Critical dimension analysis with simultaneous multiple angle of incidence measurements

• US 6,429,943 B1
• Filed: 03/27/2001
• Issued: 08/06/2002
• Est. Priority Date: 03/29/2000
• Status: Expired due to Term

• Current Assignee: The Therma-Wave Incorporated (KLA Corporation)
• Original Assignee: The Therma-Wave Incorporated (KLA Corporation)
• Inventors: Opsal, Jon, Rosencwaig, Allan
• Primary Examiner(s): Rosenberger, Richard A.
• Application Number:
  US09/818,703
• Time in Patent Office: 497 Days
• Field of Search: 356/636, 356/512, 356/513, 356/514, 356/625
• US Class Current: 356/625
• CPC Class Codes: G01B 11/02 for measuring length, width or thickness G01B11/08 takes precedence
• CPC Class Codes: G01B 11/024 by means of diode-array scanning
• CPC Class Codes: G01B 11/14 for measuring distance or clearance between spaced objects or spaced apertures G01B11/26 takes precedence; rangefinders G01C3/00
• CPC Class Codes: G03F 7/70625 Dimensions, e.g. line width, critical dimension [CD], profile, sidewall angle or edge roughness

Abstract

A method and apparatus are disclosed for evaluating relatively small periodic structures formed on semiconductor samples. In this approach, a light source generates a probe beam which is directed to the sample. In one preferred embodiment, an incoherent light source is used. A lens is used to focus the probe beam on the sample in a manner so that rays within the probe beam create a spread of angles of incidence. The size of the probe beam spot on the sample is larger than the spacing between the features of the periodic structure so some of the light is scattered from the structure. A detector is provided for monitoring the reflected and scattered light. The detector includes multiple detector elements arranged so that multiple output signals are generated simultaneously and correspond to multiple angles of incidence. The output signals are supplied to a processor which analyzes the signals according to a scattering model which permits evaluation of the geometry of the periodic structure. In one embodiment, the sample is scanned with respect to the probe beam and output signals are generated as a function of position of the probe beam spot.

Claims

1. An apparatus for evaluating the geometry of a periodic structure formed on a sample comprising:

an incoherent light source for generating a probe beam;

an optical element for focusing the probe beam to a spot on the sample surface in a manner so that the rays within the probe beam create a spread of angles of incidence and wherein the spot size on the sample is larger than the spacing between the features of the periodic structure so that the probe beam is diffracted upon reflection;

a detector array for monitoring the light of the probe beam diffracted from the periodic structure, said detector array simultaneously generating a plurality of independent output signals corresponding to a plurality of different angles of incidence; and

a processor for evaluating the geometry of the periodic structure on the sample based on the output signals generated by the detector.

2. An apparatus as recited in claim 1 wherein said light source is polychromatic.

3. An apparatus as recited in claim 2 further including a wavelength selective filter located between the light source and the detector array.

4. An apparatus as recited in claim 3 wherein said wavelength selective filter is a monochrometer.

5. An apparatus as recited in claim 4 wherein the detector array generates output signals corresponding to a plurality of wavelengths.

6. An apparatus as recited in claim 2 further including a dispersive element for spreading the wavelengths of light in the probe beam being diffracted from the sample and wherein the detector array is arranged to simultaneously generate output signals at multiple wavelengths.

7. An apparatus as recited in claim 1 wherein at least twenty repetitive features of the periodic structure are imaged by the detector array.

8. An apparatus as recited in claim 1 wherein the size of the probe beam spot is illuminates at least twenty repetitive features of the periodic structure.

9. An apparatus as recited in claim 1 further including an analyzer and wherein the processor determines the change in polarization state of the rays within the probe beam to evaluate the geometry of the periodic structure on the sample.

10. An apparatus as recited in claim 1 wherein the optical element for focusing the probe beam is a lens.

11. An apparatus as recited in claim 1 wherein the probe beam is directed substantially normal to the sample.

12. An apparatus as recited in claim 1 wherein the processor functions to generate a set of theoretical output signals based on a theoretical profile of the periodic structure and wherein the theoretical output signals are compared with the actual output signals and thereafter, the processor generates another set of theoretical output signals based on the comparison and using a different theoretical profile of the periodic structure and wherein the comparison and generation steps are repeated until the differences between the theoretical output signals and the actual output signals are minimized.

13. An apparatus as recited in claim 1 wherein the processor compares the output signals to a set of previously generated theoretical output signals to find the closest match and wherein each one of the set of previously generated output signals corresponds to a different possible geometry of the periodic structure.

