RF MEMS switch
First Claim
1. A switch comprising,a MEMS substrate, a diaphragm suspended from and attached to the substrate, the diaphragm being suspended equilaterally from the MEMS substrate, a bridge disposed on the diaphragm, the diaphragm being flexible to move the bridge up and down, a plurality of equilaterally displaced electrodes surrounding the bridge, the electrodes are controlled by controlling voltages to provide electrostatic forces for flexibly moving the diaphragm up and down to move the bridge up and down, an RF substrate bonded to MEMS substrate for encapsulating the diaphragm, and a center waveguide comprising a front center waveguide and a back center waveguide separate by a gap and disposed on the RF substrate, the bridge serving to couple the front center waveguide to the back center waveguide when the diaphragm is actuated to bring the bridge down towards the gap and serving to decouple the front center waveguide from the back center waveguide when the diaphragm is actuated to bring the bridge up away from the gap.
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Accused Products
Abstract
A radio frequency (RF) microelectromechanical systems (MEMS) switch is manufactured by independent processing and subsequent bonding together of a MEMS substrate in alignment with an RF substrate. The RF MEMS switch is designed so as to encapsulate a flexing diaphragm supporting a switch electrode used with electrostatic flexing potentials to move electrodes of the MEMS substrate up and down over an RF transmission line structure of the RF substrate. The bonded combined MEMS switch structure is used to create an encapsulated RF MEMS switch suitable for direct coupling, AC coupling, and direct modulation of RF signals. The resulting MEMS RF switch device provides a reliable, minimally distorting RF transmission line geometry, free of contamination for use in high speed RF signal switching applications well suited for advance communication RF switching requirements.
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Citations
18 Claims
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1. A switch comprising,
a MEMS substrate, a diaphragm suspended from and attached to the substrate, the diaphragm being suspended equilaterally from the MEMS substrate, a bridge disposed on the diaphragm, the diaphragm being flexible to move the bridge up and down, a plurality of equilaterally displaced electrodes surrounding the bridge, the electrodes are controlled by controlling voltages to provide electrostatic forces for flexibly moving the diaphragm up and down to move the bridge up and down, an RF substrate bonded to MEMS substrate for encapsulating the diaphragm, and a center waveguide comprising a front center waveguide and a back center waveguide separate by a gap and disposed on the RF substrate, the bridge serving to couple the front center waveguide to the back center waveguide when the diaphragm is actuated to bring the bridge down towards the gap and serving to decouple the front center waveguide from the back center waveguide when the diaphragm is actuated to bring the bridge up away from the gap.
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14. A switch comprising,
a MEMS substrate, a diaphragm suspended from and attached to the substrate, the diaphragm being suspended equilaterally from the MEMS substrate, a bridge disposed on the diaphragm, the diaphragm being flexible to move the bridge up and down, a plurality of equilaterally displaced electrodes surrounding the bridge, the electrodes are controlled by controlling voltages to provide electrostatic forces for flexibly moving the diaphragm up and down to move the bridge up and down, an RF substrate bonded to MEMS substrate for encapsulating a center waveguide comprising a front center waveguide and a back center waveguide separate by a gap, the bridge serving to couple the front center waveguide to the back center waveguide when the diaphragm is actuated to bring the bridge down towards the gap and serving to decouple the front center waveguide from the back center waveguide when the diaphragm is actuated to bring the bridge up away from the gap, left and right grounded waveguides extending in parallel to and surrounding the front and back center waveguides for forming a transmission line with the front and back center waveguides, a plurality of suspension arms extending from the diaphragm and coupled to the RM MEMS substrate for equilaterally suspending the diaphragm, and an insulating dielectric disposed over the gap to isolate the bridge from the front and back center waveguides for providing capacitive coupling between front and back center waveguides for providing capacitive when the bridge is actuated down.
Specification