Semiconductor device having a plurality of resistive paths

• US 6,436,779 B2
• Filed: 02/12/2001
• Issued: 08/20/2002
• Est. Priority Date: 02/12/2000
• Status: Expired due to Term

• Current Assignee: Nexperia B.V. (Wingtech Technology Co., Ltd.)
• Original Assignee: Koninklijke Philips Electronics N.V. (Koninklijke Philips N.V.)
• Inventors: Van Dalen, Rob, Hurkx, Godefridus A. M.
• Primary Examiner(s): Chaudhuri, Olik
• Assistant Examiner(s): PHAM, HOAI V
• Application Number:
  US09/781,498
• Publication Number:
  US 20010013613A1
• Time in Patent Office: 554 Days
• Field of Search: 257/287, 257/338, 257/339, 257/478, 257/483, 257/484, 257/487, 257/489, 257/496, 257/374, 257/373
• US Class Current: 438/339
• CPC Class Codes: H01L 29/408 with an insulating layer with a particular dielectric or electrostatic property, e.g. with static charges or for controlling trapped charges or moving ions, or with a plate acting on the insulator potential or the insulator charges, e.g. for controlling charges effect or potential distribution in the insulating layer, or with a semi-insulating layer contacting directly the semiconductor surface
• CPC Class Codes: H01L 29/861 Diodes
• CPC Class Codes: H01L 29/872 Schottky diodes

Abstract

A semiconductor device has first and second opposed major surfaces (10a and 10b). A semiconductor first region (11) is provided between second (12 or 120) and third (14) regions such that the second region (12 or 120) forms a rectifying junction (13 or 130) with the first region (11) and separates the first region (11) from the first major surface (10a) while the third region (14) separates the first region (11) from the second major surface (10b). A plurality of semi-insulating or resistive paths (21) are dispersed within the first region (1′) such that each path extends through the first region from the second to the third region. In use of the device when a reverse biasing voltage is applied across the rectifying junction (13 or 130) an electrical potential distribution is generated along the resistive paths (21) which causes a depletion region in the first region (11) to extend through the first region (11) to the third region (14) to increase the reverse breakdown voltage of the device. The device may be, for example a pn-n diode in which case the second region is a semiconductive region of the opposite conductivity type to the first region or a Schottky diode in which case the second region (120) forms a Schottky contact with the first region.

Claims

1. A semiconductor device having first and second opposed major surfaces, the semiconductor device comprising a semiconductor first region provided between second and third regions such that the second region forms a rectifying junction with the first region and separates the first region from the first major surface and the third region separates the first region from the second major surface, the first region having dispersed therein a plurality of resistive paths each extending through the first region from the second to the third region such that, in use, when a reverse biasing voltage is applied across the rectifying junction an electrical potential distribution is generated along the resistive paths which causes a depletion region in the first region to extend through the first region to the third region to increase the reverse breakdown voltage of the device.

2. A semiconductor device according to claim 1, wherein the second region comprises a semiconductor region of opposite conductivity type to the first region so that the rectifying junction is a pn junction.

3. A semiconductor device according to claim 1, wherein the second region comprises a conductive region forming a Schottky contact with the first region so that the rectifying junction is a Schottky junction.

4. A semiconductor device according to claim 1, wherein the third region comprises a semiconductor region of the same conductivity as but more highly doped than the first region.

5. A semiconductor device according to claim 1, wherein the semiconductor device is a pn-n diode having first and second electrodes and wherein the second region forms an ohmic contact with the first electrode and comprises a semiconductor region of opposite conductivity type to the first region forming a pn junction with the first region and the third region comprises a semiconductor region of the same conductivity as but more highly doped than the first region forming an ohmic contact with the second electrode.

6. A semiconductor device according to claim 1, wherein the semiconductor device is a Schottky diode having first and second electrodes and wherein the second region comprises the first electrode and the first region forms a Schottky contact with the first electrode and the third region comprises a semiconductor region of the same conductivity as but more highly doped than the first region forming an ohmic contact with the second electrode.

7. A semiconductor device according to claim 1, wherein each resistive path is formed as a layer on a surface of an opening extending through the first region.

8. A semiconductor device according to claim 7, wherein the opening is filled by a filler material.

9. A semiconductor device according to claim 1, wherein the resistive paths are separate discrete resistive paths.

10. A semiconductor device according to claim 1, wherein the resistive paths form a grid or network within the first region.

11. A semiconductor device according to claim 1, wherein the resistive paths are formed as a continuous resistive region within a grid or mesh-like trench formed within the first region.

12. A semiconductor device according to claim 1, wherein each resistive path is formed of a material selected from the group consisting of oxygen doped polycrystalline silicon and a silicon nitride.

13. A semiconductor device according to claim 1, wherein each resistive path is separated from the first region by an insulating region.