Parasitic surface transfer transistor cell (PASTT cell) for bi-level and multi-level NAND flash memory
First Claim
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1. A method to form a Flash memory device with Flash memory cells and parasitic surface transfer transistor (PASTT) devices in the manufacture of an integrated circuit device comprising:
- depositing a tunneling oxide layer overlying a semiconductor substrate;
depositing a first conductive layer overlying said tunneling oxide layer;
patterning said first conductive layer and said tunneling oxide layer to define the cell width edges of floating gates for planned Flash memory cells and to expose said semiconductor substrate where shallow trench isolations are planned;
forming temporary sidewall spacers on said cell width edges of said first conductive layer;
thereafter etching said exposed semiconductor substrate to form trenches for said planned shallow trench isolations;
depositing a trench filling oxide layer overlying said first conductive layer and said temporary sidewall spacers and filling said trenches;
polishing down said trench filling oxide layer to complete said shallow trench isolations and to thereby define active areas in said semiconductor substrate;
removing said temporary sidewall spacers to thereby expose said active areas between said shallow trench isolations and said cell width edges of said first conductive layer wherein said exposed active areas form parasitic channels and unexposed said active areas form cell channels;
thereafter ion implanting said semiconductor substrate to thereby adjust the threshold voltages of said Flash memory cells and of said PASTT devices;
thereafter depositing an interlevel dielectric layer overlying said first conductive layer and said parasitic channels;
depositing a second conductive layer overlying said interlevel dielectric layer wherein parasitic transistor gates are formed where said second conductive layer overlies said parasitic channels with said interlevel dielectric layer therebetween;
patterning said second conductive layer, said interlevel dielectric layer, said first conductive layer, and said tunneling oxide to thereby form control gates and to define the cell length edges of said floating gates for said Flash memory cells wherein floating gates are formed where said first conductive layer overlies said cell channels with said tunneling oxide layer therebetween and wherein control gates are formed where said second conductive layer overlies said floating gates with said interlevel dielectric layer therebetween; and
thereafter implanting ions into said semiconductor substrate to form source and drain junctions to complete said Flash memory cells and said PASTT devices in the manufacture of the Flash memory device.
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Abstract
A new Flash memory cell device with a parasitic surface transfer transistor (PASTT) and a method of manufacture are achieved. The device comprises, first, a semiconductor substrate. The semiconductor substrate further comprises an active area and an isolation barrier region. A source junction is in the active area. A drain junction is in the active area. A cell channel is in the active area extending from the drain junction to the source junction. A parasitic channel is in the active area on the top surface of the semiconductor substrate extending from the drain junction to the source junction. The parasitic channel is bounded on one side by the isolation barrier region and on another side by the cell channel. A floating gate comprises a first conductive layer overlying the cell channel with a tunneling oxide layer therebetween. The floating gate does not overlie the parasitic channel. A control gate comprises a second conductive layer overlying the floating gate with an interlevel dielectric layer therebetween. A parasitic surface transfer-transistor (PASTT) gate comprises the second conductive layer overlying the parasitic channel with the interlevel dielectric layer therebetween.
75 Citations
20 Claims
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1. A method to form a Flash memory device with Flash memory cells and parasitic surface transfer transistor (PASTT) devices in the manufacture of an integrated circuit device comprising:
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depositing a tunneling oxide layer overlying a semiconductor substrate;
depositing a first conductive layer overlying said tunneling oxide layer;
patterning said first conductive layer and said tunneling oxide layer to define the cell width edges of floating gates for planned Flash memory cells and to expose said semiconductor substrate where shallow trench isolations are planned;
forming temporary sidewall spacers on said cell width edges of said first conductive layer;
thereafter etching said exposed semiconductor substrate to form trenches for said planned shallow trench isolations;
depositing a trench filling oxide layer overlying said first conductive layer and said temporary sidewall spacers and filling said trenches;
polishing down said trench filling oxide layer to complete said shallow trench isolations and to thereby define active areas in said semiconductor substrate;
removing said temporary sidewall spacers to thereby expose said active areas between said shallow trench isolations and said cell width edges of said first conductive layer wherein said exposed active areas form parasitic channels and unexposed said active areas form cell channels;
thereafter ion implanting said semiconductor substrate to thereby adjust the threshold voltages of said Flash memory cells and of said PASTT devices;
thereafter depositing an interlevel dielectric layer overlying said first conductive layer and said parasitic channels;
depositing a second conductive layer overlying said interlevel dielectric layer wherein parasitic transistor gates are formed where said second conductive layer overlies said parasitic channels with said interlevel dielectric layer therebetween;
patterning said second conductive layer, said interlevel dielectric layer, said first conductive layer, and said tunneling oxide to thereby form control gates and to define the cell length edges of said floating gates for said Flash memory cells wherein floating gates are formed where said first conductive layer overlies said cell channels with said tunneling oxide layer therebetween and wherein control gates are formed where said second conductive layer overlies said floating gates with said interlevel dielectric layer therebetween; and
thereafter implanting ions into said semiconductor substrate to form source and drain junctions to complete said Flash memory cells and said PASTT devices in the manufacture of the Flash memory device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
implanting ions into said semiconductor substrate to form lightly doped regions after said step of patterning said second conductive layer, said interlevel dielectric layer, said first conductive layer, and said tunneling oxide to thereby form control gates and to define the cell length edges of said floating gates;
thereafter forming permanent sidewall spacers on said control gates and said floating gates.
