Method of using scatterometry measurements to determine and control gate electrode profiles

• US 6,433,871 B1
• Filed: 05/25/2001
• Issued: 08/13/2002
• Est. Priority Date: 05/25/2001
• Status: Active Grant

• Current Assignee: Advanced Micro Devices, Inc.
• Original Assignee: Advanced Micro Devices, Inc.
• Inventors: Lensing, Kevin R., Stirton, James Broc
• Primary Examiner(s): Niebling, John F.
• Assistant Examiner(s): Stevenson, Andre C
• Application Number:
  US09/865,821
• Time in Patent Office: 445 Days
• Field of Search: 255/13, 345/7, 355/53, 438/782, 356/630, 356/445, 356/381, 435/6, 422/50
• US Class Current: 356/450
• CPC Class Codes: G01B 11/0616 of coating

Abstract

A method of using scatterometry measurements to determine and control gate electrode profiles is disclosed. In one embodiment, the method comprises providing a library of optical characteristic traces, each of which correspond to a grating structure comprised of a plurality of gate electrode structures having a known profile, providing a substrate having at least one grating structure formed thereabove, the formed grating structure comprised of a plurality of gate electrode structures having an unknown profile, and illuminating the formed grating structure. The method further comprises measuring light reflected off of the grating structure to generate an optical characteristic trace for the formed grating structure and determining a profile of the gate electrode structures comprising the formed grating structure by correlating the generated optical characteristic trace to an optical characteristic trace from the library. In another embodiment, the method disclosed herein comprises comparing a generated optical characteristic trace of gate electrode structures having an unknown profile to a target trace established for gate electrode structures having an ideal or acceptable profile.

Claims

1. A method of determining gate electrode profiles, comprising:

providing a library of optical characteristic traces, each of which correspond to a grating structure comprised of a plurality of gate electrode structures having a known profile;

providing a substrate having at least one grating structure formed thereabove, said formed grating structure comprised of a plurality of gate electrode structures having an unknown profile;

illuminating said grating structure formed above said substrate;

measuring light reflected off of said grating structure to generate an optical characteristic trace for said formed grating structure;

determining a profile of said gate electrode structures comprising said formed grating structure by correlating said generated optical characteristic trace to an optical characteristic trace from said library; and

modifying at least one parameter of at least one etching process used to form gate electrode structures on a subsequently processed substrate based upon the determined profile of said gate electrode structures comprising said formed grating structure.

4. The method of claim 1, wherein modifying at least one parameter of at least one etching process used to form gate electrode structures on a subsequently processed substrate comprises modifying at least one of a gas composition, a gas flow rate, a temperature, a pressure and a duration of said at least one etching process.

5. The method of claim 1, wherein modifying at least one parameter of at least one etching process used to form gate electrode structures on a subsequently processed substrate comprises modifying a duration of at least one of a main etch process and a soft landing etch process.

6. The method of claim 1, wherein modifying at least one parameter of at least one etching process used to form gate electrode structures on a subsequently processed substrate comprises modifying at least one parameter of a two-step etching process.

2. A method of determining gate electrode profiles, comprising:

providing a library of optical characteristic traces, each of a first plurality of said traces corresponding to a grating structure comprised of gate electrode structures having a profile that exhibits undercutting, and each of a second plurality of said traces corresponding to a grating structure comprised of gate electrode structures having a profile that exhibits footing;

providing a substrate having at least one grating structure formed thereabove, said formed grating structure comprised of a plurality of gate electrode structures having an unknown profile;

illuminating said grating structure formed above said substrate;

measuring light reflected off of said grating structure to generate an optical characteristic trace for said formed grating structure;

determining a profile of said gate electrode structures comprising said formed grating structure by correlating said generated optical characteristic trace to an optical characteristic trace from said library.

3. A method of determining gate electrode profiles, comprising:

providing a library of optical characteristic traces, each of which correspond to a grating structure comprised of a plurality of gate electrode structures having a known profile;

providing a substrate having at least one grating structure formed in a scribe line of said substrate, said formed grating structure comprised of a plurality of gate electrode structures having an unknown profile;

illuminating said grating structure formed above said substrate;

measuring light reflected off of said grating structure to generate an optical characteristic trace for said formed grating structure; and

determining a profile of said gate electrode structures comprising said formed grating structure by correlating said generated optical characteristic trace to an optical characteristic trace from said library.

