Optical filter fabrication method and apparatus, optical filter, fiber holder with spiral groove, and phase mask

• US 6,442,312 B1
• Filed: 08/24/2000
• Issued: 08/27/2002
• Est. Priority Date: 07/08/1997
• Status: Expired due to Term

• Current Assignee: Hanger Solutions, LLC (IP Investments Group LLC)
• Original Assignee: OKI Electric Industry Company Limited
• Inventors: Terao, Yoshitaka, Nomoto, Tsutomu, Nishiki, Akihiko
• Primary Examiner(s): Palmer, Phan T. H.
• Application Number:
  US09/643,684
• Time in Patent Office: 733 Days
• Field of Search: 385/37, 385/15, 385/27, 385/28, 385/10, 430/321, 430/5
• US Class Current: 385/37
• CPC Class Codes: G02B 6/02138 based on illuminating a phase mask
• CPC Class Codes: G02B 6/02152 involving moving the fibre or a manufacturing element, stretching of the fibre G02B6/02147 takes precedence
• CPC Class Codes: G02B 6/02209 Mounting means, e.g. adhesives, casings G02B6/02171 and G02B6/02195 take precedence
• CPC Class Codes: G02B 6/362 Vacuum holders for optical elements
• CPC Class Codes: G02B 6/3636 the mechanical coupling means being grooves G02B6/3652 takes precedence
• CPC Class Codes: G02B 6/3692 with surface micromachining involving etching, e.g. wet or dry etching steps surface micromachining involving subtractive techniques B81C1/00055

Abstract

An optical filter is manufactured by placing a photosensitive optical fiber in a spiral arrangement on a fiber holder, preferably having a spiral groove for holding the fiber, and exposing the fiber to ultraviolet light through a phase mask having a spiral diffraction grating, forming an in-fiber Bragg grating. The fiber can be conveniently scanned by an ultraviolet beam as the fiber holder and phase mask turn on a rotating stage. The fiber can be compactly packaged between the fiber holder and a cover. The fiber holder and cover can be formed by coating a substrate with layers of polymer material, the spiral groove being formed by photolithographic patterning of one of the layers.

Claims

1. An optical filter, comprising:

a fiber holder having a flat surface with a spiral groove; and

an optical fiber with a periodically modulated refractive index, held in said spiral groove.

2. The optical filter of claim 1, further comprising a cover covering the flat surface of said fiber holder, thereby protecting said optical fiber.

3. The optical filter of claim 2, wherein said fiber holder and said cover are made of a material selected from among aluminum oxide, titanium oxide, aluminum nitride, and boron nitride.

4. The optical filter of claim 2, wherein said fiber holder and said cover have coefficients of thermal expansion not less than 10⁻

7/°

C. and not greater than 10<sup>−

6</sup>/°

C.

5. The optical filter of claim 2, wherein said cover is attached to said fiber holder by an adhesive.

6. The optical filter of claim 5, wherein said adhesive is an epoxy adhesive.

7. The optical filter of claim 5, wherein said fiber holder has a groove for holding excess portions of said adhesive.

8. The optical filter of claim 2, wherein said cover comprises a protective layer formed on said fiber holder.

9. The optical filter of claim 1, wherein said fiber holder comprises:

a flat substrate; and

a polymer layer covering said flat substrate except in a spiral region constituting said spiral groove.

10. The optical filter of claim 9, further comprising a protective underlayer covering said flat substrate beneath said polymer layer and in said spiral groove.

11. The optical filter of claim 10, wherein said protective underlayer comprises a polymer material.

12. The optical filter of claim 9, further comprising an upper protective layer covering said polymer layer and said optical fiber.

13. The optical filter of claim 12, wherein said upper protective layer comprises a polymer material.

14. The optical filter of claim 1, wherein said fiber holder has an annular disc shape, said spiral groove extending from an outer perimeter of said fiber holder to an inner perimeter of said fiber holder.

15. The optical filter of claim 1 wherein said optical fiber is photosensitive.

16. A fiber holder for holding a photosensitive optical fiber, comprising a flat plate having on one surface a spiral groove for receiving said photosensitive optical fiber.

17. The fiber holder of claim 16, wherein said surface of said fiber holder is coated with a coating substantially suppressing reflection of ultraviolet light.

18. The fiber holder of claim 16, wherein said spiral groove has a depth exceeding a diameter of said photosensitive optical fiber.

19. The fiber holder of claim 16, wherein said fiber holder has an annular disc shape, said spiral groove extending from an outer perimeter of said fiber holder to an inner perimeter of said fiber holder.

20. A phase mask comprising a plate transparent to ultraviolet light, having a spiral pattern of periodic pits forming a spiral diffraction grating on one surface.

21. The phase mask of claim 20, wherein said pits are grouped along a path of said spiral pattern into a plurality of zones, the pits in different zones having different mutual spacings.

22. The phase mask of claim 20, wherein said plate is made of quartz glass.

23. An apparatus for manufacturing an optical filter by forming a Bragg grating in a photosensitive optical fiber, comprising:

a fiber holder formed as a flat plate having an upper surface, with a spiral groove on said upper surface, said photosensitive optical fiber being held in said spiral groove;

a phase mask formed as a plate transparent to ultraviolet light, having a spiral pattern of periodic pits forming a spiral diffraction grating on one surface, said phase mask being disposed facing said fiber holder with said one surface parallel to the upper surface of said fiber holder, said spiral pattern being aligned with the spiral groove of said fiber holder;

a rotating stage supporting said fiber holder and said phase mask, rotating on an axis passing through a center of the spiral pattern of said phase mask, perpendicular to the upper surface of said fiber holder; and

an optical system for illuminating said photosensitive optical fiber with ultraviolet light through said phase mask.

24. The apparatus of claim 23, wherein said upper surface of said fiber holder is coated with a coating substantially suppressing reflection of ultraviolet light.

25. The apparatus of claim 23, wherein said spiral groove has a depth exceeding a diameter of said photosensitive optical fiber.

26. The apparatus of claim 23, wherein the pits in said phase mask are grouped along a path of said spiral pattern into a plurality of zones, the pits in different zones having different mutual spacings.

27. The apparatus of claim 23, wherein said phase mask is formed of quartz glass.

28. The apparatus of claim 23, wherein said optical system comprises:

a light source for generating said ultraviolet light; and

a mirror for directing said ultraviolet light toward said phase mask.

29. The apparatus of claim 28, further comprising a scanning controller for moving said mirror, thereby causing said ultraviolet light to scan across said phase mask in a radial direction of said spiral pattern.

30. The apparatus of claim 29, wherein said scanning controller synchronizes movement of said mirror with rotation of said rotating stage.

31. The apparatus of claim 23, further comprising an apodizing system for varying an amount of ultraviolet light to which said optical fiber is exposed according to position on the upper surface of said fiber holder.

32. The apparatus of claim 31, wherein said optical system produces pulses of ultraviolet light, and said apodizing system controls a repetition rate of said pulses.

33. The apparatus of claim 31, wherein said apodizing system comprises a variable optical attenuator for attenuating said ultraviolet light by varying amounts.

34. The apparatus of claim 31, wherein said apodizing system controls the rotational speed of said rotating stage.