Method and system for tracking manufacturing data for integrated circuit parts

• US 6,446,017 B1
• Filed: 08/21/1997
• Issued: 09/03/2002
• Est. Priority Date: 08/21/1997
• Status: Expired due to Term

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Skidmore, Beth
• Primary Examiner(s): WACHSMAN, HAL D
• Application Number:
  US08/915,885
• Time in Patent Office: 1,839 Days
• Field of Search: 702/81-84, 702/33-36, 702/40, 702/108, 702/113-115, 702/117-123, 702/179-180, 702/182-185, 702/187, 702/FOR.155, 702/FOR-135, 702/FOR.139, 702/FOR.170, 702/FOR.171, 702/FOR.123, 702/FOR.124, 702/FOR.125, 324/764-769, 324/550, 324/537, 438/10-12, 438/14-18, 257/529, 257/65, 235/385, 235/462.01, 250/566, 250/568, 700/109, 700/110, 700/115, 700/116, 700/119-121, 209/571-573, 209/583, 365/201, 365/225.7
• US Class Current: 702/81
• CPC Class Codes: G06Q 10/06 Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling

Abstract

An apparatus and method for tracking data for individual integrated circuits through the manufacturing process is described by programming an individual part identifier into a non-volatile portion of the integrated circuit and maintaining a database of all manufacturing step statistics for later review and analysis. The part identifier allows individual integrated circuits to be moved through the manufacturing process without the need to physically track original fabrication lots. The database of information is used to improve the manufacturing process by identifying failure trends based upon process variations.

Claims

1. A method for tracking fabrication information for the manufacture of memory devices, comprising:

manufacturing a plurality of wafers, each containing a plurality of memory devices, by performing a plurality of processing steps and storing process data associated with each processing step;

assigning a lot number for the plurality of wafers;

assigning a part identifier to each of the plurality of memory devices;

programming the part identified into a non-volatile section of each of the plurality of memory devices;

associating the lot number with the part identifier for each of the plurality of memory devices;

reading the part identifier for each of the plurality of memory devices;

testing each of the plurality of memory devices to produce test results;

recording the test results for each of the plurality of memory devices;

saving the process data and the test results to a memory in a computer;

associating the process data and the test results with the part identifier and the lot number for each of the plurality of memory devices in a database to associate error information with at least one of the process data and the test results; and

sorting the associated process data;

the test results and the part identifier to construct data summaries of manufacturing processes.

2. The method according to claim 1 further including sorting the database to construct data summaries of ones of the plurality of memory devices that all began manufacturing together or that have at least one characteristic in common.

3. The method according to claim 2 further including sorting the database to construct trends in failures of parts of a particular lot.

4. The method according to claim 2 further including sorting the database to construct types of failures in processing step based on process variations.

5. A method for tracking fabrication information for the manufacture of IC parts, comprising:

manufacturing a plurality of wafers, each containing a plurality of IC parts, by performing a plurality of processing steps and storing process data associated with each processing step;

assigning a lot number for the plurality of wafers;

assigning a part identifier to each of the plurality of IC parts;

programming the part identifier into a non-volatile section of each of the plurality of IC parts;

associating the lot number with the part identifier for each of the plurality of IC parts;

reading the part identifier for each of the plurality of IC parts;

testing each of the plurality of IC parts to produce test results;

recording the test results for each of the plurality of IC parts;

saving the process data and the test results to a memory;

associating the process data and the test results with the part identifier and the lot number for each of the plurality of IC parts in a database to associate error information with at least one of the process data and the test results; and

sorting the associated process data, the test results and the part identifier to construct data summaries of manufacturing processes.

6. The method according to claim 5, further including sorting the database to construct data summaries of ones of the plurality of IC parts that all began manufacturing together or that have at least one characteristic in common.

7. The method according to claim 6, further including sorting the database to construct trends in failures of parts of a particular lot.

8. The method according to claim 6, further including sorting the database to construct types of failures in processing of wafers based on process variations.

9. The method of claim 5, wherein manufacturing a plurality of wafers includes manufacturing a plurality of memory devices on the wafers.

10. The method of claim 9, wherein manufacturing a plurality of memory devices includes manufacturing a DRAM.

11. The method of claim 9, wherein manufacturing a plurality of memory devices includes manufacturing a SRAM.

12. A method for tracking fabrication information for the manufacture of IC parts, comprising:

manufacturing a plurality of IC parts on a wafers by performing a plurality of processing steps and storing process data associated with each processing step;

assigning a part identifier to each of the plurality of IC parts;

assigning a lot number to the wafer;

programming the part identifier into a non-volatile section of each of the plurality of IC parts;

associating the lot number with the part identifier for each of the plurality of IC parts;

reading the part identifier for each of the plurality of IC parts;

testing each of the plurality of IC parts to produce test results;

recording the test results for each of the plurality of IC parts;

saving the process data and the test results to a memory;

associating the process data and the test results with the part identifier and the lot number for each of the plurality of IC parts in a database to associate error information with at least one of the process data and the test results; and

sorting the associated process data, the test results and the part identifier to construct data summaries of manufacturing processes.

13. The method according to claim 12, further including sorting the database to construct data summaries of ones of the plurality of IC parts that all began manufacturing together or that have at least one characteristic in common.

14. The method according to claim 13, further including sorting the database to construct trends in failures of parts of a particular lot.

15. The method according to claim 13, further including sorting the database to construct types of failures in processing of wafers based on process variations.

16. The method of claim 12, wherein manufacturing a plurality of IC parts includes manufacturing a plurality of memory devices.

17. The method of claim 16, wherein manufacturing a plurality of memory devices includes manufacturing a DRAM.

18. The method of claim 16, wherein manufacturing a plurality of memory devices includes manufacturing a SRAM.

19. A method for tracking fabrication information for the manufacture of memory devices, comprising:

providing a plurality of wafers;

dividing the plurality of wafers into lots;

assigning a lot number to each lot;

proforming a plurality of processing steps on each lot of wafers to form a plurality of memory devices on each wafer;

storing process data associated with at least one of the plurality of processing steps;

assigning a part identifier to each of the plurality of memory devices;

programming the part identifier into a non-volatile section of each of the plurality of memory devices;

associating the lot number with the part identifier for each of the plurality of memory devices;

reading the part identifier for each of the plurality of memory devices;

testing each of the plurality of memory devices to produce test results;

recording the test results for each of the plurality of memory devices;

saving the process data and the test results to a memory in a computer;

associating the process data and the test results with the part identifier and the lot number for each of the plurality of memory devices in a database to associate error information with at least one of the process data and the test results; and

sorting the associated process data, the test results and the part identifier to construct data summaries of manufacturing processes.

20. The method according to claim 19, further including sorting the database to construct data summaries of ones of the plurality of memory devices that all began manufacturing together or that have at least one characteristic in common.

21. The method according to claim 20, further including sorting the database to construct trends in failures of parts of a particular lot.

22. The method according to claim 21, further including sorting the database to construct types of failures in processing of wafers based on process variations.

23. The method of claim 19, wherein performing a plurality of processing devices includes forming DRAMs.

24. The method of claim 19, wherein performing a plurality of processing devices includes forming SRAMs.