Method for continuous, non lot-based integrated circuit manufacturing

• US 6,427,092 B1
• Filed: 08/20/1998
• Issued: 07/30/2002
• Est. Priority Date: 03/24/1997
• Status: Expired due to Term

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Jones, Mark L., Barnett, Gregory A.
• Primary Examiner(s): PATEL, RAMESH B
• Application Number:
  US09/137,781
• Time in Patent Office: 1,440 Days
• Field of Search: 700/95, 700/96, 700/108, 700/109, 700/110, 700/115, 700/116, 700/117, 700/121, 700/214, 700/215, 700/221, 700/222, 700/223, 700/224, 700/226, 700/225, 700/227, 700/229, 707/3, 707/10, 707/103, 707/104, 707/203, 702/117-118, 382/141, 382/142, 382/149, 382/145, 209/573, 209/583, 209/571, 324/759, 324/765, 438/14, 438/62, 438/60, 438/1, 716/4, 716/17
• US Class Current: 700/121
• CPC Class Codes: G01R 31/31718 Logistic aspects, e.g. binning, selection, sorting of devices under test, tester/handler interaction networks, Test management software, e.g. software for test statistics or test evaluation, yield analysis mechanical aspects G01R31/2808, G01R31/2851
• CPC Class Codes: G05B 19/128 the workpiece itself serves as a record carrier, e.g. by its form, by marks or codes on it
• CPC Class Codes: G05B 2219/31296 Identification, pallet object data and program code for station
• CPC Class Codes: G05B 2219/45026 Circuit board, pcb
• CPC Class Codes: G06F 11/006 Identification G06F11/2289 takes precedence
• CPC Class Codes: H01L 2223/5444 for electrical read out
• CPC Class Codes: H01L 27/0207 Geometrical layout of the components, e.g. computer aided design; custom LSI, semi-custom LSI, standard cell technique
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A method for continuous, non lot-based manufacturing of integrated circuit (IC) devices of the type to each have a unique fuse identification (ID) includes: reading the fuse ID of each of the IC devices; advancing multiple lots of the IC devices through, for example, a test step in the manufacturing process in a substantially continuous manner; generating data, such as test data, related to the advancement of each of the IC devices through the step in the process; and associating the data generated for each of the IC devices with the fuse ID of its associated IC device.

Claims

1. A method in an integrated circuit (IC) device manufacturing process for tracking IC devices through the manufacturing process, the method comprising:

providing each of the IC devices with an identification (ID) code;

reading the identification (ID) code of each of the IC devices;

advancing the IC devices through the manufacturing process in a substantially continuous manner;

generating data related to the advancement of each of the IC devices through the manufacturing process; and

associating the data generated for each of the IC devices with the identification (ID) code of its associated IC device.

2. The method of claim 1 wherein each of the IC devices is programmed with a substantially unique, electrically retrievable identification (ID) code, wherein reading the identification (ID) code of each of the IC devices comprises electrically retrieving the identification (ID) code of each of the IC devices.

3. The method of claim 1 wherein each of the IC devices is programmed with a unique fuse ID, wherein reading the identification (ID) code of each of the IC devices comprises reading the unique fuse ID programmed into each of the IC devices.

4. The method of claim 1 wherein advancing the IC devices through the IC device manufacturing process includes advancing the IC devices through an assembly step.

5. The method of claim 1 wherein advancing the IC devices through the IC device manufacturing process includes advancing the IC devices through a test step.

6. The method of claim 1 wherein reading the identification (ID) code of each of the IC devices occurs before advancing the IC devices through the IC device manufacturing process.

7. The method of claim 1 wherein advancing the IC devices through the manufacturing process includes advancing the IC devices serially through multiple machines associated with the manufacturing process.

8. The method of claim 1 wherein advancing the IC devices through the manufacturing process includes advancing the IC devices through parallel machines associated with the manufacturing process.

9. The method of claim 1 wherein generating data related to the advancement of each of the IC devices through the process comprises generating data selected from a group consisting of processing equipment data, processing personnel data, processing set-up data, time and date data, yield data, and test data.

10. The method of claim 1 further comprising storing the identification (ID) code of each of the IC devices, wherein associating the data generated for each of the IC devices with the identification (ID) code of its associated IC device comprises storing the data generated for each of the IC devices in association with the stored identification (ID) code of its associated IC device.

11. The method of claim 1 wherein each of the IC devices has an associated lot ID, wherein associating the data generated for each of the IC devices with the identification (ID) code of its associated IC device comprises storing the data generated for each of the IC devices in association with the lot ID of its associated IC device.

