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Multi-directional thermal actuator

  • US 6,438,954 B1
  • Filed: 04/27/2001
  • Issued: 08/27/2002
  • Est. Priority Date: 04/27/2001
  • Status: Expired due to Fees
First Claim
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1. A multi-directional thermal actuator constructed on a surface of a substrate, the apparatus comprising:

  • a first beam cantilevered from an anchor at a first end to extend generally parallel to the surface of the substrate in an unactivated configuration;

    a second beam cantilevered from an anchor at a first end to extend generally parallel to the surface of the substrate in an unactivated configuration;

    a third beam cantilevered from an anchor at a first end to extend generally parallel to the surface of the substrate in an unactivated configuration, wherein the first, second, and third beams are not coplanar;

    a member mechanically coupling distal ends of the first, second, and third beams;

    a first circuit comprising at least the first beam, whereby application of current to the first circuit displaces the member in a first radial direction;

    a second circuit comprising at least the second beam, whereby application of current to the second circuit displaces the member in a second radial direction; and

    a third circuit comprising at least the third beam, whereby application of current to the third circuit displaces the member in a third radial direction.

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