Method for improving seed layer electroplating for semiconductor
First Claim
1. A method of manufacturing a semiconductor device, comprising the steps of:
- providing a semiconductor with a dielectric layer formed thereon, wherein said dielectric layer overlays a region on said semiconductor;
forming an opening in said dielectric layer, said opening defined by sidewalls of said dielectric layer and a bottom exposing a portion of said region on said semiconductor;
depositing an initially deposited copper seed layer by a non-electrochemical deposition process over said dielectric layer and in said opening, including along said walls, said initially deposited copper seed layer formed to a thickness insufficient to fill said opening;
depositing a secondarily deposited copper seed layer by an electrochemical deposition process over said initially deposited copper seed layer, said depositing performed initially at a very low rate and increased to a low rate, wherein plating at the very low deposition rate is continued until under a few hundred angstroms of said copper seed layer have been deposited and plating at the low rate is continued until the copper deposited on the sidewalls of said opening meets copper deposited on the bottom; and
depositing copper material in contact with said secondarily deposited seed layer by a third process to substantially fill said opening.
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Accused Products
Abstract
A method is provided of forming a semiconductor seed layer starting with a non-electrochemical deposition of an initial deposition of the seed layer. This is followed by a very slow deposition rate electrochemical deposition with an organic additive at the beginning of the plating process to overcome the initial thin seed coverage at the bottom and bottom sidewall of a feature. The electrochemical deposition plates at a very low rate initially followed by a low rate deposition to build up a thicker and more uniform seed layer at the bottom and bottom sidewall. In the meantime, this slow plating rate step only adds a small thickness to the top portion of the feature where non-electrochemical deposition seed coverage was initially thicker.
65 Citations
9 Claims
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1. A method of manufacturing a semiconductor device, comprising the steps of:
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providing a semiconductor with a dielectric layer formed thereon, wherein said dielectric layer overlays a region on said semiconductor;
forming an opening in said dielectric layer, said opening defined by sidewalls of said dielectric layer and a bottom exposing a portion of said region on said semiconductor;
depositing an initially deposited copper seed layer by a non-electrochemical deposition process over said dielectric layer and in said opening, including along said walls, said initially deposited copper seed layer formed to a thickness insufficient to fill said opening;
depositing a secondarily deposited copper seed layer by an electrochemical deposition process over said initially deposited copper seed layer, said depositing performed initially at a very low rate and increased to a low rate, wherein plating at the very low deposition rate is continued until under a few hundred angstroms of said copper seed layer have been deposited and plating at the low rate is continued until the copper deposited on the sidewalls of said opening meets copper deposited on the bottom; and
depositing copper material in contact with said secondarily deposited seed layer by a third process to substantially fill said opening. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification