, 438/248, 438/253, 438/257, 438/244, 438/256, 438/594, 438/597, 438/155, 438/258
• US Class Current: 257/350
• CPC Class Codes: G11C 11/005 comprising combined but independently operative RAM-ROM, RAM-PROM, RAM-EPROM cells
• CPC Class Codes: H10B 12/033 the capacitor extending over the transistor
• CPC Class Codes: H10B 12/09 with simultaneous manufacture of the peripheral circuit region and memory cells
• CPC Class Codes: H10B 12/31 having a storage electrode stacked over the transistor
• CPC Class Codes: H10B 41/00 Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
• CPC Class Codes: H10B 41/40 characterised by the peripheral circuit region
• CPC Class Codes: H10B 69/00 Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices

Abstract

A semiconductor memory device including an NVRAM cell structure, a DRAM cell structure and an SRAM cell structure. The NVRAM cell structure, the DRAM cell structure, and the SRAM cell structure are on the same semiconductor on insulator substrate. An NVRAM cell structure. Processes for forming a memory structure that includes NVRAM, DRAM, and/or SRAM memory structures on one semiconductor on insulator substrate and processes for forming a new NVRAM cell structure. Preferably, the semiconductor-on-insulator substrate is an SOI substrate, a silicon on glass substrate or a silicon on sapphire substrate, as appropriate for a particular application.

Claims

1. A semiconductor memory device, comprising:

an NVRAM cell structure;

a DRAM cell structure; and

an SRAM cell structure;

wherein said NVRAM cell structure, said DRAM cell structure, and said SRAM cell structure are on the same semiconductor-on-insulator substrate.

2. The semiconductor memory device according to claim 1, wherein said NVRAM cell structure includes a first floating gate, a second floating gate, an interconnection linking the first floating gate and the second floating gate, and a control gate on said second floating gate.

3. The semiconductor memory device according to claim 1, wherein said SRAM cell structure includes an NFET driver device, a PFET load device, an interconnection linking the gate of the driver device and the load device, and the body of the driver device.

4. The semiconductor memory device according to claim 3, wherein the load device is a thin film transistor device.

5. The semiconductor memory device according to claim 2, further comprising a polysilicon oxide disposed between said control gate and said floating gate and serving as a tunneling oxide.

6. The semiconductor memory device according to claim 2, wherein the surface of said second floating gate is roughened.

7. The semiconductor memory device according to claim 2, wherein a tunneling oxide is provided by a thin gate oxide deposited between said first said floating gate and said substrate.

8. The semiconductor memory device according to claim 1, wherein said DRAM cell structure includes a transfer gate device, a stack capacitor and a ground plate.

9. The semiconductor memory device according to claim 8, wherein the stack capacitor and the source of the transfer gate are linked by an interconnection stud.