Electronic device including multiple capacitance value MEMS capacitor and associated methods

• US 6,437,965 B1
• Filed: 11/28/2000
• Issued: 08/20/2002
• Est. Priority Date: 11/28/2000
• Status: Expired due to Term

• Current Assignee: Harris Corporation (L3Harris Technologies, Inc.), Teravicta Technologies Incorporated
• Original Assignee: Harris Corporation (L3Harris Technologies, Inc.)
• Inventors: Reed, Jason D., Tammen, David John, Gribbons, Michael Alan, Adkins, Calvin L., Nelson, Richard D., Hilbert, Claude
• Primary Examiner(s): Reichard, Dean A.
• Assistant Examiner(s): HA, NGUYEN T
• Application Number:
  US09/724,292
• Time in Patent Office: 630 Days
• Field of Search: 361/303, 361/301.1, 361/306.1, 361/277, 361/278, 361/279, 361/280, 361/281, 361/282, 361/287, 361/290, 361/292, 361/298.2, 361/679
• US Class Current: 361/303
• CPC Class Codes: B81B 3/0008 Structures for avoiding electrostatic attraction, e.g. avoiding charge accumulation
• CPC Class Codes: H01G 5/16 using variation of distance between electrodes

Abstract

An electronic device, such as a filter or phase shifter, for example, includes a substrate, and a MEMS capacitor on the substrate and having a plurality of selectable capacitance values. The MEMS capacitor preferably includes a lower capacitor electrode on the substrate, and a movable bridge including end portions connected to the substrate laterally adjacent the lower capacitor electrode. The movable bridge may also include a conductive medial portion between the end portions defining an upper capacitor electrode suspended above the lower capacitor electrode and being movable between an upper position and a lower position by an electrostatic force generated between the capacitor electrodes. The upper and lower positions provide respective low and high selectable capacitance values. Moreover, the movable bridge may further include at least one travel limiting portion between the end portions for engaging adjacent substrate portions to keep the upper capacitor electrode in a predetermined spaced relation from the lower capacitor electrode when in the lower position. This travel limiting feature of the MEMS capacitor is relatively easy to fabricate and avoids the sticking or stiction problem of some other types of MEMS capacitors.

Claims

1. An electronic device comprising:

a substrate; and

a micro-electromechanical system (MEMS) capacitor on said substrate and having -a plurality of selectable capacitance values, said MEMS capacitor comprising

a lower capacitor electrode on said substrate, and

a movable bridge comprising end portions connected to said substrate laterally adjacent said lower capacitor electrode, a conductive medial portion between said end portions defining an upper capacitor electrode suspended above said lower capacitor electrode and being movable between an upper position and a lower position by an electrostatic force generated between said lower and upper capacitor electrodes, the upper and lower positions providing respective low and high selectable capacitance values,

said movable bridge further comprising at least one travel limiting portion between said end portions for engaging adjacent substrate portions to keep said upper capacitor electrode in a predetermined spaced relation from said lower capacitor electrode when in the lower position.

2. An electronic device according to claim 1 wherein said at least one travel limiting portion comprises first and second travel limiting portions on opposite sides of the medial portion of said movable bridge.

3. An electronic device according to claim 2 wherein said movable bridge has a shape defining a plurality of vertical steps.

4. An electronic device according to claim 3 wherein the plurality of vertical steps descend from the end portions to respective travel limiting portions and ascend from respective travel limiting portions to the medial portion of said movable bridge.

5. An electronic device according to claim 1 wherein said lower capacitor electrode comprise a conductive uppermost surface portion so that an air gap provides a dielectric for said MEMS capacitor in both the upper and lower positions.

6. An electronic device according to claim 1 further comprising a controller for applying respective control voltages to the lower and upper capacitor electrodes of said MEMS capacitor to select between discrete low and high capacitance values defined by the upper and lower positions, respectively.

7. An electronic device according to claim 1 wherein said movable bridge is an integrally formed monolithic structure.

8. An electronic device according to claim 1 wherein said movable bridge has an elongated strip shape.

9. An electronic device according to claim 1 wherein said movable bridge has a configuration imparting an upward bias thereto.

