Method and apparatus to display processing parameter

• US 6,446,021 B1
• Filed: 02/27/1998
• Issued: 09/03/2002
• Est. Priority Date: 02/27/1998
• Status: Expired due to Term

• Current Assignee: Round Rock Research LLC
• Original Assignee: Micron Technology, Inc.
• Inventors: Schaeffer, Ralph H.
• Primary Examiner(s): Assouad, Patrick
• Application Number:
  US09/032,621
• Time in Patent Office: 1,649 Days
• Field of Search: 702/118, 702/123, 702/81, 702/84, 700/121, 324/500, 324/765
• US Class Current: 702/118
• CPC Class Codes: H01L 22/20 Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps

Abstract

A system and method that provides various forms of graphic representations of test results of manufacturing process runs which can readily be shared with multiple users of the system is disclosed. A method for reporting a test process of a plurality of cells, wherein the test process is performed in a series of runs is disclosed. The method includes four steps. First, data regarding the test process for the plurality of cells is gathered. The data is accumulated over the series of runs. Next, the data is characterized to create a set of selected information. The set of selected information includes a subset of the data regarding the test process for the plurality of cells. The method also includes the steps of generating a user-consumable output of the set of selected information, and providing access to the data, the set of selected information, and the user-consumable output. The step of generating a user consumable output includes generating a map or generating a graph.

Claims

1. A method reporting the results of a test process of a plurality cells arranged on wafers, the method comprising:

probing the cells and gathering data;

storing the data on a computer system in at least one of a path corresponding to at least one particular wafer and a path corresponding to a sub set of a series of runs;

arranging stored data relative to each cell for display in a location on a map corresponding to the wafer location of that cell; and

aggregating the stored data for a plurality of wafers for display on the map showing the aggregate cell usage for various cell positions.

8. The method of claim 1 where the data is collected during a testing phase following cell fabrication.

9. The method of claim 1 where the aggregating operation includes stored data from each run of a series of manufacturing process runs.

2. A computer-executable medium having a plurality of modules stored thereon capable of causing an information handling system to operate in a particular manner, the plurality of modules comprising:

a data gathering module for gathering probe data regarding at least one test process of cells arranged on multiple wafers;

a characterization module for creating a selected set of information including a subset of the data relating to the usage of cells at specific wafer locations;

an output module for generating a graphical output representative of the selected set of information, the graphical output comprising a map showing the cell usage value ranges relating to each of the cells on a map showing the wafer location of the cells.

6. The computer executable medium of claim 2 wherein the modules are executable on a computer network.

10. The method of claim 2 wherein the map compares a number of wafers manufactured during a first period of time with a number of wafers manufactured during a second period of time.

11. The method of claim 2, wherein the data regarding the at least one test process of cells is separated into groups representing ranges of cell usage values.

3. An information handling system, comprising:

a probe suitable for use with a test process on a plurality of cells, each of which is arranged on one of a plurality of wafers;

a central processing unit having a memory, the central processing unit operatively coupled to receive signals from the probe indicative of the results of the test process; and

a plurality of modules operatively coupled to the central processing unit for operating on the signals, the modules comprising;

a data gathering module for gathering data regarding at least one test process of the plurality of cells;

a characterization module for creating a selected set of information including a subset of the data;

an output module for generating a graphical display output of the selected set of information; and

a distribution module for providing access to the data, selected set of information, and the graphical display output.

4. The information handling system of claim 3 wherein the graphical display output is a map of the placement of the cells on the wafer which shows, for each cell position selected information concerning the test results for cells at that wafer location.

5. The information handling system of claim 3 wherein the graphical display output is a graph showing the incidences of a given repair solution over addresses on a wafer.

7. The information handling system of claim 3 wherein the central processing unit is connected to a network and is accessible from a number of stations connected to the network.

12. A method reporting the results of a test process performed on a plurality of cells arranged on wafers over a series of manufacturing process runs, the method comprising:

probing each of the cells and gathering data regarding the performance of that cell;

storing the performance data on a computer system in at least one of a path corresponding to at least one particular wafer and a path corresponding to a series of manufacturing runs;

arranging stored data relative to each cell for graphical display on a map at a location corresponding to the wafer location of that cell; and

aggregating the stored data for a plurality of wafers for graphical display on the map thereby showing aggregate cell usage for each cell position for a series of manufacturing runs.

13. The method of claim 12 where the data is collected during a testing phase following cell fabrication.

14. The method of claim 12 where the aggregating operation includes stored data from each run of a series of manufacturing process runs.

15. A computer-executable medium having a plurality of modules stored thereon capable of causing an information handling system to operate in a particular manner, the plurality of modules comprising:

a data gathering module for gathering probe data regarding at least one test process performed on a plurality of cells arranged on multiple wafers;

a characterization module for creating a selected set of information including a subset of the data relating to the usage of cells at specific wafer locations;

an output module for generating a graphical output representative of the selected set of information, the graphical output comprising a plot showing the cell usage value ranges relating to each of the plurality of cells on a plot showing the wafer location of the cells.

16. The method of claim 15, wherein the plot compares a number of wafers manufactured during a first period of time with a number of wafers manufactured during a second period of time.

17. The method of claim 15, wherein the data regarding the at least one test process of cells is separated into groups representing ranges of cell usage values.

18. An information handling system, comprising:

a probe suitable for use with a test process on a plurality of cells, each of which is arranged on one of a plurality of wafers;

a central processing unit having a memory, the central processing unit operatively coupled to receive signals from the probe indicative of the results of each of the test processes; and

a plurality of modules operatively coupled to the central processing unit for operating on the signals, the modules comprising;

a data gathering module for gathering data regarding at least one test process of the plurality of cells;

a characterization module for creating a selected set of information including a subset of the data;

an output module for generating a graphical display output of the selected set of information; and

a distribution module for providing access to the data, the selected set of information, and the graphical display output.

19. The information handling system of claim 18 wherein the graphical display output is a map of the placement of the cells on the wafer which shows, for each cell position selected information concerning the test results for cells at that wafer location for the plurality of wafers.

20. The information handling system of claim 18 wherein the graphical display output is a graph showing the incidences of a given repair solution over addresses on a wafer.

21. The computer executable medium of claim 18 wherein the modules are executable on a computer network.

22. The information handling system of claim 18 wherein the central processing unit is connected to a network and is accessible from a number of stations connected to the network.