Gas distribution plate
First Claim
Patent Images
1. A fluid distribution plate for use in a substrate processing system, comprising:
- an inner disk having a plurality of openings and at least one slot defined therein; and
an outer ring having a plurality of openings and at least one slot defined therein and disposed around the inner disk, where at least one slot extends entirely through the outer ring and a gap is defined between the inner disk and outer ring.
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Accused Products
Abstract
An apparatus for use in a substrate processing system. The apparatus is generally a fluid distribution plate comprising an inner disk and an outer ring. The fluid distribution plate has a plurality of openings for fluid distribution and at least one slot defined therein.
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Citations
18 Claims
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1. A fluid distribution plate for use in a substrate processing system, comprising:
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an inner disk having a plurality of openings and at least one slot defined therein; and
an outer ring having a plurality of openings and at least one slot defined therein and disposed around the inner disk, where at least one slot extends entirely through the outer ring and a gap is defined between the inner disk and outer ring. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A fluid distribution plate for use in a substrate processing system, comprising:
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an inner disk having a plurality of openings defined therein and at least one slot extending from a perimeter of the inner disk radially inward; and
an outer ring disposed around and spaced apart from the inner disk;
the outer ring having a plurality of openings defined therein and at least one slot extending entirely through the outer ring from an outer perimeter to an inner perimeter and a gap is defined between the inner disk and outer ring.- View Dependent Claims (18)
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Specification