Micromachined optical switching devices
First Claim
1. An optomechanical matrix switch, comprising:
- a substrate;
a MEMS optomechanical switching cell, comprising;
an electrode coupled to said substrate, said electrode capable of receiving an electrical signal;
an actuator, movably coupled to said substrate via a hinge, said electrode and said actuator capable of generating an electrically induced force therebetween, wherein said actuator is capable of moving in response to a change in said electrically induced force; and
a reflective element mounted to said actuator, a reflective surface of said reflective element displacing substantially in a single plane in response to movement of said actuator;
a first plurality of said MEMS optomechanical switching cells coupled to said substrate, each of said first plurality of optomechanical switching cells in optical alignment with a first input port; and
a second plurality of said MEMS optomechanical switching cells coupled to said substrate, each of said second plurality of optomechanical switching cells in optical alignment with a second input port.
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Accused Products
Abstract
Various 3-port and 4-port micromachined optomechanical matrix switches are disclosed herein. In accordance with one aspect of the invention there is provided an optomechanical matrix switch including a substrate and a first plurality of optomechanical switching cells coupled thereto. Each of the first plurality of optomechanical switching cells is arranged to be in optical alignment with a first input port. A second plurality of optomechanical switching cells is also coupled to the substrate, each of the second plurality of optomechanical switching cells being in optical alignment with a second input port. In another aspect of the present invention an optomechanical matrix switch is provided which includes a substrate and a first plurality of optomechanical switching cells coupled thereto. Each of the first plurality of optomechanical switching cells is placed in optical alignment with one of a corresponding first plurality of input ports and with one of a corresponding first plurality of output ports. The matrix switch further includes a second plurality of optomechanical switching cells coupled to the substrate. Each of the second plurality of optomechanical switching cells is placed in optical alignment with one of a corresponding second plurality input ports and with one of a corresponding second plurality of output ports.
112 Citations
18 Claims
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1. An optomechanical matrix switch, comprising:
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a substrate;
a MEMS optomechanical switching cell, comprising;
an electrode coupled to said substrate, said electrode capable of receiving an electrical signal;
an actuator, movably coupled to said substrate via a hinge, said electrode and said actuator capable of generating an electrically induced force therebetween, wherein said actuator is capable of moving in response to a change in said electrically induced force; and
a reflective element mounted to said actuator, a reflective surface of said reflective element displacing substantially in a single plane in response to movement of said actuator;
a first plurality of said MEMS optomechanical switching cells coupled to said substrate, each of said first plurality of optomechanical switching cells in optical alignment with a first input port; and
a second plurality of said MEMS optomechanical switching cells coupled to said substrate, each of said second plurality of optomechanical switching cells in optical alignment with a second input port.
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2. An optomechanical matrix switch, comprising:
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a substrate;
a MEMS optomechanical switching cell, comprising;
an electrode coupled to said substrate, said electrode capable of receiving an electrical signal;
an actuator, movably coupled to said substrate via a hinge, said electrode and said actuator capable of generating an electrically induced force therebetween, wherein said actuator is capable of moving in response to a change in said electrically induced force; and
a reflective element mounted to said actuator, a reflective surface of said reflective element displacing substantially in a single plane in response to movement of said actuator;
a first plurality of said MEMS optomechaincal switching cells coupled to said substrate, said first plurality of optomechanical switching cells in optical alignment with a corresponding plurality of first input ports and with a first output port; and
a second plurality of said MEMS optomechanical switching cells coupled to said substrate, said second plurality of optomechanical switching cells in optical alignment with a corresponding plurality of second output ports.