7. A method of determining gate electrode profiles, comprising:

providing a library of optical characteristic traces, each of which correspond to a grating structure comprised of a plurality of gate electrode structures having a known profile;

providing a substrate having at least one grating structure formed in a scribe line of said substrate, said formed grating structure comprised of a plurality of gate electrode structures having an unknown profile;

illuminating said grating structure formed above said substrate, wherein said grating structure formed above said provided substrate is formed in an area having dimensions of approximately 100×

120 μ

m;

measuring light reflected off of said grating structure to generate an optical characteristic trace for said formed grating structure; and

determining a profile of said gate electrode structures comprising said formed grating structure by correlating said generated optical characteristic trace to an optical characteristic trace from said library.

8. A method of determining gate electrode profiles, comprising:

providing a library of optical characteristic traces, each of which correspond to a grating structure comprised of a plurality of gate electrode structures having a known profile;

providing a substrate having at least one grating structure formed thereabove, said formed grating structure comprised of a plurality of gate electrode structures having an unknown profile;

illuminating said grating structure formed above said substrate;

measuring light reflected off of said grating structure to generate an optical characteristic trace for said formed grating structure;

determining a profile of said gate electrode structures comprising said formed grating structure by correlating said generated optical characteristic trace to an optical characteristic trace from said library; and

modifying at least one parameter of at least one etching process used to form gate electrode structures on a subsequently processed substrate based upon the determined profile of said gate electrode structures comprising said formed grating structure.

9. The method of claim 8, wherein providing a library of optical characteristic traces comprises providing a library of optical characteristic traces, each of a first plurality of said traces corresponding to a grating structure comprised of gate electrode structures having a profile that exhibits undercutting, and each of a second plurality of said traces corresponding to a grating structure comprised of gate electrode structures having a profile that exhibits footing.

10. The method of claim 8, wherein providing a substrate having at least one grating structure formed thereabove comprises providing a substrate having at least one grating structure formed in a scribe line of said substrate.

11. The method of claim 8, wherein providing a substrate having at least one grating structure formed thereabove comprises providing a substrate having at least one grating structure formed in a production die formed above said substrate.

12. The method of claim 8, wherein providing a substrate having at least one grating structure formed thereabove comprises providing a substrate having a plurality of grating structures formed thereabove.

13. The method of claim 9, wherein modifying at least one parameter of at least one etching process used to form gate electrode structures on a subsequently processed substrate comprises modifying at least one of a gas composition, a gas flow rate, a temperature, a pressure and a duration of said at least one etching process.

14. The method of claim 9, wherein modifying at least one parameter of at least one etching process used to form gate electrode structures on a subsequently processed substrate comprises modifying a duration of at least one of a main etch process and a soft landing etch process.

15. The method of claim 9, wherein modifying at least one parameter of at least one etching process used to form gate electrode structures on a subsequently processed substrate comprises modifying at least one parameter of a two-step etching process.

16. The method of claim 8, wherein providing a library of optical characteristic traces comprises providing a library of optical characteristic traces, each of which correspond to a grating structure comprised of a plurality of gate electrodes having a profile that corresponds to an anticipated profile for said gate electrode structures.

17. The method of claim 8, wherein said grating structure formed above said provided substrate is formed in an area having dimensions of approximately 100×

120 μ

m.

18. A method of determining gate electrode profiles, comprising:

providing a library of optical characteristic traces, each of which correspond to a grating structure comprised of a plurality of gate electrode structures having a known profile, each of a first plurality of said traces corresponding to a grating structure comprised of gate electrode structures having a profile that exhibits undercutting, and each of a second plurality of said traces corresponding to a grating structure comprised of gate electrode structures having a profile that exhibits footing;

providing a substrate having at least one grating structure formed thereabove, said formed grating structure comprised of a plurality of gate electrode structures having an unknown profile;

illuminating said grating structure formed above said substrate;

measuring light reflected off of said grating structure to generate an optical characteristic trace for said formed grating structure;

determining a profile of said gate electrode structures comprising said formed grating structure by correlating said generated optical characteristic trace to an optical characteristic trace from said library; and

modifying at least one parameter of at least one etching process used to form gate electrode structures on a subsequently processed substrate based upon the determined profile of said gate electrode structures comprising said formed grating structure.

