Grounded centering ring for inhibiting polymer build-up on the diaphragm of a manometer

• US 6,451,159 B1
• Filed: 09/20/2000
• Issued: 09/17/2002
• Est. Priority Date: 09/20/2000
• Status: Expired due to Term

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Schutz, Roger, Lombardi, Joe A.
• Primary Examiner(s): Mills, Gregory
• Assistant Examiner(s): ALEJANDRO MULERO, LUZ L
• Application Number:
  US09/666,688
• Time in Patent Office: 727 Days
• Field of Search: 118/723.R, 118/723.E, 118/723.ER, 118/723.I, 118/723.IR, 118/723.AN, 118/723.MW, 118/723.ME, 118/723.MA, 118/723.MR, 118/712, 118/715, 118/692, 156/345.29, 156/345.24, 156/345.26, 156/345.41, 156/345.47, 156/345.48, 204/298.03, 204/298.32
• US Class Current: 156/345.26
• CPC Class Codes: C23C 16/4401 Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
• CPC Class Codes: C23C 16/52 Controlling or regulating the coating process C23C16/45557, C23C16/279 take precedence
• CPC Class Codes: H01J 37/32431 Constructional details of the reactor

Abstract

A grid protects a manometer diaphragm from plasma. A plasma chamber is used to generate a plasma. A manometer is used to measure the pressure in the plasma chamber. A grounded electrically conductive grid is used to screen out ions in the plasma before they reach a diaphragm in the manometer. The grid may be formed in a centering ring. A pipe may be used to connect the manometer to the plasma chamber. The centering ring may be placed in the joint in the pipe, with the centering ring and grid being grounded to the pipe.

Claims

1. A plasma processing device with a manometer including a diaphragm, comprising:

plasma processing chamber;

a passageway, which provides a fluid connection between the plasma processing chamber and the diaphragm, wherein the passageway has a cross-section which crosses a direction of fluid flow; and

an electrically conductive grid across the cross-section of the passageway.

2. The plasma processing device, as recited in claim 1, wherein the electrically conductive grid is grounded.

3. The plasma processing device, as recited in claim 2, wherein the electrically conductive grill has a spacing between 1 and {fraction (1/64)} inch.

4. The plasma processing device, as recited in claim 3, wherein the passageway comprises a centering ring, wherein the electrically conductive grid spans across the centering ring.

5. The plasma processing device, as recited in claim 4, wherein the passageway further comprises a pipe.

6. The plasma processing device, as recited in claim 5, wherein the pipe has a joint in a first pipe end connected to a second pipe end.

7. The plasma processing device, as recited in claim 6, wherein the centering ring is placed between the first pipe end and the second pipe end.

8. The plasma processing device, as recited in claim 7, wherein the joint further comprises:

a first weld flange connected to the first pipe end; and

a second weld flange connected to the second pipe end, wherein the centering ring is placed between the first weld flange and the second weld flange.

9. The plasma processing device, as recited in claim 8, wherein the joint further comprises an O-ring surrounding the centering ring, wherein the O-ring is placed between the first weld flange and the second weld flange.

10. The plasma processing device, as recited in claim 9, wherein the joint further comprises a clamp, which clamps the first weld flange to the second weld flange.