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Apparatus and method for measuring a defect of a sample

  • US 6,450,035 B1
  • Filed: 10/20/2000
  • Issued: 09/17/2002
  • Est. Priority Date: 02/25/2000
  • Status: Expired due to Fees
First Claim
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1. An apparatus for measuring defects of a sample, the apparatus comprising:

  • an inspection jig comprising;

    an impact vibrator fort inducing vibrations in a sample;

    a sample mounting fixture for mounting the sample; and

    a sound collector mounted in the sample mounting fixture for collecting sound propagating in the sample and induced by impact of the impact vibrator, wherein the sample mounting fixture includes a movable jaw with a contact surface for resiliently clamping the sample between and in contact with the contact surface and the sound collector; and

    a sound detector for frequency analysis of the sound collected by the sound collector.

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