Semiconductor device having a sensor with the temperature compensation function

• US 6,433,615 B2
• Filed: 06/14/2001
• Issued: 08/13/2002
• Est. Priority Date: 12/15/1998
• Status: Expired due to Term

• Current Assignee: Asahi Kasei Kabushiki Kaisha (Asahi Kasei Corporation)
• Original Assignee: Asahi Kasei Kabushiki Kaisha (Asahi Kasei Corporation)
• Inventors: Fiedler, Horst-Lothar, Nagano, Shuichi
• Primary Examiner(s): Cunningham, Terry D.
• Application Number:
  US09/879,904
• Publication Number:
  US 20010040241A1
• Time in Patent Office: 425 Days
• Field of Search: 327/20, 327/52, 327/63, 327/17, 327/512, 327/513, 327/530
• US Class Current: 327/513
• CPC Class Codes: G01D 3/02 with provision for altering or correcting the law of variation
• CPC Class Codes: G01K 7/21 for modifying the output characteristic, e.g. linearising
• CPC Class Codes: G01P 21/02 of speedometers

Abstract

A sensor 1 produces an output that changes linearly with absolute temperature. In response to the output, a reference voltage generator 13 produces reference voltages Vhigh and Vlow that change linearly with absolute temperature. A Schmidt trigger 14 compares the output signal from a sensor signal amplifier 12 with the reference voltages for performing on-off output. A sensor signal amplifier 12 with a temperature-independent amplification factor amplifies the output signal from the sensor 1 while performing offset compensation. A sensor signal processing circuit 2 is formed out of thin-film silicon disposed on an insulating substrate. The output from the sensor 1 undergoes accurate temperature compensation over a wide temperature range from a low temperature to a high temperature, achieving a reliable operation with accuracy at high temperature.

Claims

1. A semiconductor device comprising:

amplifying means for receiving a sensor output signal from a sensor, amplifying the sensor output signal at a required temperature-independent amplification factor, and canceling an offset,

reference signal producing means for producing a reference signal varying at a temperature coefficient equal to that of the sensor signal from said sensor,

comparing means which compares a magnitude of an amplification output signal from said amplifying means with that of the reference signal from said reference signal producing means and outputs a required signal according to a comparison result, and

constant voltage generating means for generating temperature-independent constant voltage to be supplied to said sensor,

characterized in that said amplifying means, said reference signal producing means, said comparing means, and said constant voltage generating means are formed using a semiconductor layer provided on an insulating substrate.

2. The semiconductor device according to claim 1, characterized in that said semiconductor layer is composed of a silicon thin film.

3. The semiconductor device according to claim 2, characterized in that said silicon thin film is 30 nm to 1000 nm in thickness.

4. The semiconductor device according to claim 1, 2, or 3, characterized in that said reference signal producing means is based on the previous measurement of a temperature coefficient of the sensor output signal of said sensor and produces a reference signal having an equal temperature coefficient.

5. The semiconductor device according to claim 4, characterized in that said reference signal changes linearly with absolute temperature.

6. The semiconductor device according to claim 1, characterized in that said amplifying means includes signal amplifying means which is composed of a plurality of operational amplifiers and amplifies said sensor output signal at a temperature-independent amplification factor, and

offset compensating means for compensating for each offset of said plurality of operational amplifiers every predetermined period.

7. The semiconductor device according to claim 6, characterized in that said operational amplifier includes a differential amplifying section for performing differential amplification on said sensor output signal and

an offset compensating section for canceling an offset voltage of said differential amplifying section,

and said offset compensating section receives an offset compensating signal according to an offset voltage of said differential amplifying section every predetermined period and cancels the offset voltage of said differential amplifying section in response to the offset compensation signal.

8. The semiconductor device according to claim 7, characterized in that said offset compensation section further includes a capacitor, which holds a voltage for canceling an offset voltage of said differential amplifying section,

and said capacitor periodically holds a voltage according to the offset voltage of said differential amplifying section, and said offset compensating section cancels the offset voltage of said differential amplifying section according to the held voltage.

9. The semiconductor device according to claim 1, characterized in that said comparing means compares a magnitude of an amplification output signal from said amplifying means with those of two reference voltages, and the output is turned on/off according to a comparison result.

10. The semiconductor device according to claim 1, characterized in that said comparing means computes a ratio of a magnitude of reference voltage between that of the amplification output signal from said amplifying means and outputs a digital signal according to the ratio.

11. The semiconductor device according to claim 1, characterized in that said reference signal producing means includes at least a constant voltage source for generating temperature-independent constant voltage and

a constant current source for generating constant current being directly proportional to absolute temperature and inversely proportional to the resistance of a reference resistor,

and said reference signal producing means produces two reference voltage changing linearly with absolute temperature, according to the constant voltage generated in said constant voltage source and the constant current generated in said constant current source.

