Microcap wafer-level package

• US 6,429,511 B2
• Filed: 10/01/2001
• Issued: 08/06/2002
• Est. Priority Date: 07/23/1999
• Status: Expired due to Term

• Current Assignee: Avago Technologies International Sales Pte Limited (Broadcom, Inc.)
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Ruby, Richard C., Geefay, Frank S., Desai, Yogesh M., Bell, Tracy E.
• Primary Examiner(s): Talbott, David L.
• Assistant Examiner(s): Cruz, Lourdes
• Application Number:
  US09/969,432
• Publication Number:
  US 20020017713A1
• Time in Patent Office: 309 Days
• Field of Search: 257/704, 257/685, 257/686, 257/723, 257/724, 257/725, 257/730, 257/777, 439/106, 439/109, 174/52.1, 174/52.2, 174/52.3, 174/52.4
• US Class Current: 257/704
• CPC Class Codes: B81B 2207/095 through the lid
• CPC Class Codes: B81C 1/00301 Connecting electric signal lines from the MEMS device with external electrical signal lines, e.g. through vias
• CPC Class Codes: H01L 2224/48463 the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/01078 Platinum [Pt]
• CPC Class Codes: H01L 2924/01079 Gold [Au]
• CPC Class Codes: H01L 2924/10253 Silicon [Si]

Abstract

A microcap wafer-level package is provided in which a micro device is connected to bonding pads on a base wafer. A peripheral pad on the base wafer encompasses the bonding pads and the micro device. A cap wafer has gaskets formed thereon using a thick photoresist semiconductor photolithographic process. Bonding pad gaskets match the perimeters of the bonding pads and a peripheral pad gasket matches the peripheral pad on the base wafer. Wells are located inside the perimeters of the bond pad gaskets and are formed to a predetermined depth in the cap wafer. The cap wafer is then placed over the base wafer to cold weld bond the gaskets to the pads and form a hermetically sealed volume between the bonding pad gaskets and the peripheral pad gasket. The cap wafer is then thinned below the predetermined depth until the wells become through holes that provide access to the bonding pads inside the package, but outside the hermetically sealed volume, for connecting wires from a micro device utilizing system.

Claims

1. A wafer package comprising:

a base wafer having a bonding pad and a peripheral pad formed thereon, said peripheral pad encompassing said bonding pad;

a cap wafer having a bonding pad seal and a peripheral pad seal formed thereon, said bonding pad seal bonding around the perimeter of said bonding pad and said peripheral pad seal bonding with said peripheral pad to define a hermetically sealed volume between said cap wafer and said base wafer, said cap wafer defining a through hole therein positioned over said bonding pad, said through hole providing access to said bonding pad; and

a micro device associated with at least one of said wafers, said micro device being disposed inside said peripheral pad seal and outside said bonding pad seal in said hermetically sealed volume, said micro device in conductive contact with said bonding pad.

2. The wafer package as claimed in claim 1 including:

a seed layer in said through hole conductively connected to said bonding pad by said bonding pad seal.

3. The wafer package as claimed in claim 2 including:

an outside bonding pad connected to said seed layer in said through hole conductively connected to said bonding pad by said seed layer.

4. The wafer package as claimed in claim 3 wherein:

said outside bonding pad is offset from said through hole.

5. The wafer package as claimed in claim 4 including:

a micro device utilizing device connected to said outside bonding whereby said micro device utilizing device is connected to said micro device.

6. The wafer package as claimed in claim 1 wherein:

said cap wafer defines a recess located above said micro device whereby a tall micro device is accommodated.

7. The wafer package as claimed in claim 1 including:

a micro device utilizing system; and

a connection between said micro device utilizing system and said bonding pad on said base wafer through said through hole in said cap wafer.

8. The wafer package as claimed in claim 1 wherein:

said cap wafer and said base wafer are of the same material; and

said bonding pad seal and said peripheral seal include a material selected from a group consisting of gold, silicon, indium, aluminum, copper, silver, an alloy thereof, and a compound thereof.

9. The wafer package as claimed in claim 1 wherein:

said micro device is selected from a group consisting of an active device, a passive device, and a combination thereof.

10. The wafer package as claimed in claim 1 wherein:

said micro device is an integrated circuit in one of said wafers.