Planar motor with linear coil arrays

• US 6,445,093 B1
• Filed: 06/26/2000
• Issued: 09/03/2002
• Est. Priority Date: 06/26/2000
• Status: Expired due to Fees

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Binnard, Michael
• Primary Examiner(s): Mullins, Burton S.
• Application Number:
  US09/603,844
• Time in Patent Office: 799 Days
• Field of Search: 310/12, 310/13, 310/14, 250/492.1, 250/491.1, 250/492.2
• US Class Current: 310/12.06
• CPC Class Codes: G03F 7/70716 Stages
• CPC Class Codes: G03F 7/70758 Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
• CPC Class Codes: H02K 2201/18 Machines moving with multiple degrees of freedom
• CPC Class Codes: H02K 41/03 Synchronous motors; Motors moving step by step; Reluctance motors H02K41/035 takes precedence

Abstract

A planar electric motor comprising a magnet array having a plurality of magnets with magnetic fields of alternating polarity and a coil array positioned adjacent to the magnet array and operable to interact with the magnetic fields to generate an electromagnetic force between the coil array and the magnet array. The coil array comprises a first linear coil array having a plurality of oval shaped coils extending longitudinally in a first direction, and a second linear coil array having a plurality of oval shaped coils extending longitudinally in a second direction generally orthogonal to the first direction. The motor is for use in moving a stage within an exposure apparatus having an optical system for imaging a pattern formed in a reticle onto an article supported by the stage.

Claims

1. A planar electric motor comprising:

a magnet array having a plurality of magnets with magnetic fields of alternating polarity; and

a coil array positioned adjacent to the magnet array and operable to interact with said magnetic fields to generate an electromagnetic force between the coil array and the magnet array, the coil array comprising a first coil array having a plurality of oval shaped coils extending longitudinally in a first direction, and a second coil array having a plurality of oval shaped coils extending longitudinally in a second direction generally orthogonal to said first direction,

wherein said first coil array is stacked on top of the second coil array and each of said first and second coil arrays includes a plurality of stacked layers of said oval shaped coils, and

wherein each of said plurality of oval shaped coils has a length to width ratio of at least 2.

2. The electric motor of claim 1, wherein each of said plurality of oval shaped coils has a continuous planar upper surface and a continuous planar lower surface generally parallel to the upper surface.

3. The electric motor of claim 1, wherein the oval shaped coils are positioned in a laterally abutting arrangement to form a plurality of rows of coils.

4. The electric motor of claim 3 wherein the rows of coils are positioned immediately adjacent one another.

5. The electric motor of claim 1, wherein the oval shaped coils of the first coil array are the same shape and size as the oval shaped coils of the second coil array.

6. The electric motor of claim 1 wherein said magnetic fields of the magnets alternate in adjacent rows and columns.

7. The electric motor of claim 6 wherein the magnets are spaced from one another along two dimensions of the magnet array.

8. The electric motor of claim 7 wherein each of said plurality of magnets has a rectangular cross-sectional shape.

9. The electric motor of claim 7 wherein each of said plurality of magnets has an octagonal cross-sectional shape.

10. The electric motor of claim 1 wherein the magnet array and coil array are operable to provide the force in first, second, and third directions, the first and second directions being generally orthogonal to one another and the third direction being generally orthogonal to the first and second directions.

11. The electric motor of claim 10 wherein the magnet array and coil array are operable to provide a torque between the coil array and the magnet array about the third direction.

12. The electric motor of claim 11 wherein the magnet array and the coil array are operable to provide a torque between the coil array and the magnet array about the first and second directions.

13. An exposure apparatus comprising:

a frame;

an optical system for forming an image on an article, the optical system being mounted on the frame;

a base positioned below the optical system;

a stage positioned adjacent to the base for supporting and positioning the article, the stage being movable relative to the base and the optical system; and

an electric motor operable to move the stage, the motor comprising a magnet array having a plurality of magnets with magnetic fields of alternating polarity, and a coil array positioned adjacent to the magnet array and operable to interact with said magnetic fields to generate an electromagnetic force between the coil array and the magnet array, the coil array comprising a first coil array having a plurality of oval shaped coils extending longitudinally in a first direction, and a second coil array having a plurality of oval shaped coils extending longitudinally in a second direction generally orthogonal to said first direction, one of the coil array and the magnet array being connected to the stage for movement therewith relative to the other of the magnet array and the coil array connected to the base,

wherein said first coil array is stacked on top of the second coil array and each of said first and second coil arrays includes a plurality of stacked layers of said oval shaped coils, and

wherein each of said plurality of oval shaped coils has a length to width ratio of at least 2.

14. The exposure apparatus of claim 13, wherein each of said plurality of oval shaped coils has a continuous planar upper surface and a continuous planar lower surface generally parallel to the upper surface.

15. The exposure apparatus of claim 13, wherein the oval shaped coils are positioned in a laterally abutting arrangement to form a plurality of rows of coils.

16. The exposure apparatus of claim 15 wherein the rows of coils are positioned immediately adjacent one another.

17. The exposure apparatus of claim 13, wherein the oval shaped coils of the first coil array are the same shape and size as the oval shaped coils of the second coil array.

18. The exposure apparatus of claim 13 wherein said magnetic fields of the magnets alternate in adjacent rows and columns.

19. The exposure apparatus of claim 18 wherein the magnets are spaced from one another along two dimensions of the magnet array.

20. The exposure apparatus of claim 19 wherein each of said plurality of magnets has a rectangular cross-sectional shape.

21. The exposure apparatus of claim 19 wherein each of said plurality of magnets has an octagonal cross-sectional shape.

22. The exposure apparatus of claim 13 wherein the magnet array and coil array are operable to provide the force in first, second, and third directions, the first and second directions being generally orthogonal to one another and the third direction being generally orthogonal to the first and second directions.

23. The exposure apparatus of claim 22 wherein the magnet array and coil array are operable to provide a torque between the coil array and the magnet array about the third direction.

24. The exposure apparatus of claim 23 wherein the magnet array and the coil array are operable to provide a torque between the coil array and the magnet array about the first and second directions.

25. The exposure apparatus of claim 13 wherein the coil array is connected to the base and the magnet array is connected to the stage for movement therewith relative to the base and the coil array.

26. A device manufactured with the exposure apparatus of claim 13.

27. A wafer on which an image has been formed by the exposure apparatus of claim 13.