Baffle for a capacitive pressure sensor

• US 6,443,015 B1
• Filed: 09/10/1999
• Issued: 09/03/2002
• Est. Priority Date: 09/10/1999
• Status: Expired due to Term

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Poulin, James, Hinkle, Luke D., Grudzien, Chris P.
• Primary Examiner(s): PATEL, HARSHAD R
• Application Number:
  US09/394,804
• Time in Patent Office: 1,089 Days
• Field of Search: 737/15, 737/16, 737/18, 737/17, 737/24, 737/56, 737/23, 361/283.4, 361/708, 361/707, 361/706
• US Class Current: 73/724
• CPC Class Codes: G01L 19/0636 using particle filters

Abstract

A baffle is positioned near a diaphragm of a capacitive pressure sensor to have a small volume therebetween. The baffle creates a high aspect ratio path to create molecular flow for molecules to travel before reaching the diaphragm. The path encourages contaminants to stick to the baffle or housing before reaching the diaphragm. The sensor further includes a particle trap between an inlet and the baffle.

Claims

1. A capacitive pressure sensor comprising:

a housing having an inlet for receiving a fluid, the inlet being characterized by a first diameter;

a flexible diaphragm mounted within the housing, the diaphragm flexing in response to pressure from the fluid the diaphragm lying substantially in a plane when the pressure from the fluid equals a particular value;

a first baffle member disposed within the housing between the inlet and the diaphragm, the first baffle member being substantially parallel to the plane, the first baffle member having a closed central portion and peripheral openings for allowing particles smaller than the openings to pass through, the closed central portion being characterized by a second diameter that is greater than the first diameter;

a second baffle member disposed parallel to the plane within the housing between the diaphragm and the first baffle member, the second baffle member being characterized by a third diameter greater than the second diameter, a periphery of the second baffle member being spaced from the housing to allow fluid to pass in a direction perpendicular to the plane.

2. The pressure sensor of claim 1, wherein a radial path between the openings of the first baffle member and the periphery has an aspect ratio greater than 10.

3. The pressure sensor of claim 2, wherein the aspect ratio is greater than 50.

4. The pressure sensor of claim 1, wherein the housing has an annular opening for allowing particles to travel from the inlet to the openings in the first baffle member.

5. The pressure sensor of claim 1, wherein the volume between the second baffle member and diaphragm is less than 1.6 cm³.

6. The pressure sensor of claim 5, wherein a radial path between the openings of the first baffle member and the periphery has an aspect ratio greater than 10.

7. The pressure sensor of claim 6, wherein the aspect ratio is greater than 50.