Method of manufacturing a field-effect transistor substantially consisting of organic materials
First Claim
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1. A method of manufacturing a field-effect transistor substantially consisting of organic materials on a substrate surface, said method comprising the steps of:
- providing an electrically insulating substrate surface, applying an organic first electrode layer accommodating a source and drain electrode and demonstrating a patchwork pattern of electrically insulating and conducting areas, applying an organic semiconducting layer, applying an organic electrically insulating layer having a thickness less than 0.3 μ
m, applying an organic second electrode layer accommodating a gate electrode.
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Abstract
A practical method of manufacturing an organic field-effect transistor is disclosed. By applying the insulating layer, preferably having a thickness of 0.3 μm or less to a substantially planar electrode layer, an organic field-effect transistor can be made having a channel length down to 2 μm, satisfying the condition for voltage amplification at voltages well below 10 V, and having an on/off ratio of about 25.
89 Citations
25 Claims
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1. A method of manufacturing a field-effect transistor substantially consisting of organic materials on a substrate surface, said method comprising the steps of:
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providing an electrically insulating substrate surface, applying an organic first electrode layer accommodating a source and drain electrode and demonstrating a patchwork pattern of electrically insulating and conducting areas, applying an organic semiconducting layer, applying an organic electrically insulating layer having a thickness less than 0.3 μ
m,applying an organic second electrode layer accommodating a gate electrode. - View Dependent Claims (2, 3, 4, 5, 6)
applying an organic radiation-sensitive layer, irradiating said radiation-sensitive layer according to a desired pattern, thereby forming an organic first electrode layer accommodating a source and drain electrode and demonstrating a patchwork pattern of irradiated electrically insulating and non-irradiated conducting areas. -
3. A method as claimed in claim 2, wherein a radiation-sensitive layer is applied which comprises an electrically conducting polyaniline and a photochemical radical initiator.
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4. A method as claimed in claim 1, wherein the organic electrically insulating layer comprises a cross-linked polymer.
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5. A method as claimed in claim 1, comprising the steps of:
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providing an electrically insulating substrate surface, applying, from solution, a first organic radiation-sensitive layer comprising a conductive polyaniline and a photochemical radical initiator, irradiating said first radiation-sensitive layer according to a desired pattern, thereby forming an organic first electrode layer accommodating a source and drain electrode and demonstrating a patchwork pattern of irradiated electrically insulating and non-irradiated conducting areas, heating the first electrode layer at a temperature sufficient to render said first electrode layer radiation-insensitive, applying, from solution, a second organic semiconducting layer comprising a polythienylenevinylene, applying, from solution, a cross-linkable polymer composition, cross-linking the cross-linkable polymer composition, thereby forming an organic electrically insulating layer comprising a cross-linked polymer composition, applying, from solution, a second organic radiation-sensitive layer comprising a conductive polyaniline and a photochemical radical initiator, irradiating said second radiation-sensitive layer according to a desired pattern, thereby forming an organic second electrode layer accommodating a gate electrode and demonstrating a patchwork pattern of irradiated electrically insulating and non-irradiated conducting areas.
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6. A method as claimed in claim 1, wherein before the semiconducting layer is applied, the electrically insulating areas of the first electrode layer are removed, thereby forming a first electrode layer demonstrating a relief pattern of conducting areas.
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7. A method of manufacturing a field-effect transistor substantially consisting of organic materials on a substrate surface, said method comprising the steps of:
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providing an electrically insulating substrate surface, applying an organic first electrode layer accomodating a source and drain electrode and demonstrating a patchwork pattern of electrically insulating and conducting areas, applying an organic semiconducting layer, applying an organic electrically insulating insulating layer of a thickness effective to satisfy the condition for voltage amplification at source drain voltages of less than 10V, applying an organic second electrode layer accomodating a gate electrode. - View Dependent Claims (8, 9, 10, 11, 12)
applying an organic radiation-sensitive layer, irradiating said radiation-sensitive layer according to a desired pattern, thereby forming an organic first electrode layer accomodating a source and drain electrode and demonstrating a patchwork pattern of irradiated electrically insulating and non-irradiated conducting areas. -
9. A method as claimed in claim 8, wherein a radiation-sensitive layer is applied which comprises an electrically conducting polyanilene and a photochemical radical initiator.
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10. A method as claimed in claim 7, wherein the organic electrically insulating layer comprises a cross-linked polymer.
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11. A method as claimed in claim 7, comprising the steps of:
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providing an electrically insulating substrate surface, applying a first organic radiation-sensitive layer comprising a conductive polyaniline and a photochemical radiation initiator, irradiating said first radiation-sensitive layer according to a desired pattern, thereby forming an organic first electrode layer accomodating a source and drain electrode and demonstrating a patchwork pattern of irradiated electrically insulating and non-irradiated conducting areas, heating the first electrode layer at a temperature sufficient to render said first electrode layer radiation-insensitive, applying a second organic semiconducting layer comprising a polythienylenevinylene, applying a cross-linkable polymer composition, cross-linking the cross-linkable polymer composition, thereby forming an organic electrically insulating layer comprising a cross-linked polymer composition, applying a second organic radiation-sensitive layer comprising a conductive polyaniline and a photochemical radical initiator, irradiating said second radiation-sensitive layer according to a desired pattern, thereby forming an organic second electrode layer accomodating a gate electrode and demonstrating a patchwork pattern of irradiated electrically insulating and non-irradiated conducting areas.
