Piezoelectric resonator

• US 6,441,539 B1
• Filed: 11/06/2000
• Issued: 08/27/2002
• Est. Priority Date: 11/11/1999
• Status: Expired due to Fees

• Current Assignee: Murata Manufacturing Co Limited
• Original Assignee: Murata Manufacturing Co Limited
• Inventors: Kitamura, Hidekazu, Inoue, Kazuhiro, Takeuchi, Masaki
• Primary Examiner(s): Ramirez, Nestor
• Assistant Examiner(s): ADDISON, KAREN B
• Application Number:
  US09/706,603
• Time in Patent Office: 659 Days
• Field of Search: H03/H.217, H01/L 4.104, H01/L 4.504, 310/324, 310/346, 310/321
• US Class Current: 310/346
• CPC Class Codes: H03H 3/02 for the manufacture of piezoelectric or electrostrictive resonators or networks H03H3/08 takes precedence
• CPC Class Codes: H03H 9/02102 of temperature influence cutting angles H03H9/02015
• CPC Class Codes: H03H 9/173 Air-gaps
• CPC Class Codes: H03H 9/174 Membranes
• CPC Class Codes: H03H 9/176 consisting of ceramic material H03H9/177, H03H9/178 take precedence

Abstract

A piezoelectric resonator includes a laminated structure having a piezoelectric laminate, at least one pair of electrodes and a substrate. The piezoelectric laminate includes at least one first piezoelectric layer having a positive temperature coefficient of a resonant frequency and at least one second piezoelectric layer which has a negative temperature coefficient of a resonant frequency. The at least one pair of electrodes interpose at least one of the first and second piezoelectric layers. The substrate supports the laminated structure and holds a portion of the laminated structure such that a suspended portion of the laminated structure vibrates in response to application of a voltage across the pair of electrodes.

Claims

1. A piezoelectric resonator comprising:

a laminated structure including at least one first piezoelectric layer which has a positive temperature coefficient of a resonant frequency and at least one second piezoelectric layer which has a negative temperature coefficient of a resonant frequency;

at least a pair of electrodes interposing at least one of the first and second piezoelectric layers; and

a substrate supporting the laminated structure and holding a portion of the laminated structure such that the holding portion vibrates by applying a voltage across the pair of electrodes.

2. A piezoelectric resonator according to claim 1, wherein the pair of electrodes interpose the at least one first piezoelectric layer and the at least one second piezoelectric layer.

3. A piezoelectric resonator according to claim 1, wherein the at least one first piezoelectric layer includes as a primary component one of AlN and PbZr_xTi₍₁₋

x)O₃ (0.54≦

x≦

1).

4. A piezoelectric resonator according to claim 1, wherein the at least one second piezoelectric layer includes as a primary component one piezoelectric material selected from the group consisting of ZnO, LiNbO₃, LiTaO₃, and PbZr_xTi₍₁₋

x)O₃ (0≦

x≦

0.52).

5. A piezoelectric resonator according to claim 1, wherein a thickness of the at least one first piezoelectric layer and a thickness of the at least one second piezoelectric layer are such that a temperature coefficient of a resonant frequency of the piezoelectric laminate is substantially zero.

6. A piezoelectric resonator according to claim 1, wherein the substrate has a frame shape having an opening, and the holding portion of the laminated structure is positioned above the opening.

7. A piezoelectric resonator according to claim 1, wherein the laminated structure has an air-bridge structure in which the holding portion of the laminated structure is spaced apart from the substrate.

8. A piezoelectric resonator according to claim 1, wherein the piezoelectric laminate includes an additional first piezoelectric layer, the additional first piezoelectric layer and the at least one first piezoelectric layer have substantially the same thickness and interpose the at least second piezoelectric layer.

9. A piezoelectric resonator according to claim 1, wherein the piezoelectric laminate includes an additional second piezoelectric layer, the additional second piezoelectric layer and the at least one second piezoelectric layer have substantially the same thickness and interpose the at least first piezoelectric layer.

10. A piezoelectric resonator according to claim 1, wherein the laminated structure includes an insulating layer between the substrate and the piezoelectric laminate.

11. A piezoelectric resonator according to claim 10, wherein the pair of electrodes interpose the at least one first piezoelectric layer and the at least one second piezoelectric layer.

12. A piezoelectric resonator according to claim 10, wherein the at least one first piezoelectric layer includes as a primary component one of AlN and PbZr_xTi₍₁₋

x)O₃ (0.54≦

x≦

1).

13. A piezoelectric resonator according to claim 10, wherein the at least one second piezoelectric layer includes as a primary component, one piezoelectric material selected from the group consisting of ZnO, LiNbO₃, LiTaO₃, and PbZr_xTi₍₁₋

x)O₃ (0≦

x≦

0.52).

14. A piezoelectric resonator according to claim 10, wherein a thickness of the at least one first piezoelectric layer, a thickness of the at least one second piezoelectric layer and a thickness of the insulating layer are such that a temperature coefficient of a resonant frequency of the piezoelectric laminate is substantially zero.

15. A piezoelectric resonator according to claim 10, wherein the substrate has a frame shape having an opening, and the holding portion of the laminated structure is positioned above the opening.

16. A piezoelectric resonator according to claim 10, wherein the laminated structure has an air-bridge structure in which the holding portion of the laminated structure is spaced apart from the substrate.

19. An electronic apparatus comprising at least one piezoelectric resonator according to claim 1.

17. A filter comprising:

an input terminal;

an output terminal;

first and second piezoelectric resonators each including;

a laminated structure including at least one first piezoelectric layer which has a positive temperature coefficient of a resonant frequency and at least one second piezoelectric layer which has a negative temperature coefficient of a resonant frequency;

at least a pair of electrodes interposing at least one of the first and second piezoelectric layers; and

a substrate supporting the laminated structure and holding a portion of the laminated structure such that the holding portion vibrates by applying a voltage across the pair of electrodes;

wherein the first piezoelectric resonator is connected between the input terminal and the output terminal to define a series arm and the second piezoelectric resonator is connected between the series arm and a ground level to define a series arm.

18. A filter according to claim 17, wherein the filter is one of a T-type ladder filter, an L-type ladder filter and a π

-type ladder filter.

20. An electronic apparatus according to claim 17, wherein the apparatus includes at least one of a T-type ladder filter, an L-type ladder filter and a π

-type ladder filter.