Electric device testing apparatus

• US 6,445,203 B1
• Filed: 12/08/1999
• Issued: 09/03/2002
• Est. Priority Date: 12/08/1998
• Status: Expired due to Fees

• Current Assignee: Advantest Corporation
• Original Assignee: Advantest Corporation
• Inventors: Shimada, Kenichi, Yamashita, Tsuyoshi, Kobayashi, Yoshihito, Nakamura, Hiroto, Igarashi, Noriyuki, Kiyokawa, Toshiyuki
• Primary Examiner(s): Le, N.
• Assistant Examiner(s): LEROUX, ETIENNE PIERRE
• Application Number:
  US09/456,408
• Time in Patent Office: 1,000 Days
• Field of Search: 324/760, 324/755, 324/758
• US Class Current: 324/750.08
• CPC Class Codes: G01R 31/2806 Apparatus therefor, e.g. test stations, drivers, analysers, conveyors G01R31/2805, G01R31/281, G01R31/2818 take precedence
• CPC Class Codes: G01R 31/2856 Internal circuit aspects, e.g. built-in test features; Test chips; Measuring material aspects, e.g. electro migration [EM]
• CPC Class Codes: G01R 31/2863 Contacting devices, e.g. sockets, burn-in boards or mounting fixtures in general G01R1/04
• CPC Class Codes: G01R 31/2874 related to temperature

Abstract

An electric device testing apparatus comprises a connection terminal to which an IC chip to be tested is removably connected, a pusher for pushing the IC chip in the direction of the connection terminal in order to connect the IC chip to the connection terminal, and temperature adjusted air supply for blowing a temperature adjusted air to around the IC chip during a test on the IC chip via a through hole formed on the pushed.

Claims

1. An electric device testing apparatus comprising:

a test tray on which electric devices to be tested are held and which is carried in the electric device testing apparatus;

a connection terminal to which the electric device to be tested is removably connected in a state of being held on said test tray;

a pusher for pushing the electric device in the state of being held on the test tray against said connection terminal in order to connect the electric device to said connection terminal, the pusher having a ventilation hole; and

means for adjusting a temperature of the electric device which generates heat by itself during a test on the electric device via the hole formed on said pusher, the temperature adjusting means includes temperature adjusted gas supply means for blowing a temperature adjusted gas directly to the electric device under test in the state of being held on the test tray via the ventilation hole.

3. The electric device testing apparatus as set forth in any one of claims 1 or 2, wherein said pusher is provided with a temperature sensor capable of detecting a temperature of at least one of the electric device and an atmosphere temperature around the electric device.

4. The electric device testing apparatus as set forth in any one of claims 1 or 2, comprising:

an adaptor to which said pusher is fixed;

a match plate for elastically holding said adaptor; and

a drive plate having a pushing portion for detachably contacting the upper surface of said adaptor and for moving said pusher in the direction of said connection terminal;

and wherein;

said match plate is arranged on said connection terminal changeably in accordance with a kind of the electric device;

said drive plate is arranged movably upward and downward at the upper portion of said match plate; and

a first hole formed on said pusher is configured to be connected to a second hole formed on said adaptor, and the second hole formed on said adaptor is configured to be able to connect to a third hole formed on a pushing portion of said drive plate.

5. The electric device testing apparatus as set forth in claim 4, wherein a sealing member for sealing a connection portion of the holes to each other is provided to a contact portion of the pushing portion of said drive plate and said adaptor.

6. The electric device testing apparatus as set forth in claim 1, wherein said temperature adjusted gas supply means includes temperature ventilation amount control means for controlling at least one of the temperature of the temperature adjusted gas and the ventilation amount to be supplied around the electric device based on temperature data from said temperature sensor.

7. The electric device testing apparatus as set forth in claim 1 or 6, wherein said temperature adjusted gas supply means includes dry means for previously drying the temperature adjusted gas to be supplied around the electric device.