14. An apparatus as recited in claim 1 wherein the processor compares the output signals to a predetermined set of output signals to determine if a process is within specified tolerances.

15. An apparatus as recited in claim 1 wherein the probe beam spot is scanned with respect to the periodic structure and output signals are generated as a function of position.

16. An apparatus as recited in claim 15 wherein said processor filters the output signals generated during the scan using a repeated sequence of averaging and outlier exclusions wherein the outliers are defined by their differences with respect to signal levels and symmetry properties.

17. An apparatus for evaluating the geometry of a periodic structure formed on a sample comprising:

an incoherent light source for generating a probe beam;

an optical element for focusing the probe beam to a spot on the sample surface in a manner so that the rays within the probe beam create a spread of angles of incidence and wherein the spot size on the sample is larger than the spacing between the features of the periodic structure so that the probe beam is diffracted upon reflection;

detector means for monitoring the light of the probe beam diffracted from the periodic structure, said detector means for simultaneously generating a plurality of independent output signals corresponding to a plurality of different angles of incidence; and

a processor for evaluating the geometry of the periodic structure on the sample based on the output signals generated by the detector.

18. An apparatus as recited in claim 17 wherein said light source is polychromatic.

19. An apparatus as recited in claim 18 further including a wavelength selective filter located between the light source and the detector means.

20. An apparatus as recited in claim 19 wherein said wavelength selective filter is a monochrometer.

21. An apparatus as recited in claim 20 wherein the detector means generates output signals corresponding to a plurality of wavelengths.

22. An apparatus as recited in claim 18 further including a dispersive element for spreading the wavelengths of light in the probe beam being diffracted from the sample and wherein the detector means is arranged to simultaneously generate output signals at multiple wavelengths.

23. An apparatus as recited in claim 17 wherein at least twenty repetitive features of the periodic structure are imaged by the detector means.

24. An apparatus as recited in claim 17 wherein the size of the probe beam spot is illuminates at least twenty repetitive features of the periodic structure.

25. An apparatus as recited in claim 17 further including an analyzer and wherein the processor determines the change in polarization state of the rays within the probe beam to evaluate the geometry of the periodic structure on the sample.

26. An apparatus as recited in claim 17 wherein the optical element for focusing the probe beam is a lens.

27. An apparatus as recited in claim 17 wherein the probe beam is directed substantially normal to the sample.

28. An apparatus as recited in claim 17 wherein the processor functions to generate a set of theoretical output signals based on a theoretical profile of the periodic structure and wherein the theoretical output signals are compared with the actual output signals and thereafter, the processor generates another set of theoretical output signals based on the comparison and using a different theoretical profile of the periodic structure and wherein the comparison and generation steps are repeated until the differences between the theoretical output signals and the actual output signals are minimized.

29. An apparatus as recited in claim 17 wherein the processor compares the output signals to a set of previously generated theoretical output signals to find the closest match and wherein each one of the set of previously generated output signals corresponds to a different possible geometry of the periodic structure.

30. An apparatus as recited in claim 17 wherein the processor compares the output signals to a predetermined set of output signals to determine if a process is within specified tolerances.

31. An apparatus as recited in claim 17 wherein the probe beam spot is scanned with respect to the periodic structure and output signals are generated as a function of position.

32. An apparatus as recited in claim 31 wherein said processor filters the output signals generated during the scan using a repeated sequence of averaging and outlier exclusions wherein the outliers are defined by their differences with respect to signal levels and symmetry properties.

33. A method for evaluating the geometry of a periodic structure formed on a sample comprising the steps of:

focusing a probe beam of incoherent radiation to a spot on the sample surface in a manner so that the rays within the probe beam create a spread of angles of incidence and wherein the spot size on the sample is larger than the spacing between the features of the periodic structure so that the probe beam is diffracted upon reflection;

monitoring the light of the probe beam diffracted from the periodic structure and simultaneously generating a plurality of independent output signals corresponding to a plurality of different angles of incidence; and

evaluating the geometry of the periodic structure on the sample based on the output signals.

34. A method as recited in claim 33 wherein probe beam is generated by a polychromatic light source.

35. A method as recited in claim 34 wherein a wavelength selective is filter located in the path of the probe beam.

36. A method as recited in claim 35 wherein said wavelength selective filter is a monochrometer.

37. A method as recited in claim 34 wherein the output signals correspond to a plurality of wavelengths.

38. A method as recited in claim 37 the output signals are generated at multiple wavelengths simultaneously.

39. A method as recited in claim 33 wherein the monitored probe beam light has illuminated at least twenty repetitive features of the periodic structure.

