Semiconductor processing apparatus with substrate-supporting mechanism

• US 6,435,798 B1
• Filed: 04/07/2000
• Issued: 08/20/2002
• Est. Priority Date: 04/09/1999
• Status: Expired due to Term

• Current Assignee: ASM Japan K.K. (ASM International NV)
• Original Assignee: ASM Japan K.K. (ASM International NV)
• Inventors: Satoh, Kiyoshi
• Primary Examiner(s): Bratlie, Steven A.
• Application Number:
  US09/544,764
• Time in Patent Office: 865 Days
• Field of Search: 414/217, 414/941, 118/728, 118/729
• US Class Current: 414/217
• CPC Class Codes: C23C 16/4586 Elements in the interior of the support, e.g. electrodes, heating or cooling devices
• CPC Class Codes: H01L 21/68742 characterised by a lifting arrangement, e.g. lift pins
• CPC Class Codes: Y10S 414/141 includes means for gripping wafer

Abstract

A semiconductor processing apparatus for processing a semiconductor substrate includes: (i) a vacuum-exhausted chamber; (ii) a susceptor which is provided within the chamber and which holds the substrate and has at least three through-holes; (iii) substrate-supporting members which are supported within the through-holes and which support the substrate; (iv) a pin, one end of which is inserted into the inner part of a the substrate-supporting member; and (v) a pin-fixing structure provided at the base of the chamber for fixing the other end of the pin. When the susceptor moves downward, the pin pushes up the substrate-supporting member, and the substrate is supported in midair by the substrate-supporting members apart from the susceptor.

Claims

1. An apparatus for processing a semiconductor substrate, comprising:

a reaction chamber;

a susceptor within the chamber for supporting a substrate thereon when processed, said susceptor having at least three vertical through-holes at designated positions;

substrate-supporting members slidably fitted in the respective through-holes, each substrate-supporting member being hollow and having an upper closed end and a lower open end, each substrate-supporting member being reciprocally slidable along the through-hole between an upper position where the upper end protrudes from the susceptor and a lower position where the upper end does not protrude from the susceptor, wherein when the substrate-supporting members are at the upper position, the substrate is supported apart from the susceptor by the upper ends of the substrate-supporting members; and

pins corresponding to the respective substrate-supporting members, each pin having an upper end, each pin being slidably fitted in the hollow of the substrate-supporting member, said upper end being inserted in the hollow of the substrate-supporting member and pushing upward the substrate-supporting member to move the substrate-supporting member to the upper position by movement of the susceptor relative to the pins, the upper end of each pin being detached from the closed end of the substrate-supporting member positioned at the lower position by movement of the susceptor relative to the pins.

2. The apparatus according to claim 1, wherein the pins are fixed in the chamber, and the susceptor is vertically movable to move the substrate-supporting members between the upper position and the lower position.

3. The apparatus according to claim 2, further comprising a pin-fixing structure provided at a base of the chamber, wherein each pin has a lower end fixed to the pin-fixing structure.

4. The apparatus according to claim 2, further comprising a moving device for mechanically moving the susceptor vertically.

5. The apparatus according to claim 4, further comprising bellows completely separating the moving device and the chamber.

6. The apparatus according to claim 3, wherein the pin-fixing structure comprises (i) a fixed base member attached to the base of the chamber and (ii) pin holders connected to the fixed base member, wherein the lower ends of the pins are fixed to the respective pin holders.

7. The apparatus according to claim 6, wherein the fixed base member comprises (i) a center cylindrical member and (ii) blades extending in a radial direction from the center cylindrical member, each blade having a threaded hole receiving the pin holder.

8. The apparatus according to claim 7, wherein the pin holder comprises (i) a fine cavity for receiving the lower end of the pin and (ii) a threaded screw member to be screwed into the hole of the blade.

9. The apparatus according to claim 1, wherein the upper end of the pin is conical and the hollow of the substrate-supporting member has an end which is conical and the same shape as the upper end of the pin.

10. The apparatus according to claim 1, wherein each substrate-supporting member comprises (i) a flanged head member and (ii) a cylindrical body to receive the upper end of the pin and the other end of said body is closed to contact one end of said pin.

11. The apparatus according to claim 10, wherein the head member comprises (i) a conical top portion and (ii) reverse-truncated cone-shaped lower portion.

12. The apparatus according to claim 11, wherein each through-hole of the susceptor has an upper opening circumference portion which is beveled to fit the reverse-truncated cone-shaped lower portion therein to leave no space between the upper opening circumference portion and the reverse-truncated cone-shaped lower portion when the substrate-supporting member is at the lower position.

13. The apparatus according to claim 1, wherein the pins are vertically positioned wherein the axis of each substrate-supporting member is aligned with the axis of the corresponding pin.

14. The apparatus according to claim 13, wherein the substrate-supporting members have a length such that the lower ends of the substrate-supporting members do not protrude from lower ends of the through-holes of the susceptor when at the lower position.

15. The apparatus according to claim 1, wherein the substrate-supporting members and the pins are made of a material which has high heat resistance with a low coefficient of thermal expansion.

16. The apparatus according to claim 15, wherein the material is ceramic.

17. The apparatus according to claim 15, wherein the material is aluminum oxide or aluminum nitride.

18. A method for processing a substrate using an apparatus comprising:

(i) a reaction chamber;

(ii) a susceptor within the chamber, said susceptor having at least three vertical through-holes at designated positions;

(iii) substrate-supporting members slidably fitted in the respective through-holes, each substrate-supporting member being hollow and having an upper closed end and a lower open end, each substrate-supporting member being reciprocally slidable along the through-hole between an upper position where the upper end protrudes from the susceptor and a lower position where the upper end does not protrude from the susceptor, wherein when the substrate-supporting members are at the upper position, the substrate is supported apart from the susceptor by the upper ends of the substrate-supporting members; and

(iv) pins corresponding to the respective substrate-supporting members, each pin having an upper end, each pin being slidably fitted in the hollow of the substrate-supporting member, said upper end being inserted in the hollow of the substrate-supporting member and pushing upward the substrate-supporting member to move the substrate-supporting member to the upper position by movement of the susceptor relative to the pins, the upper end of each pin being detached from the closed end of the substrate-supporting member positioned at the lower position by movement of the susceptor relative to the pins, said method comprising;

loading a substrate in the reaction chamber, wherein the substrate is supported apart from the susceptor by the substrate-supporting members at the upper position;

moving downward the substrate-supporting members to the lower position by movement of the pins relative to the susceptor, wherein the substrate is placed on the susceptor;

processing the substrate;

moving upward the substrate-supporting members to the upper position by movement of the pins relative to the susceptor, wherein the substrate is supported apart from the susceptor by the substrate-supporting members at the upper position; and

unloading the processed substrate from the chamber.

19. The method according to claim 18, further comprising cleaning the chamber when the substrate-supporting member are at the lower position.

20. The method according to claim 18, wherein the vertical movement of the substrate-supporting members relative to the susceptor is conducted by vertically moving the susceptor whereas the pins are held still.