Multi-directional thermal actuator
First Claim
1. A multi-directional thermal actuator constructed on a surface of a substrate, the apparatus comprising:
- a first beam cantilevered from an anchor at a first end to extend generally parallel to the surface of the substrate in an unactivated configuration;
a second beam cantilevered from an anchor at a first end to extend generally parallel to the surface of the substrate in an unactivated configuration;
a third beam cantilevered from an anchor at a first end to extend generally parallel to the surface of the substrate in an unactivated configuration, wherein the first, second, and third beams are not coplanar;
a member mechanically coupling distal ends of the first, second, and third beams;
a first circuit comprising at least the first beam, whereby application of current to the first circuit displaces the member in a first radial direction;
a second circuit comprising at least the second beam, whereby application of current to the second circuit displaces the member in a second radial direction; and
a third circuit comprising at least the third beam, whereby application of current to the third circuit displaces the member in a third radial direction.
1 Assignment
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Accused Products
Abstract
A micrometer sized multi-directional thermal actuator capable of repeatable and rapid displacement in a substantially horizontal direction, a substantially vertical direction, and/or a combination thereof. The multi-directional thermal actuator constructed on a surface of a substrate includes three or more beams each cantilevered from one or more anchors at a first end to extend generally parallel to the surface of the substrate. A member mechanically and electrically couples the distal ends of the beams. Application of current to a circuit comprising combinations of any two or more of the beams displaces the member in one of three or more non-parallel radial directions, respectively.
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Citations
46 Claims
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1. A multi-directional thermal actuator constructed on a surface of a substrate, the apparatus comprising:
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a first beam cantilevered from an anchor at a first end to extend generally parallel to the surface of the substrate in an unactivated configuration;
a second beam cantilevered from an anchor at a first end to extend generally parallel to the surface of the substrate in an unactivated configuration;
a third beam cantilevered from an anchor at a first end to extend generally parallel to the surface of the substrate in an unactivated configuration, wherein the first, second, and third beams are not coplanar;
a member mechanically coupling distal ends of the first, second, and third beams;
a first circuit comprising at least the first beam, whereby application of current to the first circuit displaces the member in a first radial direction;
a second circuit comprising at least the second beam, whereby application of current to the second circuit displaces the member in a second radial direction; and
a third circuit comprising at least the third beam, whereby application of current to the third circuit displaces the member in a third radial direction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
a seventh circuit comprising the first and fourth beams, whereby application of current to the seventh circuit displaces the member in a seventh radial direction;
an eighth circuit comprising the second and fourth beams, whereby application of current to the eighth circuit displaces the member in a eighth radial direction; and
a ninth circuit comprising the third and fourth beams, whereby application of current to the ninth circuit displaces the member in a ninth radial direction.
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12. The apparatus of claim 11 comprising a tenth circuit comprising the first, second, and third beams, whereby application to the tenth circuit displaces the member in a tenth radial direction.
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13. The apparatus of claim 12 wherein the tenth circuit comprises a third current density in the first beam and a fourth current density in the second beam less than the third current density resulting in displacement of the member in a eleventh radial direction.
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14. The apparatus of claim 1 comprising a cold arm have a first end anchored to the surface of the substrate and a distal end mechanically coupled to the member.
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15. The apparatus of claim 1 comprising a cold arm have a first end anchored to the surface of the substrate and a distal end mechanically and electrically coupled to the member.
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16. The apparatus of claim 1 wherein the first, second, and third beams comprise a symmetrical cross-sectional configuration.
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17. The apparatus of claim 1 wherein the first, second, and third beams comprise an asymmetrical cross-sectional configuration.
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18. The apparatus of claim 10 wherein the first, second, third and fourth beams comprise a generally rectangular cross-sectional configuration.
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19. The apparatus of claim 1 comprising a plurality of multi-directional thermal actuators on the substrate.
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20. A multi-directional thermal actuator constructed on a surface of a substrate, the apparatus comprising:
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at least three beams each cantilevered from one or more anchors at a first end to extend generally parallel to the surface of the substrate in an unactivated state, wherein at least one of the beams is not coplanar with the other two beams; and
a member mechanically coupling distal ends of the beams, whereby application of current to a circuit comprising combinations of any two or more of the beams displaces the member in one of three or more non-parallel radial directions, respectively.
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21. A multi-directional thermal actuator constructed on a surface of a substrate, the apparatus comprising:
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four beams each cantilevered from one or more anchors at a first end to extend generally parallel to the surface of the substrate, the beams being arranged in a generally rectangular cross-sectional configuration; and
a member mechanically coupling distal ends of the beams. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46)
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Specification