40. A method as recited in claim 33 wherein the size of the probe beam spot illuminates at least twenty repetitive features of the periodic structure.

41. A method as recited in claim 33 wherein the probe beam is passed through an analyzer and wherein the change in polarization state of the rays within the probe beam are monitored.

42. A method as recited in claim 33 wherein the step of evaluating the geometry of the periodic structure includes generating a set of theoretical output signals based on a theoretical profile of the periodic structure and wherein the theoretical output signals are compared with the actual output signals and thereafter generating another set of theoretical output signals based on the comparison and using a different theoretical profile of the periodic structure and wherein the comparison and generation steps are repeated until the differences between the theoretical output signals and the actual output signals are minimized.

43. A method as recited in claim 33 wherein the step of evaluating the geometry of the periodic structure includes comparing the output signals to a set of previously generated theoretical output signals to find the closest match and wherein each one of the set of previously generated output signals corresponds to a different possible geometry of the periodic structure.

44. A method as recited in claim 33 wherein the step of evaluating the geometry of the periodic structure includes comparing the output signals to a predetermined set of output signals to determine if a process is within specified tolerances.

45. A method as recited in claim 33 wherein the probe beam spot is scanned with respect to the periodic structure and output signals are generated as a function of position.

46. A method as recited in claim 45 wherein the step of evaluating the geometry of the periodic structure includes filtering the output signals generated during the scan using a repeated sequence of averaging and outlier exclusions wherein the outliers are defined by their differences with respect to signal levels and symmetry properties.

47. An apparatus for evaluating the geometry of a periodic structure formed on a sample comprising:

a light source for generating a probe beam;

an optical element for focusing the probe beam to a spot on the sample surface in a manner so that the rays within the probe beam create a spread of angles of incidence and wherein the spot size on the sample is larger than the spacing between the features of the periodic structure so that the probe beam is diffracted upon reflection;

a detector array for monitoring the light of the probe beam diffracted from the periodic structure, said detector array simultaneously generating a plurality of independent output signals corresponding to a plurality of different angles of incidence;

a movable stage for supporting the sample and permitting relative movement between the sample and the probe beam so that output signals can be generating as a function of position; and

a processor for evaluating the geometry of the periodic structure on the sample based on the output signals generated by the detector.

48. An apparatus as recited in claim 47 wherein the light source is a laser beam.

49. An apparatus as recited in claim 47 wherein said processor filters the output signals using a repeated sequence of averaging and outlier exclusions wherein the outliers are defined by their differences with respect to signal levels and symmetry properties.

50. An apparatus as recited in claim 47 wherein said light source is an incoherent, polychromatic source.

51. An apparatus as recited in claim 50 further including a wavelength selective filter located between the light source and the detector array.

52. An apparatus as recited in claim 51 wherein said wavelength selective filter is a monochrometer.

53. An apparatus as recited in claim 52 wherein the detector array generates output signals corresponding to a plurality of wavelengths.

54. An apparatus as recited in claim 50 further including a dispersive element for spreading the wavelengths of light in the probe beam being diffracted from the sample and wherein the detector array is arranged to simultaneously generate output signals at multiple wavelengths.

55. An apparatus as recited in claim 47 wherein at least twenty repetitive features of the periodic structure are imaged by the detector array.

56. An apparatus as recited in claim 47 further including an analyzer and wherein the processor determines the change in polarization state of the rays within the probe beam to evaluate the geometry of the periodic structure on the sample.

57. An apparatus as recited in claim 47 wherein the optical element for focusing the probe beam is a lens.

58. An apparatus as recited in claim 47 wherein the probe beam is directed substantially normal to the sample.

59. An apparatus as recited in claim 47 wherein the processor functions to generate a set of theoretical output signals based on a theoretical profile of the periodic structure and wherein the theoretical output signals are compared with the actual output signals and thereafter, the processor generates another set of theoretical output signals based on the comparison and using a different theoretical profile of the periodic structure and wherein the comparison and generation steps are repeated until the differences between the theoretical output signals and the actual output signals are minimized.

60. An apparatus as recited in claim 47 wherein the processor compares the output signals to a set of previously generated theoretical output signals to find the closest match and wherein each one of the set of previously generated output signals corresponds to a different possible geometry of the periodic structure.

61. An apparatus as recited in claim 47 wherein the processor compares the output signals to a predetermined set of output signals to determine if a process is within specified tolerances.

