Apparatus for improving image depth resolution in a magnetic field imaging apparatus
First Claim
1. A magnetic field imaging apparatus for sensing a magnetic field generated by current flowing in a semiconductor device, the magnetic field imaging apparatus comprising a support and first and second sensing devices mounted to the support, the first and second sensing devices provided for sensing a magnetic field generated by current flowing in the semiconductor device, the support and the semiconductor device being capable of relative movement, the first and second sensing devices being focused at a chosen focal point relative to the support.
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Accused Products
Abstract
A magnetic field imaging apparatus for sensing a magnetic field generated by current flowing in the semiconductor device includes a pair of sensing devices which may be focused at a chosen depth in a semiconductor device. The sensing devices may be movable so that they may be focused at different focal points. The apparatus may also include three or more sensing devices, which can be chosen to operate in tears to define a variety of focus depths in a semiconductor device.
6 Citations
8 Claims
- 1. A magnetic field imaging apparatus for sensing a magnetic field generated by current flowing in a semiconductor device, the magnetic field imaging apparatus comprising a support and first and second sensing devices mounted to the support, the first and second sensing devices provided for sensing a magnetic field generated by current flowing in the semiconductor device, the support and the semiconductor device being capable of relative movement, the first and second sensing devices being focused at a chosen focal point relative to the support.
Specification