Bulk chemical delivery system

• US 6,435,229 B1
• Filed: 09/01/2000
• Issued: 08/20/2002
• Est. Priority Date: 07/11/1997
• Status: Expired due to Term

• Current Assignee: Entegris Incorporated
• Original Assignee: Advanced Technology Materials, Inc. (Entegris Incorporated)
• Inventors: Gregg, John N., Jackson, Robert M., Noah, Craig M., Esser, Craig
• Primary Examiner(s): Huson, Gregory L.
• Assistant Examiner(s): DEVORE, PETER T
• Application Number:
  US09/462,690
• Time in Patent Office: 718 Days
• Field of Search: 141/2, 141/18, 141/21, 141/61, 141/95, 141/198, 141/231, 137/209, 137/316, 137/412
• US Class Current: 141/231
• CPC Class Codes: B01J 4/00 Feed or outlet devices; Feed or outlet control devices feed or outlet devices for pressure vessels B01J3/02 ; feeding of particles into and evacuation of particles out of the reactor B01J8/0015
• CPC Class Codes: B67D 7/0272 specially adapted for transferring liquids of high purity
• CPC Class Codes: B67D 7/0277 using negative pressure
• CPC Class Codes: B67D 7/84 Casings, cabinets or frameworks; Trolleys or like movable supports
• CPC Class Codes: B67D 7/845 Trolleys or like movable supports
• CPC Class Codes: C23C 16/448 characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
• CPC Class Codes: F17C 13/02 Special adaptations of indicating, measuring, or monitoring equipment measuring in general G01
• CPC Class Codes: F17C 13/04 Arrangement or mounting of valves valves per se F16K ; snap-coupling of nipples F16L37/00
• CPC Class Codes: F17C 2270/0518 Semiconductors
• CPC Class Codes: F17C 7/02 Discharging liquefied gases
• CPC Class Codes: F17C 9/00 Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure

Abstract

A bulk chemical delivery system, comprising: a bulk chemical canister that is connected to at least one manifold box, wherein each manifold box has at least two output lines, wherein each output line connects to a secondary canister. In non-limiting representative example, the bulk chemical canister may have a capacity of 200 liters. Also disclosed are novel manifolds for use in delivering chemicals from canisters and a transportation/containment cart.

Claims

1. A bulk chemical delivery system, comprising:

a bulk chemical canister (103) that is connected to at least one manifold box (110), wherein each manifold box has at least two output lines (112), wherein at least one output line connects to a secondary canister (121), characterized in that the bulk chemical canister is housed within a transportation and containment cart (300) that is housed within a cabinet (350), wherein the secondary canister has a smaller capacity than the bulk canister, a first supply manifold that connects to the bulk canister and manifold box, and wherein the bulk canister and first supply manifold arc housed in a cabinet.

2. The system of claim 1 wherein each secondary canister connects to a line adapted to supply chemical to the process tool.

3. The system of claim 1 further comprising a programmable controller which controls the flow of chemical through the system.

4. The system of claim 1 wherein each secondary canister (121) is housed in a cabinet (120), find wherein two or more canisters (121) may optionally be housed in a cabinet.

5. The system of claim 1 wherein the bulk canister (103) has a capacity of at least about 200 liters.

6. The system of claim 1 wherein at least one secondary canister is connected to a process tool.

7. The system of claim 1 wherein the system contains chemical that is tetraorthosilicate.

8. The system of claim 7 wherein the tetraethylorthosilicate is 99.9999% or more free of trace metals.

9. The system of claim 1 wherein the system contains chemical that is tetraethylortliosilicate, triethylphosphate, trimethyl phosphite, trimiethyl borate, titanium tetrachlloride, or a tantalum compound, wherein the chemical is 99.9999% or more free of trace metals.

10. The system of claim 1 further comprising a second bulk canister that provides chemical to at least one valve manifold box when the first bulk canister is not supplying chemical.

11. The system of claim 1 wherein the bulk canister also directly connects to al least one process tool, to a secondary canister, or combination thereof.

12. A manifold system for use in refill of canister containing chemicals, comprising a first manifold which comprises:

(1) a vacuum supply valve (10);

(2) a vacuum source (14);

(3) a pressure vent valve (20);

(4) a carrier gas isolation valve (30);

(5) a caster bypass valve (40);

(6) a process line isolation valve (50);

(7) a first control valve (60);

(8) a canister inlet valve (90);

(9) a canister outlet valve (100);

(10) a second control valve (70);

(11) a third control valve (80)

wherein the vacuum, supply valve is contracted to the vacuum source (20);

wherein the vacuum source (14) is connected to the pressure vent valve (20) and the first control valve (60);

wherein the first control valve (60) connects to the second control valve (70);

wherein the carrier gas isolation valve (30) is connected to the pressure vent valve (20) and the canister bypass valve (40);

wherein the canister bypass valve (40) is further connected to the carrier gas isolation valve (30) and the second control valve (70);

wherein the process line isolation valve (90) is also connected to the third control valve (80);

wherein the canister inlet valve (90) is the connected to the second control valve (70)and the third control valve (80); and

wherein the canister outlet valve (100) is further connected to the third control valve (80).

13. The manifold system of claim 12, wherein the valves are pneumatically activated.

14. The manifold system of claim 12, wherein the valves the connected by stainless steel tubing, and the valves arc stainless steel.

15. The manifold system of claim 12, wherein carrier gas isolation valve (30) is further connected to an inert gas source.

16. The manifold system of claim 12, wherein the canister inlet valve (90) and canister outlet valve (100) are pneumatically actuated valves.

17. The manifold system of claim 12, further comprising a second manifold that is connected to the vacuum supply valve (10).

18. The manifold system of claim 12, wherein the first manifold includes a first tee (18) fitting connecting pressure vent valve (20), Vacuum source (14), and first control valve (60).

19. The manifold system of claim 12, wherein a second tee (72) is directly connected to canister inlet valve (90), second control valve (70) and third control valve (80).