Baffle for a capacitive pressure sensor
First Claim
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1. A capacitive pressure sensor comprising:
- a housing having an inlet for receiving a fluid, the inlet being characterized by a first diameter;
a flexible diaphragm mounted within the housing, the diaphragm flexing in response to pressure from the fluid the diaphragm lying substantially in a plane when the pressure from the fluid equals a particular value;
a first baffle member disposed within the housing between the inlet and the diaphragm, the first baffle member being substantially parallel to the plane, the first baffle member having a closed central portion and peripheral openings for allowing particles smaller than the openings to pass through, the closed central portion being characterized by a second diameter that is greater than the first diameter;
a second baffle member disposed parallel to the plane within the housing between the diaphragm and the first baffle member, the second baffle member being characterized by a third diameter greater than the second diameter, a periphery of the second baffle member being spaced from the housing to allow fluid to pass in a direction perpendicular to the plane.
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Abstract
A baffle is positioned near a diaphragm of a capacitive pressure sensor to have a small volume therebetween. The baffle creates a high aspect ratio path to create molecular flow for molecules to travel before reaching the diaphragm. The path encourages contaminants to stick to the baffle or housing before reaching the diaphragm. The sensor further includes a particle trap between an inlet and the baffle.
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Citations
7 Claims
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1. A capacitive pressure sensor comprising:
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a housing having an inlet for receiving a fluid, the inlet being characterized by a first diameter;
a flexible diaphragm mounted within the housing, the diaphragm flexing in response to pressure from the fluid the diaphragm lying substantially in a plane when the pressure from the fluid equals a particular value;
a first baffle member disposed within the housing between the inlet and the diaphragm, the first baffle member being substantially parallel to the plane, the first baffle member having a closed central portion and peripheral openings for allowing particles smaller than the openings to pass through, the closed central portion being characterized by a second diameter that is greater than the first diameter;
a second baffle member disposed parallel to the plane within the housing between the diaphragm and the first baffle member, the second baffle member being characterized by a third diameter greater than the second diameter, a periphery of the second baffle member being spaced from the housing to allow fluid to pass in a direction perpendicular to the plane. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification