Low metalization creep sensor

• US 6,435,029 B1
• Filed: 10/30/2000
• Issued: 08/20/2002
• Est. Priority Date: 08/14/1997
• Status: Expired due to Fees

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Sprague, Randy, Hulsing, Rand H. II
• Primary Examiner(s): KWOK, HELEN C
• Application Number:
  US09/702,372
• Time in Patent Office: 659 Days
• Field of Search: 735/141.8, 735/142.9, 735/143.2, 735/141.6, 735/143.4, 738/625.9, 310/321, 310/329, 310/370
• US Class Current: 73/514.29
• CPC Class Codes: G01C 19/5719 using planar vibrating masses driven in a translation vibration along an axis
• CPC Class Codes: G01L 1/183 by measuring variations of frequency of vibrating piezo-resistive material
• CPC Class Codes: G01P 15/097 by vibratory elements
• CPC Class Codes: G01P 2015/0828 the mass being of the paddle type being suspended at one of its longitudinal ends

Abstract

Performance-enhancing, reduced-area metalization adhesion areas in force-sensing transducers are described.

Claims

1. An accelerometer comprising:

a substrate having a proof mass and a vibratable assembly connected therewith, the proof mass and the vibratable assembly being configured to detect an acceleration force;

an adhesive layer disposed over less than an entirety of the vibratable assembly; and

a conductive path disposed over the vibratable assembly and intermittently supported in a bonded relationship therewith through the adhesive layer, said bonded relationship consisting of a reduced bonding area that is less than the area of said conductive path.

2. The accelerometer of claim 1, wherein the adhesion layer comprises a plurality of discrete layers spaced apart over the vibratable assembly.

3. The accelerometer of claim 1, wherein the vibratable assembly comprises a vibratable beam, and the adhesion layer comprises a plurality of discrete layers spaced apart over the vibratable beam.

4. The accelerometer of claim 3, wherein the adhesion layer comprises three discrete layers.

5. The accelerometer of claim 3, wherein the vibratable beam has at least one neutral inflection point, and one of the discrete layers is disposed over the one neutral inflection point.

6. The accelerometer of claim 1, wherein the vibratable assembly comprises a plurality of vibratable beams, and the adhesion layer comprises a plurality of discrete layers spaced apart over individual beams.

7. The accelerometer of claim 6, wherein each beam has a plurality of discrete layers spaced thereover.

8. The accelerometer of claim 7, wherein each beam has at least one neutral inflection point having a discrete layer disposed thereover.

9. The accelerometer of claim 7, wherein each beam has a discrete layer disposed over said beam'"'"'s centermost point.