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11. The method according to claim 1 further comprising:
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depositing a pad oxide layer overlying said first conductive layer after said step of depositing said first conductive layer; and
depositing a silicon nitride layer overlying said pad oxide layer prior to said step of patterning said first conductive layer and said tunneling oxide layer to define said cell width edges of floating gates.
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12. The method according to claim 11 wherein said silicon nitride layer acts as a polishing stop for said step of polishing down said trench filling oxide layer.
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13. A method to form a Flash memory device with Flash memory cells and parasitic surface transfer transistors (PASTT) devices in the manufacture of an integrated circuit device comprising:
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depositing a tunneling oxide layer overlying a semiconductor substrate;
depositing a first polysilicon layer overlying said tunneling oxide layer;
patterning said first polysilicon layer and said tunneling oxide layer to define the cell width edges of floating gates for planned Flash memory cells and to expose said semiconductor substrate where shallow trench isolations are planned;
forming temporary sidewall spacers on said cell width edges of said first polysilicon layer wherein said temporary sidewall spacers comprise silicon nitride;
thereafter etching said exposed semiconductor substrate to form trenches for said planned shallow trench isolations;
depositing a trench filling oxide layer overlying said first polysilicon layer and said temporary sidewall spacers and filling said trenches;
polishing down said trench filling oxide layer to complete said shallow trench isolations and to thereby define active areas in said semiconductor substrate;
removing said temporary sidewall spacers to thereby expose said active areas between said shallow trench isolations and said cell width edges of said first polysilicon layer wherein said exposed active areas form parasitic channels and unexposed said active areas form cell channels;
thereafter ion implanting said semiconductor substrate to thereby adjust the threshold voltages of said Flash memory cells and of said PASTT devices;
thereafter depositing an interlevel dielectric layer overlying said first polysilicon layer and said parasitic channels;
depositing a second polysilicon layer overlying said interlevel dielectric layer wherein parasitic transistor gates are formed where said second polysilicon layer overlies said parasitic channels with said interlevel dielectric layer therebetween;
patterning said second polysilicon layer, said interlevel dielectric layer, said first polysilicon layer, and said tunneling oxide to thereby form control gates and to define the cell length edges of said floating gates for said Flash memory cells wherein said floating gates are formed where said first polysilicon layer overlies said cell channels with said tunneling oxide layer therebetween and wherein said control gates are formed where said second polysilicon layer overlies said floating gates with said interlevel dielectric layer therebetween;
thereafter implanting ions into said semiconductor substrate to form lightly doped regions;
thereafter forming permanent sidewall spacers on said control gates and said floating gates; and
thereafter implanting ions into said semiconductor substrate to form source and drain junctions to complete said Flash memory cells and said PASTT devices in the manufacture of the Flash memory device. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
depositing a pad oxide layer overlying said first conductive layer after said step of depositing said first conductive layer; and
depositing a silicon nitride layer overlying said pad oxide layer prior to said step of patterning said first conductive layer and said tunneling oxide layer to define said cell width edges of floating gates.
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20. The method according to claim 19 wherein said silicon nitride layer acts as a polishing stop for said step of polishing down said trench filling oxide layer.
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Current AssigneeTaiwan Semiconductor Manufacturing Company Limited
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Original AssigneeTaiwan Semiconductor Manufacturing Company Limited
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InventorsHsu, Ching-Hsiang, Doong, Kelvin Yin-Yuh
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Primary Examiner(s)Nelms, David
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Assistant Examiner(s)Dang, Phuc T.
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Application NumberUS09/858,530Time in Patent Office446 DaysField of Search438/211, 438/257, 438/263, 438/264, 438/267, 438/288, 438/301, 438/315, 438/574US Class Current438/301CPC Class CodesG11C 2211/5641 Multilevel memory having ce...H10B 41/30 characterised by the memory...H10B 69/00 Erasable-and-programmable R...
