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Microactuator, magnetic head device, and magnetic recording apparatus

  • US 6,424,504 B1
  • Filed: 06/04/1999
  • Issued: 07/23/2002
  • Est. Priority Date: 06/16/1998
  • Status: Expired due to Fees
First Claim
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1. A microactuator wherein opposing substrates are spaced so as to move relative to each other, and a plurality of actuators for providing different distances of relative motion between said substrates are arranged between said substrates at predetermined intervals in the direction of relative motion between said substrates, and wherein the plurality of actuators are disposed so that the distances of relative motion between said substrates gradually increase in the one direction of relative motion between said substrates, but gradually decrease in a direction opposite to the one direction of relative motion,further wherein each of said actuators comprises a plurality of first comb-like electrodes formed on the opposing surface of a first substrate that is one of said substrates, and having a plurality of parallel teeth which have the same length and are aligned at the leading ends thereof;

  • and a second electrode formed on the opposing face of a second substrate that is the other substrate, and having a plurality of parallel teeth aligned at the outer ends thereof so as to be placed between the adjoining teeth of each of said plurality of first electrodes and to extend outward from similar locations from the inner back side of lines which connect the leading ends of said teeth of each of said first electrodes in an undriven state, the outer ends of extending portions of said plurality of teeth being moved to the leading ends of said teeth of said first electrodes in a driven state in order to cause said substrates to move relative to each other, wherein said outwardly extending portions of said second electrode teeth are different in length among said actuators, and wherein the lengths of said second electrode teeth of said plurality of actuators gradually vary, respectively, in a direction in which said plurality of actuators are disposed so that the distances of relative motion between said substrates gradually increase in the one direction of relative motion between said substrates, but gradually decrease in a direction opposite to the one direction of relative motion.

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