Illumination for inspecting surfaces of articles

• US 6,437,312 B1
• Filed: 05/05/2000
• Issued: 08/20/2002
• Est. Priority Date: 08/05/1999
• Status: Expired due to Fees

• Current Assignee: Orbotech Limited (KLA Corporation)
• Original Assignee: Orbotech Limited (KLA Corporation)
• Inventors: Adler, Avraham, Ben Shlomo, Moshe
• Primary Examiner(s): CARIASO, ALAN B
• Application Number:
  US09/565,500
• Time in Patent Office: 837 Days
• Field of Search: 359/372-378, 359/385, 359/618, 359/619, 359/622-624, 359/629, 359/636, 356/445-448, 356/429, 356/430, 250/578.1, 250/559.46, 250/559.45, 250/216, 250/559.4, 250/208.1, 349/5-9
• US Class Current: 250/216
• CPC Class Codes: G01N 21/95684 Patterns showing highly reflecting parts, e.g. metallic elements

Abstract

An illumination system including at least one reflector subtending an angle with respect to a location on a surface of an article, and first and second light sources, the first and second light sources each providing a light output, the light outputs from both of the first and second light sources being directed to impinge on the location on the surface of an article within the angle, at least one of the light outputs being reflected by the reflector.

Claims

1. An illumination system comprising:

a light source arranged to illuminate an object;

a plurality of lenses each lens in said plurality of lenses imaging light from said light source reflected by a portion of said object among a plurality of at least partially overlapping portions onto a light receiver among a plurality of light receivers, the physical sizes of the plurality of lenses and the spacing of the plurality of light receivers being such that the plurality of lenses cannot all lie in a single plane;

folding optics arranged along a light path associated with at least one lens and a respective at least one light receiver among said plurality of lenses and said plurality of light receivers, the arrangement of said folding optics, said plurality of lenses and said plurality of light receivers being such that the respective lengths of light paths between said ones of said plurality of lenses and said corresponding ones of said plurality of light receivers are substantially identical.

2. An illumination system according to claim 1 and wherein said plurality of lenses have substantially identical focal lengths.

3. An imaging system comprising,

a light source arranged to illuminate a region of an object;

a plurality of lenses imaging light from said light source reflected by said region of said object onto a plurality of light receivers, the physical sizes of the plurality of lenses and the spacing of the plurality of light receivers being such that the plurality of lenses cannot all lie in the same plane; and

folding optics arranged along a light path associated with at least one lens and a respective at least one light receiver among said plurality of lenses and plurality of light receivers, the arrangement of said folding optics, said plurality of lenses and said plurality of light receivers being such that said plurality of lenses and said plurality of light receivers image light from said light source reflected by said region of said object along generally non-shared light paths, and the lengths of the generally non-shared light paths between said ones of said plurality of lenses and said corresponding ones of said plurality of light receivers are substantially identical.

4. An imaging system according to claim 3 and wherein said plurality of lenses have substantially identical focal lengths.

5. An imaging system according to claim 3 and wherein said plurality of lenses each image a portion of said object which extends at least partially outside said region, and wherein respective portions imaged by two of said plurality of lenses overlap in said region.

6. An imaging system according to claim 5 and wherein said plurality of lenses have substantially identical focal lengths.