Method for forming PLDD structure with minimized lateral dopant diffusion

• US 6,451,704 B1
• Filed: 05/07/2001
• Issued: 09/17/2002
• Est. Priority Date: 05/07/2001
• Status: Expired due to Term

• Current Assignee: Chartered Semiconductor Manufacturing Incorporated (GlobalFoundries, Inc.)
• Original Assignee: Chartered Semiconductor Manufacturing Incorporated (GlobalFoundries, Inc.)
• Inventors: Chivukula, Subrahmanyam, Ye, Jie, Mukhopdhyay, Madhudsudan, Pradeep, Yelehanka Ramachandramurthy
• Primary Examiner(s): Powell, William A.
• Application Number:
  US09/849,672
• Time in Patent Office: 498 Days
• Field of Search: 438/692, 438/712, 438/719, 438/723, 438/724, 438/740, 438/743, 438/744, 438/745, 438/197, 438/279, 438/283, 216/67, 216/79
• US Class Current: 438/719
• CPC Class Codes: H01L 21/823814 with a particular manufacturing method of the source or drain structures, e.g. specific source or drain implants or silicided source or drain structures or raised source or drain structures
• CPC Class Codes: H01L 29/6656 using multiple spacer layers, e.g. multiple sidewall spacers
• CPC Class Codes: H01L 29/6659 with both lightly doped source and drain extensions and source and drain self-aligned to the sides of the gate, e.g. lightly doped drain [LDD] MOSFET, double diffused drain [DDD] MOSFET

Abstract

A new method is provided for the creation of PLDD regions that is aimed at reducing lateral p-type impurity diffusion. The process starts with a silicon substrate on the surface of which gate electrodes have been created. An NLDD implantation is performed self-aligned with the NMOS gate electrode, a layer of oxide (oxide liner) is deposited over the structure over which a layer of nitride is deposited over which a first layer of top oxide is deposited. First gate spacers are formed by etching the first layer of top oxide, stopping on the nitride layer. NS/D and PS/D implantations are performed self-aligned with respectively the NMOS and the PMOS devices, the S/D implantations are annealed. The first gate oxide spacers are removed, a PLDD implantation is performed self-aligned with the PMOS gate electrode. A second layer of top oxide is deposited over the structure and etched to form the second gate spacers on the sidewalls of the NMOS and PMOS gate electrodes. After this sequence of processing steps has been completed, the gate electrodes can be completed following conventional methods of gate electrode processing.

Claims

1. A method of creating Lightly doped Diffusion regions self-aligned with a PMOS device, comprising the steps of:

providing a silicon substrate, said substrate having been provided with at least one NMOS gate electrode and at least one PMOS gate electrode on the surface thereof, said at least one NMOS and at least one PMOS device being separated by a region of gate isolation created in the surface of said substrate, a Negative Lightly Doped Diffusion (NLDD) implantation self-aligned with said at least one NMOS gate electrode having been performed into the surface of said substrate, successive layers of oxide liner, etch stop material and first layer of top oxide having been deposited over the surface of the substrate including the surface of said gate electrodes;

etching said first layer of top oxide, creating first gate spacers on sidewalls of said gate electrodes, using said layer of etch stop material as an etch stop;

performing n-type Source/Drain (NS/D) and p-type Source/Drain (PS/D) implantations, said implantations being self-aligned with said at least one NMOS devices and said PMOS device respectively;

removing said first gate spacers from sidewalls of said at least one NMOS gate electrode and said at least one PMOS gate electrode, exposing the surface of said layer of etch stop material;

performing a Positive Lightly Doped Diffusion (PLDD) implantation, said PLDD implantation being self-aligned with said at least one PMOS devices, said PLDD implantation using boron as a source of ion impurities;

depositing a second layer of top oxide over the surface of the substrate, including the surface of said at least one PMOS gate electrode and said at least one PMOS gate electrode;

etching said second layer of top oxide, creating second gate spacers on sidewalls of said gate electrodes, using said layer of oxide liner as an etch stop layer; and

etching said layer of etch stop material, using said layer of oxide liner as an etch stop layer.

2. The method of claim 1 wherein said layer of oxide liner is deposited to a thickness of between about 100 and 500 Angstrom.

3. The method of claim 1 wherein said layer of etch stop material comprises silicon nitride, deposited to a thickness of between about 2000 and 3000 Angstrom.

4. The method of claim 1 wherein said first layer of top oxide is deposited to a thickness between about 1000 and 5000 Angstrom.

5. The method of claim 1 wherein said second layer of top oxide is deposited to a thickness between about 1000 and 5000 Angstrom.

6. The method of claim 1 wherein said performing a PLDD implantation using boron as a source of ion impurities comprises implanting boron (BF₂) with an implantation energy within the range of between about 1 to 10 keV and a dose within the range of between about 1e14 to 5e15 atoms/cm².

7. The method of claim 1 with the additional step of annealing said NS/D and ND/D implantations, said annealing comprising a rapid thermal annealing in a temperature range of between about 600 and 800 degrees C. for a time between about 20 and 40 seconds at a pressure below about 10⁻

6 Torr, said annealing to be performed after said NS/D and PS/D implantations have been performed.

8. The method of claim 1 with the additional step of annealing said Negative Lightly Doped Diffusion (NLDD) implantation performed into the surface of said substrate, said annealing to be performed immediately after said NLDD implantation has been provided.

9. The method of claim 1 with the additional step of annealing said Positive Lightly Doped Diffusion (PLDD) implantation into the surface of said substrate, said step to be performed prior to said step of depositing a second layer of top oxide over the surface of said layer of etch stop material.

10. The method of claim 1 wherein said step of performing a Positive Lightly Doped Diffusion (PLDD) implantation into the surface of said substrate comprises forming a lightly doped region of less than 1500 Angstrom thick.

