Please download the dossier by clicking on the dossier button x
×

Micro-machined absolute pressure sensor

  • US 6,445,053 B1
  • Filed: 07/28/2000
  • Issued: 09/03/2002
  • Est. Priority Date: 07/28/2000
  • Status: Expired due to Fees
First Claim
Patent Images

1. An absolute pressure sensor, comprising:

  • a semiconductor membrane having a welled portion and a substantially planar peripheral surface surrounding and connected to the welled portion;

    a pad of substantially nonconductive material formed directly on a portion of the peripheral surface of the semiconductor membrane;

    a bonding layer deposited on the peripheral surface and the nonconductive pad so as to completely surround the welled portion of the semiconductor membrane;

    a generally planar nonconductive base having an upper surface with spaced apart first and second metal conductors deposited thereon, the upper surface of the nonconductive base being brought into contact with a lower surface of the bonding layer and bonded to the semiconductor membrane in a vacuum so as to form a peripheral seal and a vacuum-sealed reference cavity adjacent the welled portion of the semiconductor membrane;

    the first conductor includes a capacitor plate disposed within the vacuum-sealed reference cavity and an externally accessible lead attached to the capacitor plate and extending continuously and contiguously along the upper surface of the base through the peripheral seal;

    the second conductor being in electrical communication with the semiconductor membrane; and

    the first conductor being electrically isolated from the semiconductor membrane by the pad of substantially nonconductive material.

View all claims
  • 2 Assignments
Timeline View
Assignment View
    ×
    ×