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3. An optomechanical matrix switch, comprising:
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a substrate;
a MEMS optomechanical switching cell, comprising;
an electrode coupled to said substrate, said electrode capable of receiving an electrical signal;
an actuator, movably coupled to said substrate via a hinge, said electrode and said actuator capable of generating an electrically induced force therebetween, wherein said actuator is capable of moving in response to a change in said electrically induced force; and
a reflective element mounted to said actuator, a reflective surface of said reflective element displacing substantially in a single plane in response to movement of said actuator;
a first plurality of said MEMS optomechanical switching cells coupled to said substrate, each of said first plurality of optomechanical switching cells in optical alignment with a first input port;
a second plurality of said MEMS optomechanical switching cells coupled to said substrate, each of said second plurality of optomechaincal switching cells in optical alignment with a second input port;
a third plurality of said MEMS optomechanical switching cells coupled to said substrate, each of said third plurality of optomechanical switching cells in optical alignment with a third input port; and
a fourth plurality of said MEMS optomechanical switching cells coupled to said substrate, each of said fourth plurality of optomechaincal switching cells in optical alignment with a fourth input port. - View Dependent Claims (4)
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5. An optomechanical matrix switch, comprising:
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a substrate;
a MEMS optomechanical switching cell, comprising;
an electrode coupled to said substrate, said electrode capable of receiving an electrical signal;
an actuator, movably coupled to said substrate via a hinge, said electrode and said actuator capable of generating an electrically induced force therebetween, wherein said actuator is capable of moving in response to a change in said electrically induced force; and
a reflective element mounted to said actuator, a reflective surface of said reflective element displacing substantially in a single plane in response to movement of said actuator;
a first plurality of said MEMS optomechanical switching cells coupled to said substrate, said first plurality of optomechanical switching cells in optical alignment with a corresponding plurality of first input ports and with a first output port;
a second plurality of said MEMS optomechanical switching cells coupled to said substrate, said second plurality of optomechanical switching cells in optical alignment with a corresponding plurality of second output ports;
a third plurality of said MEMS optomechanical switching cells coupled to said substrate, said third plurality of optomechanical switching cells in optical alignment with a corresponding plurality of third input ports and with a third output ports; and
a fourth plurality of said HEMS optomechanical switching cells coupled to said substrate, said fourth plurality of optomechanical switching cells in optical alignment with a corresponding plurality of fourth output ports.
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6. An optomechanical matrix switch, comprising:
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a substrate;
a MEMS optomechanical switching cell, comprising;
an electrode coupled to said substrate, said electrode capable of receiving an electrical signal;
an actuator, movably coupled to said substrate via a hinge, said electrode and said actuator capable of generating an electrically induced force therebetween, wherein said actuator is capable of moving in response to a change in said electrically induced force; and
a reflective element mounted to said actuator, a reflective surface of said reflective element displacing substantially in a single plane in response to movement of said actuator;
a first plurality of said MEMS optomechaincal switching cells coupled to said substrate, each of said first plurality of optomechanical switching cells in optical alignment with one of a corresponding first plurality of input ports and with one of a corresponding first plurality of output ports; and
a second plurality of said MEMS optomechanical switching cells coupled to said substrate, each of said second plurality of optomechanical switching cells in optical alignment with one of a corresponding second plurality of input ports and with one of a corresponding second plurality of output ports. - View Dependent Claims (7)
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8. An optomechanical matrix switch, comprising:
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a substrate;
a MEMS optomechanical switching cell, comprising;
an electrode coupled to said substrate, said electrode capable of receiving an electrical signal;
an actuator, movably coupled to said substrate via a hinge, said electrode and said actuator capable of generating an electrically induced force therebetween, wherein said actuator is capable of moving in response to a change in said electrically induced force; and
a reflective element mounted to said actuator, a reflective surface of said reflective element displacing substantially in a single plane in response to movement of said actuator;
a first plurality of said MEMS optomechaincal switching cells coupled to said substrate, each of said first plurality of optomechanical switching cells in optical alignment with one of a corresponding first plurality of input ports arranged along a first border of said matrix switch and with one of a corresponding first plurality of output ports arranged along a second border of said matrix switch; and
a second plurality of said MEMS optomechanical switching cells coupled to said substrate, each of said second plurality of optomechanical switching cells in optical alignment with one of a corresponding second plurality of input ports arranged along a third border of said matrix switch and with one of a corresponding second plurality of output ports arranged along a fourth border of said matrix switch.