12. A method in an integrated circuit (IC) device manufacturing process for tracking IC devices through back-end test steps in the manufacturing process, the method comprising:

programming each of the IC devices with a unique fuse identification (ID);

for each of the back-end test steps, reading the unique fuse identification (ID) of each of the IC devices;

advancing the IC devices through the back-end test steps in the manufacturing process in a substantially continuous manner;

generating data related to the advancement of each of the IC devices through the back-end test steps; and

associating the data generated for each of the IC devices with the unique fuse identification (ID) of its associated IC device.

13. A method of manufacturing integrated circuit (IC) devices from a semiconductor wafer, the method comprising:

fabricating a plurality of IC'"'"'s on a wafer;

causing each of the IC'"'"'s to store a substantially unique identification (ID) code;

separating each of the IC'"'"'s from said wafer to form one of a plurality of IC devices;

reading the unique identification (ID) code from each of the IC devices;

testing each of the IC devices;

while manufacturing the IC devices;

advancing the IC devices through at least one manufacturing step in a substantially continuous manner;

generating data related to the advancement of each of the IC devices through the at least one manufacturing step; and

associating the data generated for each of the IC devices with the unique identification (ID) code of the IC in its associated IC device.

14. The method of claim 13 wherein fabricating a plurality of IC'"'"'s on the wafer comprises fabricating IC'"'"'s of different types selected from a group consisting of Dynamic Random Access Memory (DRAM) IC'"'"'s, Static Random Access Memory (SRAM) IC'"'"'s, Synchronous DRAM (SDRAM) IC'"'"'s, processor IC'"'"'s, Application Specific IC'"'"'s (ASIC'"'"'s), Read Only Memory (ROM) IC'"'"'s, and Electrically Erasable Programmable ROM (EEPROM) IC'"'"'s.

15. The method of claim 13 wherein causing each of the IC'"'"'s to store a substantially unique identification (ID) code comprises programming each of the IC'"'"'s to permanently store a unique fuse ID.

16. The method of claim 15 wherein programming each of the IC'"'"'s to permanently store a unique fuse ID comprises programming at least one of fuses and anti-fuses in each of the IC'"'"'s to permanently store a unique fuse ID.

17. The method of claim 13 wherein testing each of the IC devices includes speed grading, burn-in, and final testing.

18. The method of claim 13 wherein generating data related to the advancement of each of the IC devices through the manufacturing step comprises generating data identifying test steps the IC devices have progressed through and pass/fail results for those test steps, wherein the method further comprises the act of affirming that the IC devices have progressed through and passed the identified test steps before advancing the IC devices through at least one test step subsequent to the at least one test step the IC devices progress through in a substantially continuous manner.

19. The method of claim 13 further comprising holding some of the IC devices in accordance with their unique identification (ID) codes.

20. A method in an integrated circuit (IC) device manufacturing process for correlating process-related variables with performance variables related to the performance of IC devices as they advance through the manufacturing process, the method comprising:

providing a plurality of IC devices with identification (ID) codes;

reading the identification (ID) code from each of the IC devices;

advancing the IC devices through at least one step in the manufacturing process in a substantially continuous manner;

while the IC devices advance through the step in the manufacturing process, generating data related to process variables associated with the step in the manufacturing process;

generating data related to performance variables associated with the performance of at least some of the IC devices as they advance through at least one step in the manufacturing process; and

associating the process variable-related data and the performance variable-related data generated for each of the IC devices with the identification (ID) code of the IC device associated with the data.

21. The method of claim 20 wherein generating data related to process variables associated with the step in the process comprises generating data related to process variables selected from a group comprising processing equipment, processing personnel, processing set-up, and time and date.

22. The method of claim 20 wherein generating data related to performance variables associated with the performance of at least some of the IC devices as they advance through at least one step in the manufacturing process comprises generating data related to performance variables selected from a group comprising yield and test results.

23. The method of claim 20 wherein providing each of the plurality of IC devices with an identification (ID) code comprises programming each of the plurality of IC devices to permanently store a unique fuse ID which specifies a lot ID, work week, wafer ID, die location, and fabrication facility ID for the IC device.

24. A method of manufacturing Integrated Circuit (IC) modules from semiconductor wafers, the method comprising:

providing a plurality of semiconductor wafers;

fabricating a plurality of IC'"'"'s on each wafer of the plurality of semiconductor wafers;

causing each of the IC'"'"'s on each wafer of the plurality of semiconductor wafers to store an identification (ID) code;

separating each of the IC'"'"'s on each wafer of the plurality of semiconductor wafers from its wafer to form one of a plurality of IC dice;

assembling a plurality of IC modules from the IC dice;

reading the identification (ID) codes from the IC dice in each of the IC modules;

testing each of the IC dice in each of the IC modules;

while manufacturing the IC modules;

advancing the IC modules through at least one manufacturing step in a substantially continuous manner;

generating data related to the advancement of the IC modules through the manufacturing step; and

associating the data generated for each of the IC modules with the identification (ID) codes of its associated IC dice.