19. The method of claim 18, wherein providing a substrate having at least one grating structure formed thereabove comprises providing a substrate having at least one grating structure formed in a scribe line of said substrate.

20. The method of claim 18, wherein providing a substrate having at least one grating structure formed thereabove comprises providing a substrate having at least one grating structure formed in a production die formed above said substrate.

21. The method of claim 18, wherein providing a substrate having at least one grating structure formed thereabove comprises providing a substrate having a plurality of grating structures formed thereabove.

22. The method of claim 18, wherein modifying at least one parameter of at least one etching process used to form gate electrode structures on a subsequently processed substrate comprises modifying at least one of a gas composition, a gas flow rate, a temperature, a pressure and a duration of said at least one etching process.

23. The method of claim 18, wherein modifying at least one parameter of at least one etching process used to form gate electrode structures on a subsequently processed substrate comprises modifying a duration of at least one of a main etch process and a soft landing etch process.

24. The method of claim 18, wherein modifying at least one parameter of at least one etching process used to form gate electrode structures on a subsequently processed substrate comprises modifying at least one parameter of a two-step etching process.

25. The method of claim 18, wherein providing a library of optical characteristic traces comprises providing a library of optical characteristic traces, each of which correspond to a grating structure comprised of a plurality of gate electrodes having a profile that corresponds to an anticipated profile for said gate electrode structures.

26. The method of claim 18, wherein said grating structure formed above said provided substrate is formed in an area having dimensions of approximately 100×

120 μ

m.

27. A method of determining gate electrode profiles, comprising:

providing a library of optical characteristic traces, each of which correspond to a grating structure comprised of a plurality of gate electrode structures having a known profile, each of a first plurality of said traces corresponding to a grating structure comprised of gate electrode structures having a profile that exhibits undercutting, and each of a second plurality of said traces corresponding to a grating structure comprised of gate electrode structures having a profile that exhibits footing;

providing a substrate having at least one grating structure formed thereabove, said formed grating structure comprised of a plurality of gate electrode structures having an unknown profile;

illuminating said grating structure formed above said substrate;

measuring light reflected off of said grating structure to generate an optical characteristic trace for said formed grating structure;

determining a profile of said gate electrode structures comprising said formed grating structure by correlating said generated optical characteristic trace to an optical characteristic trace from said library; and

modifying at least one parameter of at least a two-step etching process used to form gate electrode structures on a subsequently processed substrate based upon the determined profile of said gate electrode structures comprising said formed grating structure.

28. The method of claim 27, wherein providing a substrate having at least one grating structure formed thereabove comprises providing a substrate having at least one grating structure formed in a scribe line of said substrate.

29. The method of claim 27, wherein providing a substrate having at least one grating structure formed thereabove comprises providing a substrate having at least one grating structure formed in a production die formed above said substrate.

30. The method of claim 27, wherein providing a substrate having at least one grating structure formed thereabove comprises providing a substrate having a plurality of grating structures formed thereabove.

31. The method of claim 27, wherein modifying at least one parameter of at least a two-step etching process used to form gate electrode structures on a subsequently processed substrate comprises modifying at least one of a gas composition, a gas flow rate, a temperature, a pressure and a duration of said at least two-step etching process.

32. The method of claim 27, wherein modifying at least one parameter of at least one etching process used to form gate electrode structures on a subsequently processed substrate comprises modifying a duration of at least one of a main etch process and a soft landing etch process.

33. The method of claim 27, wherein providing a library of optical characteristic traces comprises providing a library of optical characteristic traces, each of which correspond to a grating structure comprised of a plurality of gate electrodes having a profile that corresponds to an anticipated profile for said gate electrode structures.

34. The method of claim 27, wherein said grating structure formed above said provided substrate is formed in an area having dimensions of approximately 100×

120 μ

m.

35. A method, comprising:

providing a library comprised of at least one optical characteristic trace, one of which is a target trace that corresponds to a grating structure comprised of a plurality of gate electrode structures having a known target profile;

providing a substrate having at least one grating structure formed thereabove, said formed grating structure comprised of a plurality of gate electrode structures having an unknown profile;

illuminating said grating structure formed above said substrate;

measuring light reflected off of said grating structure to generate an optical characteristic trace for said formed grating structure;

comparing said generated optical characteristic trace to said target trace; and

determining, based upon said comparison of said generated optical characteristic trace and said target trace, at least one parameter of at least one etching process used to form gate electrode structures on a substantially processed substrate.

