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Bipolar plasma source, plasma sheet source, and effusion cell utilizing a bipolar plasma source

  • US 6,444,945 B1
  • Filed: 03/28/2001
  • Issued: 09/03/2002
  • Est. Priority Date: 03/28/2001
  • Status: Expired due to Term
First Claim
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1. A plasma source, comprising:

  • a first hollow cathode structure and a second hollow cathode structure;

    an AC power source connected to each of said hollow cathode structures and arranged to apply a negative voltage to a respective one of said hollow cathode structures that is sufficiently negative relative to a voltage of the other of said hollow cathode structures to cause plasma generation, said negative voltage being alternatingly applied to each of the hollow cathode structures, wherein said AC power source is arranged such that, when said negative voltage is applied to the first hollow cathode structure and a plasma is generated therein, the second of the hollow cathode structures serves as an anode to attract electrons from the first of the two hollow cathode structures and thereby complete an electrical circuit with the power source, and wherein when a polarity of voltage applied to the first hollow cathode structure reverses, another plasma is generated in said second hollow cathode structure, and the first hollow cathode structure serves as an anode to attract electrons from the second hollow plasma structure and thereby again complete the electrical circuit with the power source.

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