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Near field optical scanning system employing microfabricated solid immersion lens

  • US 6,441,359 B1
  • Filed: 10/07/1999
  • Issued: 08/27/2002
  • Est. Priority Date: 10/20/1998
  • Status: Expired due to Fees
First Claim
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1. A supported solid immersion lens for use in a near field optical scanning system comprising:

  • a thin flexible silicon or silicon nitride support, and a silicon or silicon nitride solid immersion lens having a curved surface and integral tip integral with the flexible support for focusing incident optical radiation to a point opposite the curved surface.

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