12. The semiconductor device according to claim 1, characterized in that said reference signal producing means includes a first constant current source for generating a constant current being directly proportional to absolute temperature and inversely proportional to the resistance of reference resistor,

a second constant current source which is connected in series to said first constant current source and generates constant current by applying temperature-independent constant voltage to voltage/current converting resistor.

a third constant current source for generating constant current being fixed times larger than a different between a current of the second constant current source and a current of said first constant current source, and

an upper limit reference voltage generating resistor and a lower limit reference voltage generating resistor which are connected in series to said third constant current source and are applied constant current from said third constant current source,

and one or both of potentials generated in said upper limit reference voltage generating resistor and said lower limit reference voltage generating resistor are taken out as reference potentials.

13. The semiconductor device according to claim 12, characterized in that said reference resistor, said voltage/current converting resistor, said upper limit reference voltage generating resistor, and said lower limit reference voltage generating resistor are equal to one another in temperature coefficient.

14. A semiconductor device comprising a sensor which converts a measured physical quantity to an electric signal and outputs the signal, which has a peculiar temperature coefficient,

amplifying means which receives a sensor output signal of said sensor, amplifies the sensor output signal at a required amplification factor of temperature independence, and cancels an offset,

reference signal producing means for producing a reference signal varying at a temperature coefficient equal to that of the sensor output signal of said sensor,

comparing means for comparing a magnitude of the amplification output signal from said amplifying means with a magnitude of the reference signal from said reference signal producing means and for outputting a required signal according to a comparison result, and

constant voltage generating means for generating temperature-independent constant voltage to be supplied to said sensor,

characterized in that said amplifying means, said reference signal producing means, said comparing means, and said constant voltage generating means are formed using a semiconductor layer provided on an insulating substrate.

15. The semiconductor device according to claim 14, characterized in that said semiconductor layer is a silicon thin film.

16. The semiconductor device according to claim 15, characterized in that said silicon thin film is 30 nm to 1000 nm in thickness.

17. The semiconductor device according to claim 14, 15, or 16, characterized in that a sensor output signal has a peculiar temperature coefficient in said sensor and the sensor output signal is produced in a linear function of absolute temperature.

18. The semiconductor device according to claim 14, characterized in that said sensor is a magnetic sensor.

19. The semiconductor device according to claim 18, characterized in that said magnetic sensor is a Hall element.

20. The semiconductor device according to claim 19, characterized in that said Hall element has a magnetic sensitive part made of GaAs.

21. The semiconductor device according to claim 14, characterized in that said reference signal producing means is based on the previous measurement of a temperature coefficient of the sensor output signal of said sensor and produces a reference signal having an equal temperature coefficient.

22. The semiconductor device according to claim 21, characterized in that said reference signal changes linearly with absolute temperature.

23. The semiconductor device according to claim 14, characterized in that said amplifying means includes signal amplifying means which is composed of a plurality of operational amplifies and amplifies a sensor output signal at a temperature-independent amplification factor, and

offset compensating means for compensating for each offset of said plurality of operational amplifiers every predetermined period.

24. The semiconductor device according to claim 23, characterized in that said operational amplifier includes a differential amplifying section for performing differential amplification on said sensor output signal and

an offset compensating section for canceling an offset voltage of said differential amplifying section,

and said offset compensating section receives an offset compensating signal according to an offset voltage of said differential amplifying section every predetermined period and cancels the offset voltage of said differential amplifying section in response to the offset compensation signal.

25. The semiconductor device according to claim 24, characterized in that said offset compensation section further includes a capacitor, which holds voltage for canceling an offset voltage of said differential amplifying section,

and said capacitor periodically holds a voltage according to the offset voltage of said differential amplifying section, and said offset compensating section cancels the offset voltage of said differential amplifying section according to the held voltage.

26. The semiconductor device according to claim 14, characterized in that said comparing means compares a magnitude of an amplification output signal from said amplifying means with the magnitudes of two reference voltages, and the output is turned on/off according to a comparison result.

27. The semiconductor device according to claim 14, characterized in that said comparing means computes a ratio of a magnitude of reference voltage between that of the amplification output signal from said amplifying means and outputs a digital signal according to the ratio.

28. The semiconductor device according to claim 14, characterized in that said reference signal producing means includes at least a constant voltage source for generating temperature-independent constant voltage and

a constant current source for generating constant current being directly proportional to absolute temperature and inversely proportional to the magnitude of a reference resistor,

and said reference signal producing means produces two reference voltages changing linearly with absolute temperature, according to the constant voltage generated in said constant voltage source and the constant current generated in said constant current source.

29. The semiconductor device according to claim 14, characterized in that said reference signal producing means includes a first constant current source for generating a constant current being directly proportional to absolute temperature and inversely proportional to a magnitude of reference resistor,

a second constant current source which is connected in series to said first constant current source and generates constant current b applying temperature-independent constant voltage to a voltage/current converting resistor,

a third constant current source for generating constant current being fixed times larger than a difference between a current of the second constant current source and a current of said first constant current source, and

an upper limit reference voltage generating resistor and a lower limit reference voltage generating resistor which are connected in series to said third constant current source and are applied constant current from said third constant current source,

and one or both of potentials generated in said upper limit reference voltage generating resistor and said lower limit reference voltage generating resistor are taken out as reference electric potentials.

30. The semiconductor device according to claim 29, characterized in that said reference resistor, said voltage/current converting resistor, said upper limit reference voltage generating resistor, and said lower limit reference voltage generating resistor are equal to one another in temperature coefficient.