36. A method, comprising:

providing a library comprised of at least one optical characteristic trace, one of which is a target trace that corresponds to a grating structure comprised of a plurality of gate electrode structures having a known target profile;

providing a substrate having at least one grating structure formed thereabove, said formed grating structure comprised of a plurality of gate electrode structures having an unknown profile;

illuminating said grating structure formed above said substrate;

measuring light reflected off of said grating structure to generate an optical characteristic trace for said formed grating structure;

comparing said generated optical characteristic trace to said target trace; and

modifying, based upon said comparison of said generated optical characteristic trace and said target trace, at least one parameter of at least one etching process used to form gate electrode structures on a subsequently processed substrate.

41. The method of claim 36, wherein modifying at least one parameter of at least one etching process used to form gate electrode structures on a subsequently processed substrate comprises modifying at least one of a gas composition, a gas flow rate, a temperature, a pressure and a duration of said at least one etching process.

42. The method of claim 36, wherein modifying at least one parameter of at least one etching process used to form gate electrode structures on a subsequently processed substrate comprises modifying a duration of at least one of a main etch process and a soft landing etch process.

43. The method of claim 36, wherein modifying at least one parameter of at least one etching process used to form gate electrode structures on a subsequently processed substrate comprises modifying at least one parameter of a two-step etching process.

37. A method, comprising:

providing a library comprised of at least one optical characteristic trace, one of which is a target trace that corresponds to a grating structure comprised of a plurality of gate electrode structures having a known target profile, wherein said target trace corresponds to a grating structure comprised of a plurality of gate electrodes exhibiting substantially no undercutting;

providing a substrate having at least one grating structure formed thereabove, said formed grating structure comprised of a plurality of gate electrode structures having an unknown profile;

illuminating said grating structure formed above said substrate;

measuring light reflected off of said grating structure to generate an optical characteristic trace for said formed grating structure; and

comparing said generated optical characteristic trace to said target trace.

38. A method, comprising:

providing a library comprised of at least one optical characteristic trace, one of which is a target trace that corresponds to a grating structure comprised of a plurality of gate electrode structures having a known target profile, wherein said target trace corresponds to a grating structure comprised of a plurality of gate electrodes exhibiting substantially no footing;

providing a substrate having at least one grating structure formed thereabove, said formed grating structure comprised of a plurality of gate electrode structures having an unknown profile;

illuminating said grating structure formed above said substrate;

measuring light reflected off of said grating structure to generate an optical characteristic trace for said formed grating structure; and

comparing said generated optical characteristic trace to said target trace.

39. A method, comprising:

providing a library comprised of a plurality of optical characteristic traces, one of which is a target trace that corresponds to a grating structure comprised of a plurality of gate electrode structures having a known target profile, each of a first plurality of said traces corresponding to a grating structure comprised of gate electrode structures having a profile that exhibits undercutting, and each of a second plurality of said traces corresponding to a grating structure comprised of gate electrode structures having a profile that exhibits footing;

providing a substrate having at least one grating structure formed thereabove, said formed grating structure comprised of a plurality of gate electrode structures having an unknown profile;

illuminating said grating structure formed above said substrate;

measuring light reflected off of said grating structure to generate an optical characteristic trace for said formed grating structure; and

comparing said generated optical characteristic trace to said target trace.

40. A method, comprising:

providing a library comprised of at least one optical characteristic trace, one of which is a target trace that corresponds to a grating structure comprised of a plurality of gate electrode structures having a known target profile;

providing a substrate having at least one grating structure formed in a scribe line of said substrate, said formed grating structure comprised of a plurality of gate electrode structures having an unknown profile;

illuminating said grating structure formed above said substrate;

measuring light reflected off of said grating structure to generate an optical characteristic trace for said formed grating structure; and

comparing said generated optical characteristic trace to said target trace.

44. A method, comprising:

providing a library comprised of at least one optical characteristic trace, one of which is a target trace that corresponds to a grating structure comprised of a plurality of gate electrode structures having a known target profile;

providing a substrate having at least one grating structure formed thereabove, wherein said grating structure formed above said provided substrate is formed in an area having dimensions of approximately 100×

120 μ

m, said formed grating structure comprised of a plurality of gate electrode structures having an unknown profile;

illuminating said grating structure formed above said substrate;

measuring light reflected off of said grating structure to generate an optical characteristic trace for said formed grating structure; and

comparing said generated optical characteristic trace to said target trace.