62. A method for evaluating the geometry of a periodic structure formed on a sample comprising the steps of:

focusing a probe beam of radiation to a spot on the sample surface in a manner so that the rays within the probe beam create a spread of angles of incidence and wherein the spot size on the sample is larger than the spacing between the features of the periodic structure so that the probe beam is diffracted upon reflection;

translating the sample with respect to the probe beam;

monitoring the light of the probe beam diffracted from the periodic structure and simultaneously generating a plurality of independent output signals corresponding to a plurality of different angles of incidence as a function of position of the probe beam with respect to the periodic structure; and

evaluating the geometry of the periodic structure on the sample based on the output signals.

63. A method as recited in claim 62, wherein the probe beam is generated by a laser.

64. A method as recited in claim 62 wherein the step of evaluating the geometry of the periodic structure includes filtering the output signals generated using a repeated sequence of averaging and outlier exclusions wherein the outliers are defined by their differences with respect to signal levels and symmetry properties.

65. A method as recited in claim 62, wherein the probe beam is generated by an incoherent polychromatic source.

66. A method as recited in claim 65 wherein a wavelength selective filter is located in the path of the probe beam.

67. A method as recited in claim 66 wherein said wavelength selective filter is a monochrometer.

68. A method as recited in claim 65 wherein the output signals correspond to a plurality of wavelengths.

69. A method as recited in claim 68 the output signals are generated at multiple wavelengths simultaneously.

70. A method as recited in claim 62 wherein the monitored probe beam light has illuminated at least twenty repetitive features of the periodic structure.

71. A method as recited in claim 62 wherein the probe beam is passed through an analyzer and wherein the change in polarization state of the rays within the probe beam are monitored.

72. A method as recited in claim 62 wherein the step of evaluating the geometry of the periodic structure includes generating a set of theoretical output signals based on a theoretical profile of the periodic structure and wherein the theoretical output signals are compared with the actual output signals and thereafter generating another set of theoretical output signals based on the comparison and using a different theoretical profile of the periodic structure and wherein the comparison and generation steps are repeated until the differences between the theoretical output signals and the actual output signals are minimized.

73. A method as recited in claim 62 wherein the step of evaluating the geometry of the periodic structure includes comparing the output signals to a set of previously generated theoretical output signals to find the closest match and wherein each one of the set of previously generated output signals corresponds to a different possible geometry of the periodic structure.

74. A method as recited in claim 62 wherein the step of evaluating the geometry of the periodic structure includes comparing the output signals to a predetermined set of output signals to determine if a process is within specified tolerances.

75. An apparatus for evaluating the geometry of a periodic structure formed on a sample comprising:

a light source for generating a probe beam;

an optical element for focusing the probe beam to a spot on the sample surface in a manner so that the rays within the probe beam create a spread of angles of incidence and wherein the spot size on the sample is larger than the spacing between the features of the periodic structure so that the probe beam is diffracted upon reflection;

detector means for monitoring the light of the probe beam diffracted from the periodic structure, said detector means simultaneously generating a plurality of independent output signals corresponding to a plurality of different angles of incidence;

means for create relative movement between the sample and the probe beam so that output signals can be generating as a function of position; and

a processor for evaluating the geometry of the periodic structure on the sample based on the output signals generated by the detector.

76. An apparatus as recited in claim 75 wherein the light source is a laser beam.

77. An apparatus as recited in claim 76 wherein said processor filters the output signals using a repeated sequence of averaging and outlier exclusions wherein the outliers are defined by their differences with respect to signal levels and symmetry properties.

78. An apparatus as recited in claim 75 wherein said light source is an incoherent, polychromatic source.

79. An apparatus as recited in claim 78 further including a wavelength selective filter located between the light source and the detector means.

80. An apparatus as recited in claim 78 wherein the detector means generates output signals corresponding to a plurality of wavelengths.

81. An apparatus as recited in claim 75 further including an analyzer and wherein the processor determines the change in polarization state of the rays within the probe beam to evaluate the geometry of the periodic structure on the sample.

82. An apparatus as recited in claim 75 wherein the processor functions to generate a set of theoretical output signals based on a theoretical profile of the periodic structure and wherein the theoretical output signals are compared with the actual output signals and thereafter, the processor generates another set of theoretical output signals based on the comparison and using a different theoretical profile of the periodic structure and wherein the comparison and generation steps are repeated until the differences between the theoretical output signals and the actual output signals are minimized.

83. An apparatus as recited in claim 75 wherein the processor compares the output signals to a set of previously generated theoretical output signals to find the closest match and wherein each one of the set of previously generated output signals corresponds to a different possible geometry of the periodic structure.

84. An apparatus as recited in claim 75 wherein the processor compares the output signals to a predetermined set of output signals to determine if a process is within specified tolerances.