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Method of depositing particles with an electrostatic chuck

  • US 6,440,486 B2
  • Filed: 12/19/2000
  • Issued: 08/27/2002
  • Est. Priority Date: 04/09/1996
  • Status: Expired due to Fees
First Claim
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1. A method of manufacturing a pharmaceutical composition comprising:

  • (a) adhering a pharmaceutical substrate to an electrostatic chuck; and

    (b) applying particles to the pharmaceutical substrate which is adhered to the electrostatic chuck, and electrostatically adhering the particles to the substrate.

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