45. A method, comprising:

providing a library comprised of a plurality of optical characteristic traces, each of which corresponds to a grating structure comprised of a plurality of gate electrode structures having a known profile, one of which is a target trace that corresponds to a grating structure comprised of a plurality of gate electrode structures having a known target profile;

providing a substrate having at least one grating structure formed thereabove, said formed grating structure comprised of a plurality of gate electrode structures having an unknown profile;

illuminating said grating structure formed above said substrate;

measuring light reflected off of said grating structure to generate an optical characteristic trace for said formed grating structure;

comparing said generated optical characteristic trace to said target trace;

determining a profile of said gate electrode structures comprising said formed grating structure by correlating said generated optical characteristic trace to an optical characteristic trace from said library; and

modifying at least one parameter of at least one etching process used to form gate electrode structures on a subsequently processed substrate based upon the determined profile of said gate electrode structures comprising said formed grating structure.

46. A method, comprising:

providing a library comprised of at least one optical characteristic trace, one of which is a target trace that corresponds to a grating structure comprised of a plurality of gate electrode structures having a known target profile;

providing a substrate having at least one grating structure formed thereabove, said formed grating structure comprised of a plurality of gate electrode structures having an unknown profile;

illuminating said grating structure formed above said substrate;

measuring light reflected off of said grating structure to generate an optical characteristic trace for said formed grating structure;

comparing said generated optical characteristic trace to said target trace; and

determining, based upon said comparison of said generated optical characteristic trace and said target trace, at least one parameter of at least one etching process used to form gate electrode structures on a subsequently processed substrate.

47. The method of claim 46, further comprising modifying, based upon said comparison of said generated optical characteristic trace and said target trace, at least one parameter of at least one etching process used to form gate electrode structures on a subsequently processed substrate.

48. The method of claim 46, wherein said target trace corresponds to a grating structure comprised of a plurality of gate electrodes exhibiting substantially no undercutting.

49. The method of claim 46, wherein said target trace corresponds to a grating structure comprised of a plurality of gate electrodes exhibiting substantially no footing.

50. The method of claim 46, wherein providing a library comprised of at least one optical characteristic trace comprises providing a library comprised of a plurality of optical characteristic traces, each of a first plurality of said traces corresponding to a grating structure comprised of gate electrode structures having a profile that exhibits undercutting, and each of a second plurality of said traces corresponding to a grating structure comprised of gate electrode structures having a profile that exhibits footing.

51. The method of claim 46, wherein providing a substrate having at least one grating structure formed thereabove comprises providing a substrate having at least one grating structure formed in a scribe line of said substrate.

52. The method of claim 46, wherein providing a substrate having at least one grating structure formed thereabove comprises providing a substrate having at least one grating structure formed in a production die formed above said substrate.

53. The method of claim 46, wherein providing a substrate having at least one grating structure formed thereabove comprises providing a substrate having a plurality of grating structures formed thereabove.

54. The method of claim 47, wherein modifying at least one parameter of at least one etching process used to form gate electrode structures on a subsequently processed substrate comprises modifying at least one of a gas composition, a gas flow rate, a temperature, a pressure and a duration of said at least one etching process.

55. The method of claim 47, wherein modifying at least one parameter of at least one etching process used to form gate electrode structures on a subsequently processed substrate comprises modifying a duration of at least one of a main etch process and a soft landing etch process.

56. The method of claim 47, wherein modifying at least one parameter of at least one etching process used to form gate electrode structures on a subsequently processed substrate comprises modifying at least one parameter of a two-step etching process.

57. The method of claim 46, wherein providing a library comprised of at least one optical characteristic trace comprises providing a library comprised of a plurality of optical characteristic traces, each of which correspond to a grating structure comprised of a plurality of gate electrodes having a profile that corresponds to an anticipated profile for said gate electrode structures.

58. The method of claim 46, wherein said grating structure formed above said provided substrate is formed in an area having dimensions of approximately 100×

120 μ

m.

59. The method of claim 46, wherein said library comprises a plurality of optical characteristic traces, each of which correspond to a grating structure comprised of a plurality of gate electrode structures having a known profile.