8. The electric device testing apparatus as set forth in claim 1 or 6, further comprising a sealed chamber for covering said connection terminal, said pusher and the electric device as one.

9. The electric device testing apparatus as set forth in claim 8, wherein the temperature adjusted gas to be supplied around the electric device from said temperature adjusted gas supply means is an air taken out from a part of the air inside said chamber and being temperature adjusted.

2. An electric device testing apparatus comprising:

a test tray on which electric devices to be tested are held and which is carried in the electric device testing apparatus;

a connection terminal to which the electric device to be tested is removably connected in a state of being held on said test tray;

a pusher for pushing the electric device in the state of being held on the test tray against said connection terminal in order to connect the electric device to said connection terminal, the pusher having a drawing hole; and

means for adjusting a temperature of the electric device which generates heat by itself during a test on the electric device via the hold formed on said pusher, and said temperature adjusting means includes air drawing means for drawing an air around the electric device during the test on the electric device which is held on the test tray via the drawing hole.

10. The electric device testing apparatus as set forth in claim 2, wherein said drawing means includes drawing amount control means for controlling the drawing amount of air around said electric device during the test on the electric device based on the temperature data from said temperature sensor.

11. The electric device testing apparatus as set forth in claim 2 or 10, further comprising a chamber for maintaining the atmosphere temperature constant around said connection terminal to which the electric device is removably connected.

12. An electric device testing apparatus for performing a test by pushing a terminal of an electric device to be tested against a connection terminal of a heat head, comprising:

a test tray on which the electric devices to be tested are held and which is carried in the electric device testing apparatus;

a suction head for picking up the electric device being held on the test tray by sucking the electric device and pushing the terminal of the electric device to be tested against the connection terminal of a test head in the state of sucking the electric device;

suction force giving means for giving a suction force to said suction head; and

suction force crushing means for releasing;

the suction force of said suction head, the suction force crushing means blows fluid for releasing the suction force of said suction head directly to the electric device pushed against said suction head for any period of time during the test on the electric device in order to adjust a temperature of the electric device which generates heat by itself during a test.

13. The electric device testing apparatus as set forth in claim 12, further comprising a chamber for maintaining the atmosphere temperature constant around said connection terminal.

14. The electric device testing apparatus as set forth in claim 12, wherein a suction surface of said suction head is formed a groove in which the fluid can pass through.

15. The electric device testing apparatus as set forth in claim 12, wherein blowing of the fluid on the electric device is performed by sending an instruction signal from control means to said suction force crush means.

16. The electric device testing apparatus as set forth in claim 12, further comprising a temperature control unit for controlling the fluid to be blown on the electric device to be a predetermined temperature.

17. The electric device testing apparatus as set forth in claim 12, wherein said suction force giving means includes a fluid supply source, an ejector connected to said suction head, an ejector valve comprised by said fluid supply source, said ejector and said suction head.

18. The electric device testing apparatus as set forth in claim 12, wherein said suction force crush means includes a fluid supply source and a crush valve connected to said fluid supply source and said suction head.

19. The electric device testing apparatus as set forth in claim 12, wherein the fluid supply source of said suction force giving means and the fluid supply means of said suction force crush means are identical fluid supply means.

20. The electric device testing apparatus as set forth in claim 12, wherein the fluid to be blown on the electric device is commonly used as fluid applied to said suction force giving means.

21. An electric device sucking apparatus for sucking and releasing an electric device, comprising:

a suction head for sucking up and releasing the electric device;

suction force giving means for giving a suction force to said suction head; and

suction force crush means for releasing the suction force of said suction head, the suction force crush means blows fluid on directly on the electric device for releasing the suction force of said suction head in order to adjust a temperature of the electric device which generates heat by itself when the electric device is held at a fixed position.

22. The electric device sucking apparatus as set forth in claim 21, wherein the suction surface of said suction head is formed a groove in which the fluid can pass through.