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Methods of manufacturing microfabricated substrates

  • US 6,425,972 B1
  • Filed: 02/04/1999
  • Issued: 07/30/2002
  • Est. Priority Date: 06/18/1997
  • Status: Expired due to Term
First Claim
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1. A method of fabricating microfluidic devices, comprising:

  • providing a first substrate having a first surface and a plurality of discrete groove networks disposed on the first surface, each of the plurality of discrete groove networks comprising at least two intersecting grooves;

    bonding a second substrate to the first surface of the first substrate, wherein the second substrate comprises a plurality of apertures disposed through it from a first surface of the second substrate to a second surface of the second substrate, said bonding comprising first applying a vacuum to said apertures and mating the second substrate with the first surface of the first substrate to create a bonded substrate wherein the intersecting grooves are sealed to produce a plurality of discrete channel networks, the plurality of apertures being positioned in the second substrate to be in fluid communication with the discrete channel networks; and

    separating a first portion of the bonded substrate containing at least a first discrete channel network from a second portion of the bonded substrate containing at least a second discrete channel network.

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