10. An electronic device according to claim 1 further comprising a reinforcing layer on the medial portion of said movable bridge.

11. An electronic device according to claim 1 wherein said substrate comprises an insulating material.

12. An electronic device according to claim 1 wherein said lower capacitor electrode and said movable bridge each comprises metal.

13. An electronic device according to claim 1 wherein said lower capacitor electrode and said movable bridge each comprises gold.

14. An electronic device comprising:

a substrate; and

a micro-electromechanical system (MEMS) capacitor on said substrate and having discrete low and high selectable capacitance values, said MEMS capacitor comprising

a lower capacitor electrode on said substrate, and

a movable bridge comprising end portions connected to said substrate laterally adjacent said lower capacitor electrode, a conductive medial portion between said end portions defining an upper capacitor electrode suspended above said lower capacitor electrode and being movable between discrete upper and lower positions by an electrostatic force generated between said lower and upper capacitor electrodes, the discrete upper and lower positions providing the discrete low and high selectable capacitance values respectively,

said movable bridge further comprising first and second travel limiting portions on opposite sides of the medial portion of said movable bridge for engaging adjacent substrate portions to keep said upper capacitor electrode in a predetermined spaced relation from said lower capacitor electrode when in the lower position.

15. An electronic device according to claim 14 wherein said movable bridge has a shape defining a plurality of vertical steps.

16. An electronic device according to claim 15 wherein the plurality of vertical steps descend from the end portions to respective travel limiting portions and ascend from respective travel limiting portions to the medial portion of said movable bridge.

17. An electronic device according to claim 14 wherein said lower capacitor electrode comprise a conductive uppermost surface portion so that an air gap provides a dielectric for said MEMS capacitor in both the upper and lower positions.

18. An electronic device according to claim 14 further comprising a controller for applying respective control voltages to the lower and upper electrodes of said MEMS capacitor to select between the discrete low and high capacitance levels defined by the upper and lower positions, respectively.

19. An electronic device according to claim 14 wherein said movable bridge is an integrally formed monolithic structure.

20. An electronic device according to claim 14 wherein said movable bridge has an elongated strip shape.

21. An electronic device according to claim 14 wherein said movable bridge has a configuration imparting an upward bias thereto.

22. An electronic device according to claim 14 further comprising a reinforcing layer on the medial portion of said movable bridge.

23. An electronic device according to claim 14 wherein said substrate comprises an insulating material.

24. An electronic device according to claim 14 wherein said lower capacitor electrode and said movable bridge each comprises metal.

25. An electronic device comprising:

a substrate; and

a micro-electromechanical system (MEMS) capacitor on said substrate and having a plurality of selectable capacitance values, said MEMS capacitor comprising

a lower capacitor electrode on said substrate and comprising a conductive uppermost surface portion,

a movable bridge comprising end portions connected to said substrate laterally adjacent said lower capacitor electrode, a conductive medial portion between said end portions defining an upper capacitor electrode suspended above said lower capacitor electrode and being movable between an upper position and a lower position by an electrostatic force generated between said lower and upper capacitor electrodes, the upper and lower positions providing respective low and high selectable capacitance values, and

at least one travel limiter to keep said upper capacitor electrode in a predetermined spaced relation from said lower capacitor electrode when in the lower position and so that an air gap provides a dielectric for said MEMS capacitor in both the upper and lower positions.

26. An electronic device according to claim 25 wherein said at least one travel limiter comprises first and second travel limiting portions on opposite sides of the medial portion of said movable bridge.

27. An electronic device according to claim 26 wherein said movable bridge has a shape defining a plurality of vertical steps.

28. An electronic device according to claim 27 wherein the plurality of vertical steps descend from the end portions to respective travel limiting portions and ascend from respective travel limiting portions to the medial portion of said movable bridge.

29. An electronic device according to claim 25 further comprising a controller for applying respective control voltages to the lower and upper capacitor electrodes of said MEMS capacitor to select between discrete low and high capacitance values defined by the upper and lower positions, respectively.

30. An electronic device according to claim 25 wherein said movable bridge is an integrally formed monolithic structure.