60. The method of claim 46, further comprising comparing the generated trace and the target trace and performing additional matching of said generated trace to at least one additional optical characteristic trace from said library if the difference between said generated trace and said target trace exceeds a preselected value.

61. The method of claim 59, further comprising:

determining a profile of said gate electrode structures comprising said formed grating structure by correlating said generated optical characteristic trace to an optical characteristic trace from said library; and

modifying at least one parameter of at least one etching process used to form gate electrode structures on a subsequently processed substrate based upon the determined profile of said gate electrode structures comprising said formed grating structure.

62. A method, comprising:

providing a library comprised of at least one optical characteristic trace, one of which is a target trace that corresponds to a grating structure comprised of a plurality of gate electrode structures having a known target profile;

providing a substrate having at least one grating structure formed thereabove, said formed grating structure comprised of a plurality of gate electrode structures having an unknown profile;

illuminating said grating structure formed above said substrate;

measuring light reflected off of said grating structure to generate an optical characteristic trace for said formed grating structure;

comparing said generated optical characteristic trace to said target trace; and

modifying, based upon said comparison of said generated optical characteristic trace and said target trace, at least one parameter of at least one etching process used to form gate electrode structures on a subsequently processed substrate.

63. The method of claim 62, further comprising determining, based upon said comparison of said generated optical characteristic trace and said target trace, at least one parameter of at least one etching process used to form gate electrode structures on a subsequently processed substrate.

64. The method of claim 62, wherein said target trace corresponds to a grating structure comprised of a plurality of gate electrodes exhibiting substantially no undercutting.

65. The method of claim 62, wherein said target trace corresponds to a grating structure comprised of a plurality of gate electrodes exhibiting substantially no footing.

66. The method of claim 62, wherein providing a library comprised of at least one optical characteristic trace comprises providing a library comprised of a plurality of optical characteristic traces, each of a first plurality of said traces corresponding to a grating structure comprised of gate electrode structures having a profile that exhibits undercutting, and each of a second plurality of said traces corresponding to a grating structure comprised of gate electrode structures having a profile that exhibits footing.

67. The method of claim 62, wherein providing a substrate having at least one grating structure formed thereabove comprises providing a substrate having at least one grating structure formed in a scribe line of said substrate.

68. The method of claim 62, wherein providing a substrate having at least one grating structure formed thereabove comprises providing a substrate having at least one grating structure formed in a production die formed above said substrate.

69. The method of claim 62, wherein providing a substrate having at least one grating structure formed thereabove comprises providing a substrate having a plurality of grating structures formed thereabove.

70. The method of claim 62, wherein modifying at least one parameter of at least one etching process used to form gate electrode structures on a subsequently processed substrate comprises modifying at least one of a gas composition, a gas flow rate, a temperature, a pressure and a duration of said at least one etching process.

71. The method of claim 62, wherein modifying at least one parameter of at least one etching process used to form gate electrode structures on a subsequently processed substrate comprises modifying a duration of at least one of a main etch process and a soft landing etch process.

72. The method of claim 62, wherein modifying at least one parameter of at least one etching process used to form gate electrode structures on a subsequently processed substrate comprises modifying at least one parameter of a two-step etching process.

73. The method of claim 62, wherein providing a library comprised of at least one optical characteristic trace comprises providing a library comprised of a plurality of optical characteristic traces, each of which correspond to a grating structure comprised of a plurality of gate electrodes having a profile that corresponds to an anticipated profile for said gate electrode structures.

74. The method of claim 62, wherein said grating structure formed above said provided substrate is formed in an area having dimensions of approximately 100×

120 μ

m.

75. The method of claim 62, wherein said library comprises a plurality of optical characteristic traces, each of which correspond to a grating structure comprised of a plurality of gate electrode structures having a known profile.

76. The method of claim 62, further comprising comparing the generated trace and the target trace and performing additional matching of said generated trace to at least one additional optical characteristic trace from said library if the difference between said generated trace and said target trace exceeds a preselected value.

77. The method of claim 75, further comprising:

determining a profile of said gate electrode structures comprising said formed grating structure by correlating said generated optical characteristic trace to an optical characteristic trace from said library; and

modifying at least one parameter of at least one etching process used to form gate electrode structures on a subsequently processed substrate based upon the determined profile of said gate electrode structures comprising said formed grating structure.