Bipolar plasma source, plasma sheet source, and effusion cell utilizing a bipolar plasma source

• US 6,444,945 B1
• Filed: 03/28/2001
• Issued: 09/03/2002
• Est. Priority Date: 03/28/2001
• Status: Expired due to Term

• Current Assignee: Eastman Performance Films, LLC (Eastman Chemical Company)
• Original Assignee: C P Films Incorporated
• Inventors: Maschwitz, Peter, Li, Jaime
• Primary Examiner(s): PASCHALL, MARK H
• Application Number:
  US09/818,680
• Time in Patent Office: 524 Days
• Field of Search: 219/121.54, 219/121.52, 219/121.57, 219/121.48, 219/121.47, 219/121.36, 427/569, 427/294, 427/248.1, 427/585, 427/595, 427/529, 313/632, 313/491, 118/723.E, 118/723.EB, 118/723.FE
• US Class Current: 219/121.54
• CPC Class Codes: C23C 14/243 Crucibles for source material C23C14/28, C23C14/30 take precedence
• CPC Class Codes: H01J 37/32009 Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources plasma generation in general H05H1/24
• CPC Class Codes: H01J 37/32596 Hollow cathodes
• CPC Class Codes: H05H 1/46 using applied electromagnetic fields, e.g. high frequency or microwave energy H05H1/26 takes precedence
• CPC Class Codes: H05H 1/466 using capacitive coupling means, e.g. electrodes

Abstract

A plasma source includes a structure made up of two hollow cathode shapes connected to a bipolar AC power supply. The bipolar power supply alternately drives one hollow cathode to a negative voltage while the opposite hollow cathode is driven to a positive voltage. As one of the two hollow cathode shapes is driven negative, the hollow cathode discharge forms within the corresponding cavity. The other cathode then forms an anode, causing electrons to escape the plasma and travel to the other side, completing the electric circuit. The plasma generator thus formed may be used as a heat source for an effusion cell to form a plasma from a reactant gas, or to increase the reactivity of gas situated between a vacuum deposition source and a substrate to be coated.

Claims

1. A plasma source, comprising:

a first hollow cathode structure and a second hollow cathode structure;

an AC power source connected to each of said hollow cathode structures and arranged to apply a negative voltage to a respective one of said hollow cathode structures that is sufficiently negative relative to a voltage of the other of said hollow cathode structures to cause plasma generation, said negative voltage being alternatingly applied to each of the hollow cathode structures,

wherein said AC power source is arranged such that, when said negative voltage is applied to the first hollow cathode structure and a plasma is generated therein, the second of the hollow cathode structures serves as an anode to attract electrons from the first of the two hollow cathode structures and thereby complete an electrical circuit with the power source, and

wherein when a polarity of voltage applied to the first hollow cathode structure reverses, another plasma is generated in said second hollow cathode structure, and the first hollow cathode structure serves as an anode to attract electrons from the second hollow plasma structure and thereby again complete the electrical circuit with the power source.

2. A plasma source as claimed in claim 1, wherein said hollow cathode structures are in the form of conductive structures having symmetric cylindrical openings formed therein, said cylindrical openings facing each other.

3. A plasma source as claimed in claim 1, wherein said hollow cathode structures are in the form of grooves extending along facing surfaces of the hollow cathode structures.

4. A plasma source as claimed in claim 1, wherein said AC power source is a mid-frequency generator having a midfrequency output of on the order of 10 kHz to 500 kHz.

5. A plasma source as claimed in claim 1, said plasma is in the form of a hollow cathode-type plasma discharge.

6. A plasma source as claimed in claim 1, wherein said hollow cathode structures are free of insulation.

7. A plasma source as claimed in claim 1, wherein said plasma source serves as a heat source.

8. A plasma source as claimed in claim 7, wherein said first and second hollow cathode structures are positioned on opposite sides of an exit in a lid of an effusion source, said plasma source thereby serving to provide heat, vaporize the evaporant material and provide ionization to increase a reactivity of vapors from said effusion source.

9. A plasma source as claimed in claim 1, wherein said plasma source is positioned between a vacuum deposition source and substrate, and arranged to form a transform a gas into a plasma to increase a reactivity of the gas.

10. A plasma source as claimed in claim 9, wherein said first and second hollow cathode structures include exits or slots defining a volume extending therebetween, and further comprising magnets arranged to create magnetic fields parallel to a path of electrons between said exits or slots, and whereby said electrons are confined to paths within said volume between said magnets.

11. A plasma source as claimed in claim 1, wherein said first and second hollow cathode structures include exits or slots, and further comprising magnets arranged to create magnetic fields parallel to a path of electrons between said exits or slots, and whereby said electrons are confined to paths between said magnets.

12. A plasma source as claimed in claim 11, wherein said paths are confined to a line or plane extending between said exits or slots.

