Gas distribution plate

• US 6,444,040 B1
• Filed: 05/05/2000
• Issued: 09/03/2002
• Est. Priority Date: 05/05/2000
• Status: Expired due to Term

• Current Assignee: Patent Counsel M S 2061
• Original Assignee: Applied Materials Incorporated
• Inventors: Schreiber, Alex, Herchen, Harald, Lubomirsky, Dmitry, Palagashvili, David
• Primary Examiner(s): BUEKER, RICHARD R
• Application Number:
  US09/565,150
• Time in Patent Office: 851 Days
• Field of Search: 156/345, 118/715, 239/556, 239/558, 239/568
• US Class Current: 118/715
• CPC Class Codes: C23C 16/455 characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: H01L 21/67017 Apparatus for fluid treatment H01L21/67126, H01L21/6715 take precedence

Abstract

An apparatus for use in a substrate processing system. The apparatus is generally a fluid distribution plate comprising an inner disk and an outer ring. The fluid distribution plate has a plurality of openings for fluid distribution and at least one slot defined therein.

Claims

1. A fluid distribution plate for use in a substrate processing system, comprising:

an inner disk having a plurality of openings and at least one slot defined therein; and

an outer ring having a plurality of openings and at least one slot defined therein and disposed around the inner disk, where at least one slot extends entirely through the outer ring and a gap is defined between the inner disk and outer ring.

2. The fluid distribution plate of claim 1, wherein the at least one slot of the inner disk extends from a perimeter of the inner disk radially inward.

3. The fluid distribution plate of claim 1, wherein a gap is defined between an inner perimeter of the outer ring and a perimeter of the inner disk.

4. The fluid distribution plate of claim 1, wherein the outer ring has twelve slots defined therein.

5. The fluid distribution plate of claim 1, wherein the at least one slot of the outer ring extends from an outer perimeter of the inner disk radially inward.

6. The fluid distribution plate of claim 5, wherein the at least one slot of the outer ring extends from the outer perimeter to an inner perimeter of the outer ring.

7. The fluid distribution plate of claim 1, wherein the inner disk has six slots defined therein.

8. The fluid distribution plate of claim 1, wherein the at least one slot of the outer ring extends from an outer perimeter and terminates at one of said plurality of openings of said outer ring.

9. The fluid distribution plate of claim 1, wherein the outer ring further comprises a flange disposed at an inner perimeter of the outer ring.

10. The fluid distribution plate of claim 9, wherein a peripheral zone of the inner disk is supported by the flange of the outer ring.

11. The fluid distribution plate of claim 10, wherein a top surface of the flange contacts a surface of the inner disk at the peripheral zone, and both the top flange surface and the inner disk surface at the peripheral zone are highly polished.

12. The fluid distribution plate of claim 1, wherein the plurality of openings of the inner disk are arranged in a radially concentric manner on the inner disk.

13. The fluid distribution plate of claim 1, wherein the plurality of openings of the outer ring are arranged in a radially concentric manner on the outer ring.

14. The fluid distribution plate of claim 1, wherein the inner disk and the outer ring are fabricated from a ceramic material.

15. The fluid distribution plate of claim 14, wherein the ceramic material is alumina.

16. The fluid distribution plate of claim 1, wherein the inner disk and the outer ring are fabricated from an electrically conductive material.

17. A fluid distribution plate for use in a substrate processing system, comprising:

an inner disk having a plurality of openings defined therein and at least one slot extending from a perimeter of the inner disk radially inward; and

an outer ring disposed around and spaced apart from the inner disk;

the outer ring having a plurality of openings defined therein and at least one slot extending entirely through the outer ring from an outer perimeter to an inner perimeter and a gap is defined between the inner disk and outer ring.

18. The fluid distribution system of claim 17, wherein the plurality of openings of the inner disk and the plurality of openings of the outer ring allow distribution of a gas over a substrate inside the substrate processing system.