Multimirror stack for vertical integration of MEMS devices in two-position retroreflectors

• US 6,439,728 B1
• Filed: 08/28/2001
• Issued: 08/27/2002
• Est. Priority Date: 08/28/2001
• Status: Active Grant

• Current Assignee: Altera Corporation (Intel Corporation)
• Original Assignee: Network Photonics, Inc.
• Inventors: Copeland, Frederick Kent
• Primary Examiner(s): SIKDER, MOHAMMAD YUNUS
• Application Number:
  US09/941,998
• Time in Patent Office: 364 Days
• Field of Search: 359/515, 359/224, 359/225, 359/226, 359/298, 359/527, 359/827, 359/130, 359/131, 359/132, 359/173, 385/24, 385/37, 385/14, 385/17, 385/16, 385/18-23
• US Class Current: 359/515
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B
• CPC Class Codes: G02B 5/12 Reflex reflectors

Abstract

A retroreflector is provided with a substrate over which a moveable micromirror is formed. The moveable micromirror is adapted to be tilted into at least two distinct positions. A multimirror stack is also positioned on the substrate. The multimirror stack includes multiple fixed structures bonded together. Each of the fixed structures has a reflective surface, and the multimirror stack is configured with respect to the moveable micromirror to provide retroreflection paths. An optical ray incident at a predetermined angle with respect to the substrate is subjected to retroreflection for at least two distinct positions of the moveable micromirror. Each retroreflection includes a reflection off the moveable micromirror and a reflection off one of the fixed structures.

Claims

1. A retroreflector comprising:

a substrate;

a moveable micromirror formed over the substrate and adapted to be tilted into at least two distinct positions; and

a multimirror stack positioned on the substrate, the multimirror stack including a plurality of fixed structures bonded together, each such fixed structure having a reflective surface, wherein the multimirror stack is configured such that an optical ray incident at a predetermined angle with respect to the substrate is subject to retroreflection for the at least two distinct positions of the moveable micromirror, such retroreflection including a reflection off the moveable micromirror and a reflection off one of the plurality of fixed structures.

2. The retroreflector recited in claim 1 wherein the optical ray is incident on the moveable micromirror.

3. The retroreflector recited in claim 1 wherein the fixed structures are substantially isomorphic in shape.

4. The retroreflector recited in claim 1 wherein each of the fixed structures comprises the same material.

5. The retroreflector recited in claim 1 wherein the material is PYREX®

.

6. The retroreflector recited in claim 1 wherein the plurality of fixed structures are bonded along surfaces substantially parallel to the substrate.

7. The retroreflector recited in claim 1 further comprising an additional fixed structure positioned on the substrate and having a reflective surface, wherein each retroreflection further comprises a reflection off the additional fixed structure.

8. The retroreflector recited in claim 7 wherein the optical ray is incident on the additional fixed structure.

9. The retroreflector recited in claim 7 wherein the additional fixed surface is substantially isomorphic in shape to at least one of the plurality of fixed structures.

10. The retroreflector recited in claim 9 wherein the at least one of the plurality of fixed structures comprises a fixed structure in contact with the substrate.

11. The retroreflector recited in claim 7 further comprising a window for hermetically sealing the moveable micromirror, the multimirror stack, and the additional fixed structure.

12. The retroreflector recited in claim 7 wherein the optical ray is incident substantially orthogonal to the substrate.

13. A method for directing an optical ray, the method comprising:

providing a retroreflector comprising a substrate, a moveable micromirror formed over the substrate and adapted to be tilted into at least two distinct positions, and a multimirror stack positioned on the substrate, the multimirror stack including a plurality of fixed structures bonded together, each such fixed structure having a reflective surface;

propagating the optical ray incident at a predetermined angle with respect to the substrate to provide a first retroreflection of the optical ray, such first retroreflection including a reflection off the moveable micromirror and a reflection off a first of the plurality of fixed structures; and

changing a tilt of the moveable micromirror to retroreflect the optical ray with a second retroreflection that includes a reflection off the moveable micromirror and a reflection off a second of the plurality of fixed structures.

14. The method recited in claim 13 wherein the optical ray is incident on the moveable micromirror.

15. The method recited in claim 13 wherein the retroreflector further comprises an additional fixed structure positioned on the substrate and having a reflective surface, wherein the first and second retroreflections further include a reflection off the additional fixed structure.

16. The method recited in claim 15 wherein the optical ray is incident on the additional fixed structure.

17. The method recited in claim 13 wherein propagating the optical ray comprises propagating the optical ray through a window the hermetically seals the moveable micromirror, the multimirror stack, and the additional fixed structure.

18. A retroreflector comprising:

support means;

moveable reflection means formed over the support means and adapted to move into at least two distinct positions; and

fixed reflection means positioned on the support means, the fixed reflection means configured such that an optical ray incident at a predetermined angle with respect to the support means is retroreflected for the at least two distinct positions of the moveable reflection means along distinct paths, each such path including a reflection off the moveable reflection means and off a portion of the fixed reflection means.

19. The retroreflector recited in claim 18 wherein the optical ray is incident on the moveable reflection means.

20. The retroreflector recited in claim 18 further comprising additional fixed reflection means positioned on the support means, wherein each such path further includes a reflection off the additional fixed reflection means.

21. The retroreflector recited in claim 20 further comprising means for sealing the moveable reflection means, the fixed reflection means, and the additional fixed reflection means.

22. The retroreflector recited in claim 21 wherein the sealing means is transparent to the optical ray.