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12. A method as claimed in claim 7, wherein before the semiconducting layer is applied, the electrically insulating areas of the first electrode layer are removed, thereby forming a first electrode layer demonstrating a relief pattern of conducting areas.
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13. A method of manufacturing a field-effect transistor, said method comprising the steps of:
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providing an electrically insulating substrate surface, applying a metal first electrode layer accomodating a source and drain electrode and demonstrating a relief pattern of electrically conducting areas, applying an organic semiconducting layer, applying an organic electrically insulating layer having a thickness effective to satisfy the condition for voltage amplification at source drain voltages of 10V or less, applying an organic second electrode layer accomodating a gate electrode. - View Dependent Claims (14, 15, 16, 17, 18, 19)
applying an organic radiation-sensitive layer, irradiating said radiation-sensitive layer according to a desired pattern, thereby forming the organic second electrode layer providing the gate electrode. -
16. A method as claimed in claim 14, wherein the radiation-sensitive layer is applied by depositing a layer comprising an electrically conducting polyaniline and a photochemical radical initiator.
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17. A method as claimed in claim 14, wherein the organic electrically insulating layer comprises a cross-linked polymer.
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18. A method as claimed in claim 14, comprising the steps of:
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providing the electrically insulating substrate surface, applying the metal first electrode layer vacuum deposition of gold, said first electrode layer providing the source and the drain electrode and demonstrating the relief pattern of electrically conducting areas, applying the organic semiconducting layer by depositing a layer comprising a polytheinylenevinylene, applying a cross-linkable polymer composition comprising a polyvinylphenol, cross-linking the cross-linkable polymer compostion, thereby forming the organic electrically insulating layer comprising a cross-linked polymer, applying an organic radiation-sensitive layer by depositing a layer comprising an electrically conducting polyaniline and a photochemical radical initiator, irradiating said radiation-sensitive layer according to a desired pattern, thereby forming the organic second electrode layer providing the gate.
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19. A method as claimed in claim 14, wherein gold is used as the metal first electrode layer.
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20. A method of manufacturing a field-effect transistor substantially consisting of organic materials on a substrate surface, said method comprising the steps of:
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providing an electrically insulating substrate surface, applying an organic first electrode layer accomodating a gate electrode and demonstrating a patchwork pattern of electrically insulating and conducting areas, applying an organic insulating layer of a thickness effective to satisfy the condition for voltage amplification at source drain voltages of less than 10V, applying an organic semiconducting layer, applying an organic second electrode layer accomodating a source and a drain electrode.
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21. A method of manufacturing a field-effect transistor substantially consisting of organic material on a substrate surface, said method comprising the steps of:
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providing an electrically insulating substrate surface, providing a first organic electrode layer accomodating a gate electrode and demonstrating a patchwork pattern of electrically insulating and conductive areas, applying an organic insulating layer of a thickness effective to satisfy the condition for voltage amplification at source drain voltages of less than 10V, applying an organic second electrode layer accomodating a source and a drain electrode, applying an organic semiconducting layer.
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22. A method of manufacturing a field-effect transistor, said method comprising the steps of:
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providing an electrically insulating substrate surface, applying a metal first electrode layer accomodating a gate electrode and demonstrating a relief pattern of electrically conducting areas, applying an organic electrically insulating layer having a thickness effective to satisfy the condition for voltage amplification at source drain voltages of 10 V or less, applying an organic semiconducting layer, applying an organic second electrode layer accomodating a source and a drain electrode.
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23. A method of manufacturing a field-effect transistor, said method comprising the steps of:
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providing an electrically insulating substrate surface, applying a metal first electrode layer accomodating a gate electrode and demonstrating a relief pattern of electrically conducting areas, applying an organic electrically insulating layer of a thickness effective to satisfy the condition for voltage amplification at source drain voltages of less than 10V, applying an organic second electrode layer, accomodating a source and a drain electrode, applying an organic semiconducting layer.
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24. A method of manufacturing a field effect transistor substantially consisting of organic material on a substrate surface, said method comprising the steps of:
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providing an electrically insulating substrate surface, applying a first electrode organic layer accomodating a gate electrode, applying an organic electrically insulating layer having a thickness less than 0.3 μ
m,applying an organic semiconductor layer, applying a second electrode organic layer accomodating a source and a drain electrode and demonstrating a patchwork pattern of electrically insulating and conducting layers.
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25. A method of manufacturing a field effect transistor substantially consisting of organic materials on a substrate surface, said method comprising the steps of:
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providing an electrically insulating substrate surface, applying a first electrode organic layer accomodating a gate electrode, applying an organic electrically insulating layer having a thickness less than 0.3 μ
m,applying a second electrode organic layer accomodating a source and a drain electrode and demonstrating a patchwork pattern of electrically insulating and conducting layers, applying an organic semiconducting layer.
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Specification
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Current AssigneeSamsung Electronics Co. Ltd.
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Original AssigneeKoninklijke Philips Electronics N.V. (Koninklijke Philips N.V.)
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InventorsMutsaers, Cornelius M. J., de Leeuw, Dagobert M., Drury, Christopher J.
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Primary Examiner(s)CRANE, SARA W
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Application NumberUS09/135,416Time in Patent Office1,450 DaysField of Search257/40, 257/410, 257/613, 257/741, 438/99US Class Current257/40CPC Class CodesH10K 10/464 Lateral top-gate IGFETs com...H10K 10/468 characterised by the gate d...H10K 85/10 Organic polymers or oligomersH10K 85/111 comprising aromatic, hetero...H10K 85/113 Heteroaromatic compounds co...
