Voltage-current sensor with high matching directivity

• US 6,449,568 B1
• Filed: 02/27/1998
• Issued: 09/10/2002
• Est. Priority Date: 02/27/1998
• Status: Expired due to Term

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: ENI Technology, Inc. (MKS Instruments Incorporated)
• Inventors: Gerrish, Kevin S.
• Primary Examiner(s): WACHSMAN, HAL D
• Application Number:
  US09/031,879
• Time in Patent Office: 1,656 Days
• Field of Search: 702/60-62, 702/57, 702/64, 702/65, 702/72, 702/75, 702/85, 702/104, 702/106, 702/107, 702/116, 702/117, 702/124, 702/126, 702/189, 702/FOR.171, 702/FOR-103, 702/FOR.134, 702/FOR.135, 702/FOR-156, 702/FOR.170, 315/111.21, 315/111.31, 315/111.41, 315/111.51, 315/111.71, 324/95, 324/520, 324/619, 324/646, 324/464, 324/459, 324/522, 324/525, 324/765, 324/600, 324/601, 324/605, 324/645, 324/667, 324/690, 324/709, 324/73.1, 324/76.11, 324/76.12, 324/76.19, 324/76.22, 324/76.39, 324/76.52, 324/76.77, 700/286, 700/292-298, 333/17.3, 333/17.1, 333/32, 333/99.PL
• US Class Current: 702/60
• CPC Class Codes: H01J 37/32082 Radio frequency generated discharge H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge
• CPC Class Codes: H01J 37/3299 Feedback systems

Abstract

A technique for measuring the current, voltage and phase of a Radio Frequency (RF) power wave to an RF load, accounts for the finite length of the voltage and current pickups, and corrects for effects of standing wave components of voltage and current. Voltage and current are computed as complex functions of the voltage pickup signal and the current pickup signal, based on coefficients precalibrated for the predetermined radio frequency. Alternatively, a corrected current value can based on the corrected voltage value and complex load impedance. The correction coefficients can be obtained, for each of a plurality of calibrating radio frequencies within an RF range, from voltage and current pickup signals under conditions of (a) open circuit load, (b) short circuit load, (c) fixed known impedance load; and (d) one of voltage and current being applied at a precise input level to a known load from an RF calibration source.

Claims

1. A method of deriving current, voltage and phase information for current and voltage components of an RF power wave, at a selected operating frequency selected within a range of radio frequencies, for each of a plurality of calibrating radio frequencies within said range, comprising:

obtaining voltage and current pickup signals under a set of conditions of (a) open circuit load, (b) short circuit load, (c) fixed known impedance load, and (d) said voltage or current being applied at a precise input level to a known load from an RF calibration source for obtaining associated voltage and current signal values;

computing and storing correction coefficients based on the voltage and current signals obtained under said conditions (a) to (d); and

at said selected operating frequency, applying said stored correction coefficients to said voltage and current pickup signals to obtain one or more of a corrected voltage value, a corrected current value, and a corrected load impedance value.

2. The method of claim 1 wherein, for a selected operating frequency between successive calibrating radio frequencies for which said correction coefficients are stored, said step of applying stored correction coefficients includes interpolating between stored values for each said correction coefficient for the calibration frequencies above and below said selected operating frequency.

3. The method of claim 1 wherein said fixed known impedance load is a 50 ohm resistive load.

4. The method of claim 1, wherein said radio frequencies are in the range of about 0.2 megahertz to about a hundred megahertz.

5. A method of compensating for the finite length of a pickup device used for the measurement of radio frequency, (RF) voltage, current and phase, comprising:

reading signals from the pickup device wherein said signals represent voltage and current;

providing predetermined coefficients for a calibrated frequency;

computing a voltage magnitude as a complex function of said voltage and current signals from the pickup device and the predetermined coefficients;

computing a current magnitude as a complex function of said voltage and current signals from the pickup device and the predetermined coefficients; and

computing the phase between the voltage and the current as a complex function of said voltage and current signals from the pickup device and the predetermined coefficients.

6. A method of deriving current, voltage and impedance information for the current and voltage components of an RF power wave that is applied at a predetermined frequency to a Radio Frequency (RF) load, derived from a pickup device of finite length, said pickup device receiving voltage and current signals, comprising:

computing a corrected voltage magnitude as a complex function of the voltage and current signals and a set of predetermined coefficients for said frequency;

computing a complex impedance of said RF load at said frequency from said voltage and current signals; and

computing corrected current magnitude from said corrected voltage magnitude and said complex impedance.