Acoustic 3D analysis of circuit structures
First Claim
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1. A method for analyzing an integrated circuit, wherein the circuit has circuitry in a circuit side opposite a back side, the method comprising:
- removing substrate from the back side and exposing a target region;
directing a laser at the target region and generating local heating in the integrated circuit;
detecting acoustic energy propagation in the integrated circuit via at least two acoustic energy detectors;
using the detected acoustic energy at each acoustic energy detector to generate parameters; and
using the acoustic energy detected at each detector to locate at least one defect in the circuit as a function of the parameters.
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Abstract
According to an example embodiment, the present invention is directed to a system and method for analyzing an integrated circuit. A laser is directed to the back side of an integrated circuit and causes local heating, which generates acoustic energy in the circuit. The acoustic energy propagation in the integrated circuit is detected via at least two detectors. Using the detected acoustic energy from the detectors, at least one circuit defect is detected and located.
24 Citations
22 Claims
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1. A method for analyzing an integrated circuit, wherein the circuit has circuitry in a circuit side opposite a back side, the method comprising:
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removing substrate from the back side and exposing a target region;
directing a laser at the target region and generating local heating in the integrated circuit;
detecting acoustic energy propagation in the integrated circuit via at least two acoustic energy detectors;
using the detected acoustic energy at each acoustic energy detector to generate parameters; and
using the acoustic energy detected at each detector to locate at least one defect in the circuit as a function of the parameters. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
pulsing the laser several times; and
making a series of phase measurements for each pulse via the at least two detectors.
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14. A method for analyzing an integrated circuit, according to claim 13, wherein making a series of phase measurements includes making measurements for different frequencies.
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15. A method for analyzing an integrated circuit, according to claim 1, further comprising adjusting the wavelength of the laser and directing acoustic energy to target circuitry.
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16. A method for analyzing an integrated circuit, according to claim 15, wherein the target circuitry is located at a depth into the substrate, and wherein the wavelength is adjusted to direct energy at that depth.
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17. A system for analyzing an integrated circuit having circuitry in a circuit side opposite a back side, the system comprising:
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means for removing substrate from the back side;
a laser device adapted to generate acoustic energy in the integrated circuit, affecting circuit activity means for detecting acoustic energy propagation in the integrated circuit via at least two locations;
means for using the detected acoustic energy propagation to generate a parameter; and
means for detecting at least one defect in the circuit based on the geterated parameter.
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18. A system for analyzing an integrated circuit having circuitry in a circuit side opposite a back side, the system comprising:
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a substrate removal device;
a laser configured and arranged to generate acoustic energy in the integrated circuit affecting circuit activity;
at least two acoustic energy detectors to detect acoustic energy in the integrated circuit; and
a computer configured and arranged to use detected acoustic energy and generate a parameter that is used to locate at least one defect in the integrated circuit. - View Dependent Claims (19, 20, 21, 22)
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Specification