Ink jet mechanism with thermoelastic bend actuator having conductive and resistive beams

• US 6,447,099 B2
• Filed: 03/02/2001
• Issued: 09/10/2002
• Est. Priority Date: 07/15/1997
• Status: Expired due to Fees

• Current Assignee: Zamtec Limited (Memjet Limited)
• Original Assignee: Silverbrook Research Pty Limited
• Inventors: Silverbrook, Kia
• Primary Examiner(s): Gordon, Raquel Yvette
• Application Number:
  US09/798,135
• Publication Number:
  US 20010008406A1
• Time in Patent Office: 557 Days
• Field of Search: 347/54, 347/151, 347/120, 347/141, 347/154, 347/103, 347/123, 347/111, 347/159, 347/127, 347/128, 347/131, 347/125, 347/158, 399/271, 399/290, 399/292, 399/293, 399/294, 399/295
• US Class Current: 347/54
• CPC Class Codes: B41J 2/14427 Structure of ink jet print heads with thermal bend detached actuators
• CPC Class Codes: B41J 2/1628 dry etching
• CPC Class Codes: B41J 2/1629 wet etching
• CPC Class Codes: B41J 2/1631 photolithography
• CPC Class Codes: B41J 2/1632 machining
• CPC Class Codes: B41J 2/1635 dividing the wafer into individual chips
• CPC Class Codes: B41J 2/1639 sacrificial molding
• CPC Class Codes: B41J 2/1642 thin film formation by CVD [chemical vapor deposition]
• CPC Class Codes: B41J 2/1645 thin film formation by spincoating
• CPC Class Codes: B41J 2/1646 thin film formation by sputtering
• CPC Class Codes: B41J 2/1648 Production of print heads with thermal bend detached actuators
• CPC Class Codes: B41J 2002/14435 Moving nozzle made of thermal bend detached actuator

Abstract

An ink jet printer uses a planar thermoelastic bend actuator to eject ink from a nozzle chamber. The thermal actuator includes a lower planar surface constructed from a highly conductive material such as a semiconductor metal layer interconnected to an upper planar surface constructed from an electrically resistive material such as Indium Tin Oxide (ITO), such that, upon passing a current between the planar surfaces, the thermal actuator is caused to bend towards an ink ejection port so as to thereby cause ejection of ink from the ink ejection port. The actuator is attached to a substrate and further includes a stiff paddle portion which increases the degree of bending of the actuator near the point where it is attached to the substrate. The surfaces are further coated with a passivation material as required.

Claims

1. An ink jet nozzle assembly including a nozzle chamber having a nozzle, the chamber including a movable portion configured for movement to effect ejection of ink from the chamber via said nozzle, the assembly further including an actuator attached to or formed integrally with the movable portion, the actuator having an electrically conductive portion and an electrically resistive portion such that upon passing a current through both said portions, said actuator is caused to deform elastically to effect said movement of said movable portion.

2. An assembly according to claim 1 wherein said electrically conductive portion and said electrically resistive portion are respective surfaces of a thermal actuator arm.

3. An assembly according to claim 1 wherein the movable portion includes the nozzle and wherein the nozzle chamber includes a fixed portion mounted on a substrate.

4. An ink jet nozzle assembly including:

a nozzle chamber having an inlet in fluid communication with an ink reservoir and a nozzle through which ink from the chamber can be ejected;

a chamber including a fixed portion and a movable portion, relative movement between the fixed portion and the movable portion in an ejection phase reducing an effective volume of the chamber, and alternate movement in a refill phase enlarging the effective volume of the chamber; and

a thermal actuator to eject ink from said nozzle chamber via said nozzle, said thermal actuator comprising a lower planar surface constructed from a highly electrically conductive material interconnected to an upper planar surface constructed from an electrically resistive material such that upon passing a current between said planar surfaces, said thermal actuator is caused to bend so as to effect movement of said movable portion and cause ink to be ejected through said nozzle.

5. An assembly according to claim 4 wherein the movable portion includes the nozzle and the fixed portion is mounted on a substrate.

6. An assembly according to claim 4 wherein the fixed portion includes the nozzle mounted on a substrate.

7. An assembly according to claim 4 wherein said actuator is attached to a substrate and further includes a stiff paddle portion which increases bending of said actuator near a point where it is attached to the substrate.

8. An assembly as claimed in claim 7 wherein said stiff paddle is formed of silicon nitride.

9. An assembly as claimed in claim 4 wherein said actuator further includes an expansion coating having a high coefficient of thermal expansion on top of said upper planar surface so as to increase bending of said actuator.

10. An assembly as claimed in claim 9 wherein said expansion coating comprises substantially polytetrafluoroethylene.

11. An assembly as claimed in claim 4 wherein between said upper planar surface and said lower planar surface there is provided a gap, formed upon etching away of a deposited sacrificial material.

12. An assembly as claimed in claim 11 wherein said upper planar surface includes a plurality of etchant holes provided so as to allow a more rapid etching of said sacrificial layer during construction.

13. An assembly as claimed in claim 4 wherein said upper planar surface comprises substantially Indium Tin Oxide (IFO).

14. An assembly as claimed in claim 4 wherein said lower planar surface comprises substantially metal.

15. An assembly as claimed in claim 4 wherein said upper and lower surfaces are further coated with a passivation material.

16. An assembly as claimed in claim 4 wherein said nozzle is formed on a silicon wafer using micro-electro mechanical systems construction techniques.