Method to enhance the adhesion of silicon nitride to low-k fluorinated amorphous carbon using a silicon carbide adhesion promoter layer

• US 6,440,878 B1
• Filed: 04/03/2000
• Issued: 08/27/2002
• Est. Priority Date: 04/03/2000
• Status: Expired due to Fees

• Current Assignee: Sharp Laboratories of America Incorporated (Hon Hai Precision Industry Co., Ltd.)
• Original Assignee: Sharp Laboratories of America Incorporated (Hon Hai Precision Industry Co., Ltd.)
• Inventors: Nguyen, Tue, Yang, Hongning
• Primary Examiner(s): Nelms, David
• Assistant Examiner(s): Le, Thao P
• Application Number:
  US09/541,255
• Time in Patent Office: 876 Days
• Field of Search: 438/787, 438/790, 438/783, 438/761, 438/758
• US Class Current: 438/783
• CPC Class Codes: C23C 16/325 Silicon carbide
• CPC Class Codes: C23C 16/345 Silicon nitride
• CPC Class Codes: H01L 21/0212 the material being fluoro carbon compounds, e.g.(CFx) n, (CHxFy) n or polytetrafluoroethylene
• CPC Class Codes: H01L 21/02274 in the presence of a plasma [PECVD]
• CPC Class Codes: H01L 21/02304 formation of intermediate layers, e.g. buffer layers, layers to improve adhesion, lattice match or diffusion barriers
• CPC Class Codes: H01L 21/02362 formation of intermediate layers, e.g. capping layers or diffusion barriers
• CPC Class Codes: H01L 21/3127 Layers comprising fluoro (hydro)carbon compounds, e.g. polytetrafluoroethylene
• CPC Class Codes: H01L 21/314 Inorganic layers H01L21/3105, H01L21/32 take precedence
• CPC Class Codes: H01L 21/3146 Carbon layers, e.g. diamond-like layers
• CPC Class Codes: H01L 21/3185 of siliconnitrides
• CPC Class Codes: H01L 21/76801 characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
• CPC Class Codes: H01L 21/76807 for dual damascene structures
• CPC Class Codes: H01L 21/76832 Multiple layers
• CPC Class Codes: H01L 2221/1036 Dual damascene with different via-level and trench-level dielectrics

Abstract

A plasma enhanced chemical vapor deposition (PECVD) process is provided for depositing one or more dielectric material layers on a substrate for use in interconnect structures of integrated circuits. The method comprises the steps of depositing a fluorinated amorphous carbon (a-F:C) layer on a substrate by providing a fluorine containing gas, preferably octafluorocyclobutane, and a carbon containing gas, preferably methane, in ratio of approximately 5.6, so as to deposit a a-F:C layer having an internal compressive stress of approximately 28 MPa After deposition the film is annealed at approximately 400° C. for approximately two hours. An adhesion promoter layer of relatively hydrogen-free hydrogeneated silicon carbide is then deposited on the a-F:C layer using silane (SiH₄) and methane (CH₄) as the deposition gases. The silicon carbide layer may be deposited at a rate of approximately 180 Å per minute and typically results in deposition of a silicon carbide layer having an internal compressive stress of approximately 400 MPa. The deposited silicon carbide layer has relatively few hydrogen bonds thereby yielding a compact structure which promotes adhesion of the a-F:C layer to a silicon nitride layer and to the a-F:C layer, and which reduces diffusion of fluorine through the silicon carbide layer. A silicon nitride layer is then deposited on the adhesion promoter layer, the deposition materials preferably comprising silane (SiH₄) and nitrogen (N₂) in a ratio of 30:100 at 400° C. The silicon nitride layer formed has relatively few hydrogen bonds thereby resulting in a layer having an internal compressive stress of approximately 240 MPa This stacked layer structure has thermal stability and resists peeling and cracking up to 450° C., and the a-F:C dielectric layer has a dielectric constant (k) as low, or lower, than 2.5.

Claims

1. A method of fabricating an integrated circuit, comprising the steps of:

providing a substrate;

depositing a fluorinated amorphous carbon layer on the substrate;

depositing a silicon carbide layer on the fluorinated amorphous carbon layer; and

depositing a silicon nitride layer on the silicon carbide layer.

2. The method of claim 1 wherein said step of depositing said silicon carbide layer includes providing silane (SiH₄) and a carbon containing gas in a flow ratio of 0.735, and wherein said carbon containing gas is chosen from the group consisting of C₂H₄, C₂H₆ and CH₄.

3. The method of claim 1 wherein said silicon carbide layer is deposited having an internal compressive stress in a range of 300 to 500 MPa and a compact, essentially hydrogen-free structure.

4. The method of claim 1 wherein said silicon carbide layer is deposited at a rate in a range of 150 to 250 angstroms per minute and wherein said silicon carbide layer has a final thickness of at least 50 angstroms.

5. The method of claim 1 wherein each of the depositing steps takes place in a plasma enhanced chemical vapor deposition chamber at a temperature in a range of 200 to 500°

C.

6. The method of claim 1 wherein the step of depositing said fluorinated amorphous carbon layer includes providing octafluorocyclobutane (C₄F₈) and a hydrogen-carbon gas in a ratio range of 5.5 to 5.7, and wherein said hydrogen-carbon gas is chosen from the group consisting of C₂H₄, C₂H₆ and CH₄.

7. The method of claim 1 further comprising the step of annealing said fluorinated amorphous carbon layer at a temperature of at least 350°

C. for at least fifty minutes, and wherein said fluorinated amorphous carbon layer has an internal compressive stress in a range of 18 to 38 MPa prior to annealing, has an internal tensile stress in a range of 20 to 40 MPa after annealing, and has a dielectric constant of 2.5 or less.

8. The method of claim 1 wherein the step of depositing said silicon nitride layer includes providing silane (SiH₄) and nitrogen (N₂) in a ratio range of 30:

50 to 30;

150, and providing a high frequency power of approximately 13.56 MHz but not providing a low frequency power less than 1000 KHz.

9. The method of claim 1 further comprising the step of heating the substrate having the fluorinated amorphous carbon layer, the silicon carbide layer, and the silicon nitride layer thereon, to a temperature in a range of 350 to 500°

C. for at least one hour, wherein the fluorinated amorphous carbon layer, the silicon carbide layer, and the silicon nitride layer do not blister or peel away from one another during or after said heating step.

10. The method of claim 1 wherein the silicon carbide layer as deposited has a compact, essentially hydrogen-free structure which inhibits diffusion of fluorine therethrough.

11. A method of fabricating an integrated circuit, comprising the steps of:

providing a substrate;

depositing a single fluorinated amorphous carbon layer on the substrate;

depositing a silicon carbide layer directly on the single fluorinated amorphous carbon layer; and

depositing a silicon nitride layer on the silicon carbide layer.