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Micro-mirror apparatus and production method therefor

  • US 6,431,714 B1
  • Filed: 10/05/2001
  • Issued: 08/13/2002
  • Est. Priority Date: 10/10/2000
  • Status: Active Grant
First Claim
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1. A micro-mirror apparatus comprising:

  • a mirror;

    a plurality of torsion springs which supports the mirror so as to be tiltable relative to an upper substrate;

    a lower substrate arranged facing a lower face of the mirror;

    a convex portion provided on an upper face of the lower substrate and facing a central portion of the mirror; and

    a plurality of lower electrodes formed on an outer face of the convex portion.

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