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Monolithic single pole double throw RF MEMS switch

  • US 6,440,767 B1
  • Filed: 01/23/2001
  • Issued: 08/27/2002
  • Est. Priority Date: 01/23/2001
  • Status: Expired due to Fees
First Claim
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1. A method of switching an RF signal applied at an input port to one of two output ports, comprising the steps of:

  • providing a monolithic SPDT RF MEMS switch comprising;

    a substrate;

    an input line on top of the substrate;

    a first output line on top of the substrate and separated from the input line;

    a first substrate electrode on top of the substrate, located adjacent to but separated from the input line and the first output line;

    a second output line on top of the substrate and separated from the input line;

    a second substrate electrode on top of the substrate, located adjacent to but separated from the input line and the second output line;

    a first armature comprising;

    a first armature lower structural layer having a first end mechanically connected to the substrate and a second end positioned over the input line and first output line;

    a first conducting transmission line located at the second end of the first armature structural layer and suspended above the input line and the first output line; and

    a first suspended armature electrode disposed above and in contact with the first armature lower structural layer and suspended above the first substrate electrode; and

    a second armature comprising;

    a second armature lower structural layer having a first end mechanically connected to the substrate and a second end positioned over the input line and the second output line;

    a second conducting transmission line located at the second end of the second armature structural layer and suspended above the input line and the second output line; and

    a second suspended armature electrode disposed above and in contact with the second armature lower structural layer and suspended above the second substrate electrode; and

    connecting the input port to the input line;

    connecting one of the output ports to the first output line and the other output port to the second output line; and

    applying a voltage between a selected one of the two substrate electrodes and the armature electrode suspended above the substrate electrode so as to cause the armature suspended above the selected substrate electrode to close.

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