Micromachine MEMS switch

• US 6,433,657 B1
• Filed: 05/02/2001
• Issued: 08/13/2002
• Est. Priority Date: 11/04/1998
• Status: Expired due to Fees

• Current Assignee: NEC Corporation
• Original Assignee: NEC Corporation
• Inventors: Chen, Shuguang
• Primary Examiner(s): Pascal, Robert
• Assistant Examiner(s): TAKAOKA, DEAN O
• Application Number:
  US09/830,893
• Time in Patent Office: 468 Days
• Field of Search: 333/262, 333/105, 333/197, 200/181, 335/185, 361/207
• US Class Current: 333/262
• CPC Class Codes: H01H 1/20 Bridging contacts for circuit breakers H01H73/045
• CPC Class Codes: H01H 59/0009 making use of micromechanics
• CPC Class Codes: H01P 1/127 Strip line switches

Abstract

A switch includes at least two distributed constant lines (2a, 2b) disposed close to each other, a movable element (11) arranged above the distributed constant lines so as to oppose these distributed constant lines and connecting the distributed constant lines to each other in a high-frequency manner upon contacting the distributed constant lines, and a driving means (13) for displacing the movable element by an electrostatic force to bring the movable element into contact with the distributed constant lines. The movable element has a projection (52a, 52b) formed by notching at least one end of an edge of the movable element which is located on at least one distributed constant line side. In this projection, a width (a) serving as a length in a direction parallel to the widthwise direction of the distributed constant lines is smaller than a width (W) of each of the distributed constant lines.

Claims

1. A micromachine switch characterized by comprising:

at least two distributed constant lines disposed close to each other;

a movable element arranged above said distributed constant lines so as to oppose said distributed constant lines and connecting said distributed constant lines to each other in a high-frequency manner upon contacting said distributed constant lines; and

driving means for displacing said movable element by an electrostatic force to bring said movable element into contact with said distributed constant lines,

wherein said movable element includes a projection formed by notching at least one end of an edge of said movable element which is located on at least one distributed constant line side, and

a width of the projection serving as a length in a direction parallel to the widthwise direction of said distributed constant lines is smaller than that of each of said distributed constant lines.

2. A micromachine switch according to claim 1, characterized in that

said at least one distributed constant line opposing the projection of said movable element does not oppose a movable element main-body serving as a portion of said movable element except for the projection.

3. A micromachine switch according to claim 1, characterized in that

at least an entire lower surface of said movable element is made of a conductor.

4. A micromachine switch according to claim 1, characterized in that

said movable element is made of a conductive member, and

an insulating thin film formed on an entire lower surface of the conductive member.

5. A micromachine switch according to claim 1, characterized in that

the projection of said movable element has a rectangular shape.

6. A micromachine switch according to claim 1, characterized in that

a width of the projection of said movable element near the movable element main body serving as a portion of said movable element except for the projection is made larger than that away from the movable element main body.

7. A micromachine switch according to claim 1, characterized in that

said driving means comprises an electrode which is disposed apart between said distributed constant lines so as to opposite to said movable element and to which a driving voltage is selectively applied.

8. A micromachine switch according to claim 1, characterized in that

said switch further comprises support means for supporting said movable element,

said driving means is made of an upper electrode attached to said support means, and

a lower electrode disposed under the upper electrode and opposing the upper electrode, and

a driving voltage is selectively applied to at least one of the upper and lower electrodes.

9. A micromachine switch according to claim 1, characterized in that

said at least one distributed constant line opposing the projection of said movable element also opposes a part of a movable element main body serving as a portion of said movable element except for the projection.

10. A micromachine switch according to claim 9, characterized in that

a width of the movable element main body of said movable element is equal to the width of each of said distributed constant lines.

11. A micromachine switch characterized by comprising:

at least two distributed constant lines disposed close to each other;

a movable element arranged above said distributed constant lines so as to oppose said distributed constant lines and connecting said distributed constant lines to each other in a high-frequency manner upon contacting said distributed constant lines; and

driving means for displacing said movable element by an electrostatic force to bring said movable element into contact with said distributed constant lines,

wherein at least one distributed constant line includes a projection formed by notching at least one end of an edge of said at least one distributed constant line on the movable element side, and

a width of the projection is smaller than a length, serving as a width of said movable element, in a direction parallel to the widthwise direction of said distributed constant lines.

12. A micromachine switch according to claim 11, characterized in that

said movable element does not oppose a distributed constant line main body serving as a portion, except for the projection, of said at least one distributed constant line having the projection.

13. A micromachine switch according to claim 11, characterized in that

the projection of said at least one distributed constant line has a rectangular shape.

14. A micromachine switch according to claim 11, characterized in that

at least an entire lower surface of said movable element is made of a conductor.

15. A micromachine switch according to claim 11, characterized in that

said driving means comprises an electrode which is disposed apart between said distributed constant lines so as to opposite to said movable element and to which a driving voltage is selectively applied.

16. A micromachine switch according to claim 11, characterized in that

said movable element is made of a conductive member, and

an insulating thin film formed on an entire lower surface of the conductive member.

17. A micromachine switch according to claim 11, characterized in that

said switch further comprises support means for supporting said movable element,

said driving means is made of an upper electrode attached to said support means, and

a lower electrode disposed under the upper electrode and opposing the upper electrode, and

a driving voltage is selectively applied to at least one of the upper and lower electrodes.

18. A micromachine switch according to claim 11, characterized in that

said movable element also opposes a part of a distributed constant line main body serving as a portion, except for the projection, of said at least one distributed constant line having the projection.

19. A micromachine switch according to claim 18, characterized in that

a width of the movable element is equal to the width of each of the distributed constant line main bodies of said distributed constant lines.

20. A micromachine switch characterized by comprising:

at least two distributed constant lines disposed close to each other;

a movable element arranged above said distributed constant lines so as to oppose said distributed constant lines and connecting said distributed constant lines to each other in a high-frequency manner upon contacting said distributed constant lines; and

driving means for displacing said movable element by an electrostatic force to bring said movable element into contact with said distributed constant lines,

wherein at least one distributed constant line includes a first projection formed by notching at least one end of an edge of said at least one distributed constant line on the movable element side, and

said movable element has a second projection so formed as to oppose the first projection of said at least one distributed constant line by notching at least one end of an edge of said movable element.