13. A plasma source as claimed in claim 11, wherein said paths follow a curve extending between said hollow cathode structures and defined by said magnetic fields.

14. A method of generating a plasma, comprising the steps of:

providing first and second hollow cathode structures arranged such that free electrons can pass between the structures when a differential voltage is applied to the structures, and

applying the differential voltage to the first and second hollow cathode structures by applying an alternating current to the hollow cathode structures in such a manner that the power supply initially drives the first hollow cathode shape to a negative voltage, allowing plasma formation while the second hollow cathode shape is driven to a positive voltage in order to serve as an anode for the voltage application circuit, and then drives the first hollow cathode shape to a positive voltage, reversing the roles of plasma generator and anode.

15. A method as claimed in claim 14, wherein said AC power source is a generator having a midfrequency output of on the order of 10 kHz to 500 kHz.

16. A method as claimed in claim 14, wherein said step of applying a voltage and generating a plasma is carried out in normal mode while maintaining said hollow cathode structures cold enough not to cause thermionic emission.

17. A method of claimed in claim 14, wherein said step of applying a voltage and generating a plasma is carried out in thermionic mode while heating respective said first and second hollow cathode structures.

18. A method as claimed in claim 14, wherein said step of applying a voltage and generating a plasma is carried out between hollow cathode structures positioned adjacent an exit of an effusion source, said plasma serving to heat and/or increase the reactivity of vapors from said effusion source.

19. A method as claimed in claim 14, further comprising the step of generating magnetic fields adjacent and parallel to a path of electrons between said hollow cathode structures to thereby confine said electrons to paths extending between said hollow cathode structures.

20. An effusion source, comprising:

an effusion cell having a lid, said lid having an exit through which vapor exits the effusion source;

a plasma generator arranged in said lid adjacent said exit, said plasma generator serving as a heat source for said effusion cell.

21. An effusion source as claimed in claim 20, wherein said plasma generator comprises:

a first hollow cathode structure extending along one side of said exit and a second hollow cathode structure extending along an opposite side of said exit;

an AC power source connected to each of said hollow cathode structures such that a negative voltage sufficient to cause plasma generation is alternatingly applied to each of the hollow cathode structures,

wherein said AC power source is arranged such that, when said negative voltage is applied to the first hollow cathode structure and a plasma is generated therein, the second of the hollow cathode structures serves as an anode to attract electrons from the first of the two hollow cathode structures and thereby complete an electrical circuit with the power source,

wherein when a polarity of voltage applied to the first hollow cathode structure reverses, another plasma is generated in said second hollow cathode structure, and the first hollow cathode structure serves as an anode to attract electrons from the second hollow plasma structure and thereby again complete the electrical circuit with the power source, and

wherein said plasma serves as a heat source for vapor exiting through said exit.

22. An effusion source as claimed in claim 21, wherein said hollow cathode structures are in the form of grooves extending along facing surfaces of the hollow cathode structures.

23. An effusion source as claimed in claim 21, wherein said AC power source is a mid-frequency generator having a midfrequency output of on the order of 10 kHz to 500 kHz.

24. An effusion source as claimed in claim 20, wherein said plasma serves as a heat source for an evaporant in said cell.

25. An effusion source as claimed in claim 20, wherein said plasma serves as a heat source for structures which transfer said heat to said evaporant and ionize said evaporant to increase the reactivity of said evaporant.

26. A plasma sheet source, comprising:

a first hollow cathode structure including a first groove and a second hollow cathode structure including a second groove facing and parallel to said first groove;

an AC power source connected to each of said hollow cathode structures such that a negative voltage sufficient to cause plasma generation is alternatingly applied to each of the hollow cathode structures; and

a magnetic structure on each side of each of said grooves,

wherein said AC power source is arranged such that, when said negative voltage is applied to the first hollow cathode structure and a plasma is generated therein, the second of the hollow cathode structures serves as an anode to attract electrons from the first of the two hollow cathode structures and thereby complete an electrical circuit with the power source,

wherein when a polarity of voltage applied to the first hollow cathode structure reverses, another plasma is generated in said second hollow cathode structure, and the first hollow cathode structure serves as an anode to attract electrons from the second hollow plasma structure and thereby again complete the electrical circuit with the power source, and

wherein said magnetic structures generate a magnetic field that confines said electrons to paths extending between said grooves.

27. A plasma sheet source as claimed in claim 26, wherein said AC power source is a mid-frequency generator having a midfrequency output of on the order of 10 kHz to 500 kHz.

28. A plasma sheet source as claimed in claim 26, wherein said paths are confined to a plane extending between said slots.

29. A plasma sheet source as claimed in claim 26, wherein said paths follow a curve extending between said hollow cathode structures and defined by said magnetic fields.

30. A plasma sheet source as claimed in claim 26, wherein said plasma sheet source is positioned between a vacuum deposition source and substrate, and arranged to transform a gas into a plasma to increase a reactivity of the gas.