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Method for fabricating micromachined members coupled for relative rotation

  • US 6,426,013 B1
  • Filed: 10/28/1999
  • Issued: 07/30/2002
  • Est. Priority Date: 10/18/1993
  • Status: Expired due to Fees
First Claim
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1. A micromachining method for fabricating a torsional scanner that includes:

  • a micromachined mirror having a mirror surface; and

    a pair of hinges each having ends that are joined to the micromachined mirror, the hinges supporting said micromachined mirror for rotation about an axis;

    the micromachining method for forming the torsional scanner comprising the steps of;

    providing a wafer that has been formed from silicon material, and that has both a frontside and a backside;

    forming a membrane in the wafer by etching a cavity in the silicon material of the backside of the wafer;

    establishing a pattern that defines the mirror surface and the hinges on the frontside of the wafer at the membrane formed therein; and

    forming in the frontside of the wafer the mirror surface and the hinges whereby the hinges support said micromachined mirror for rotation about the axis.

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