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Optomechanical matrix switches including collimator arrays

  • US 6,445,841 B1
  • Filed: 01/13/2000
  • Issued: 09/03/2002
  • Est. Priority Date: 05/28/1999
  • Status: Expired due to Fees
First Claim
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1. An optomechanical matrix switch, comprising:

  • a substrate;

    a MEMS optomechanical switching cell, comprising;

    an electrode coupled to said substrate, said electrode capable of receiving an electrical signal;

    an actuator, movably coupled to said substrate via a hinge, said electrode and said actuator capable of generating an electrically induced force therebetween, wherein said actuator is capable of moving in response to a change in said electrically induced force; and

    a reflective element mounted to said actuator, a reflective surface of said reflective element displacing substantially in a single plane in response to movement of said actuator;

    a plurality of said MEMS optomechanical switching cells; and

    a first array of collimator elements, each of said collimator elements in optical alignment with a respective one of said plurality of said MEMS optomechanical switching cells.

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