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9. An optomechanical matrix switch, comprising:
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a substrate;
a MEMS optomechanical switching cell, comprising;
an electrode coupled to said substrate, said electrode capable of receiving an electrical signal;
an actuator, movably coupled to said substrate via hinge, said electrode and said actuator capable of generating an electrically induced force therebetween, wherein said actuator is capable of moving in response to a change in said electrically induced force; and
a reflective element mounted to said actuator, a reflective surface of said reflective element displacing substantially in a single plane in response to movement of said actuator;
a first plurality of said MEMS optomechanical switching cells coupled to said substrate, each of said first plurality of optomechanical switching cells in optical alignment with one of a corresponding first plurality of input ports and with one of a corresponding first plurality of output ports;
a second plurality of said MEMS optomechanical switching cells coupled to said substrate, each of said second plurality of optomechanical switching cells in optical alignment with one of a corresponding second plurality of input ports and with one of a corresponding second plurality of output ports;
a third plurality of said MEMS optomechanical switching cells coupled to said substrate, each of said third plurality of optomechanical switching cells in optical alignment with one of a corresponding third plurality of input ports and with one of a corresponding third plurality of output ports; and
a fourth plurality of said MEMS optomechanical switching cells coupled to said substrate, each of said fourth plurality of optomechanical switching cells in optical alignment with one of a corresponding fourth plurality of input ports and with one of a corresponding fourth plurality of output ports.
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10. An optomechanical matrix switch, comprising:
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a substrate;
a MEMS optomechanical switching cell, comprising;
an electrode coupled to said substrate, said electrode capable of receiving an electrical signal;
an actuator, movably coupled to said substrate via a hinge, said electrode and said actuator capable of generating an electrically induced force therebetween, wherein said actuator is capable of moving in response to a change in said electrically induced force; and
a reflective element mounted to said actuator, a reflective surface of said reflective element displacing substantially in a single plane in response to movement of said actuator;
a plurality of said MEMS optomechanical switching cells coupled to said substrate, each of said plurality of optomechanical switching cells in optical alignment with one of a corresponding plurality of input ports, one of a corresponding plurality of first output ports, and one of a corresponding plurality of second output ports. - View Dependent Claims (11, 12, 13)
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14. An optomechanical matrix switch, comprising:
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a substrate;
a MEMS optomechanical switching cell, comprising;
an electrode coupled to said substrate, said electrode capable of receiving an electrical signal;
an actuator, movably coupled to said substrate via a hinge, said electrode and said actuator capable of generating an electrically induced force therebetween, wherein said actuator is capable of moving in response to a change in said electrically induced force; and
a reflective element mounted to said actuator, a reflective surface of said reflective element displacing substantially in a single plane in response to movement of said actuator;
a first plurality of said MEMS optomechanical switching cells;
a second plurality of said MEMS optomechanical switching cells;
an add port in optical alignment with said first plurality of MEMS optomechanical switching cells;
a drop port in optical alignment with said second plurality of MEMS optomechanical switching cells;
a plurality of output ports, wherein each one of said plurality of output ports is in optical alignment with a respective one MEMS optomechanical switching cell of said first plurality of MEMS optomechanical switching cells; and
a plurality of input ports, wherein each one of said plurality of input ports is in optical alignment with a respective one MEMS optomechanical switching cell of said second plurality of MEMS optomechanical switching cells, and wherein each one of said plurality of input ports is in optical alignment with a respective one of said plurality of output ports. - View Dependent Claims (15, 16, 17)
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18. An optomechanical matrix switch, comprising:
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a substrate;
a MEMS optomechanical switching cell, comprising;
an electrode coupled to said substrate, said electrode capable of receiving an electrical signal;
an actuator, pivotably coupled to said substrate via a hinge, said electrode and said actuator capable of generating an electrostatic force therebetween, wherein said actuator is capable of moving in response to a change in said electrostatic force; and
a reflective element mounted to said actuator, a reflective surface of said reflective element displacing substantially in a single plane in response to movement of said actuator;
a first plurality of said MEMS optomechanical switching cells;
a second plurality of said MEMS optomechanical switching cells;
an add port in optical alignment with said first plurality of MEMS optomechanical switching cells;
a drop port in optical alignment with said second plurality of MEMS optomechanical switching cells;
a plurality of output ports, wherein each one of said plurality of output ports is in optical alignment with a respective one MEMS optomechanical switching cell of said first plurality of MEMS optomechanical switching cells; and
a plurality of input ports, wherein each one of said plurality of input ports is in optical alignment with a respective one MEMS optomechanical switching cell of said second plurality of MEMS optomechanical switching cells, and wherein each one of said plurality of input ports is in optical alignment with a respective one of said plurality of output ports.
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Specification