11. A method of creating Lightly doped Diffusion regions self-aligned with a PMOS device, comprising the steps of:

providing a semiconductor substrate, said substrate having been provided with a Negative Channel Metal Oxide Semiconductor (NMOS) gate electrode in addition to having been provided with a Positive Channel Metal Oxide Semiconductor (PMOS) gate electrode, said NMOS gate electrode and said PMOS gate electrode being separated by a gate insulation layer created in the surface of said substrate;

performing a Negative Lightly Doped Diffusion (NLDD) implantation into the surface of said substrate, said NLDD being self-aligned with said NMOS gate electrode;

depositing a layer of oxide liner over the surface of said substrate, including the exposed surfaces of said NMOS and said PMOS gate electrode;

depositing a layer of nitride over the surface of said layer of oxide liner;

depositing a first layer of top oxide over the surface of said layer of nitride;

etching said first layer of top oxide, creating first gate spacers on sidewalls of said NMOS and PMOS gate electrodes, using said layer of nitride as an etch stop layer;

performing source and drain implantations for said NMOS and said PMOS gate electrodes, said source and drain implantations being self-aligned with said NMOS and said PMOS gate electrodes;

annealing said source and drain implantations;

removing said first gate spacers from sidewalls of said NMOS and said PMOS gate electrodes, using said layer of nitride as an etch stop layer, exposing the surface of said layer of nitride;

performing a Positive Lightly Doped Diffusion (PLDD) implantation into the surface of said substrate using boron as a source of ion impurities, said PLDD being self-aligned with said PMOS gate electrode;

depositing a second layer of top oxide over the surface of said layer of nitride;

etching said first layer of top oxide, creating second gate spacers on sidewalls of said NMOS and PMOS gate electrodes, using said layer of nitride as an etch stop layer; and

etching said layer of nitride, using said layer of oxide liner as an etch stop layer, removing said layer of nitride from above said NMOS and PMOS gate electrodes, further removing said layer of nitride from above said layer of oxide liner where said second gate spacers do not overlay said layer of nitride.

12. The method of claim 11 wherein said layer of oxide liner is deposited to a thickness of between about 100 and 500 Angstrom.

13. The method of claim 11 wherein said layer of nitride is deposited to a thickness of between about 2000 and 3000 Angstrom.

14. The method of claim 11 wherein said first layer of top oxide is deposited to a thickness between about 1000 and 5000 Angstrom.

15. The method of claim 11 wherein said second layer of top oxide is deposited to a thickness between about 1000 and 5000 Angstrom.

16. The method of claim 11 wherein said performing a Positive Lightly Doped Diffusion (PLDD) implantation into the surface of said substrate using boron as a source of ion impurities comprises implanting boron (BF₂) with an implantation energy within the range of between about 1 to 10 keV and a dose within the range of between about 1e14 to 5e15 atoms/cm².

17. The method of claim 11 wherein said annealing said source and drain implantations comprises rapid thermal annealing in a temperature range of between about 600 and 800 degrees C. for a time between about 20 and 40 seconds at a pressure below about 10⁻

6 Torr.

18. The method of claim 11 with the additional step of annealing said Negative Lightly Doped Diffusion (NLDD) implantation performed into the surface of said substrate, said annealing to be performed prior to said depositing a layer of oxide liner.

19. The method of claim 11 with the additional step of annealing said Positive Lightly Doped Diffusion (PLDD) implantation into the surface of said substrate, said step to be performed prior to said step of depositing a second layer of top oxide over the surface of said layer of nitride.

20. The method of claim 11 wherein said step of performing a Positive Lightly Doped Diffusion (PLDD) implantation into the surface of said substrate comprises forming a lightly doped region of less than 1500 Angstrom thick.

21. A method of manufacturing a semiconductor device, comprising the steps of:

providing a semiconductor substrate, forming first and second conductive gates on the surface of said substrate, said first and second conductive gates being separated by a region of electrical isolation in the surface of said substrate;

implanting impurities into the surface of the substrate, using the first gate as a mask, forming lightly doped diffusion regions self-aligned with said first gate;

successively depositing a layer of oxide liner followed by a layer of nitride followed by a first layer of top oxide over the surface of said substrate including exposed surfaces of said first and second conductive gates;

forming first oxide sidewall gate spacers on side surfaces of the first and second conductive gates and extending from said first and second conductive gates over the surface of said substrate, by etching said first layer of top oxide using said layer of nitride as an etch stop layer, said first oxide gate spacers overlying said layer of nitride;

implanting impurities into the surface of the substrate, using the first and second conductive gates and the sidewall spacers thereon as a mask, to form source and drain implantations for said first and second conductive gates;

annealing said source and drain implantations;

removing said first oxide sidewall gate spacers from above said layer of nitride;

implanting impurities comprising boron into the surface of the substrate, using the second gate as a mask, forming lightly doped diffusion regions self-aligned with said second gate;

depositing a second layer of top oxide over the surface of said layer of nitride;

forming second oxide sidewall gate spacers on side surfaces of the first and second conductive gates and extending from said first and second conductive gates over the surface of said substrate by etching said second layer of top oxide, said second oxide gate spacers overlying said layer of nitride; and

etching said layer of nitride using said layer of oxide liner as an etch stop layer, said layer of nitride remaining in place underlying said second oxide sidewall gate spacers.

22. The method of claim 21 wherein said first conductive gate comprises a NMOS device and said second conductive gate comprises a PMOS device.

23. The method of claim 21 wherein said implanting impurities into the-surface of the substrate, using the first gate as a mask, forming lightly doped diffusion regions self-aligned with said first gate comprises implanting n-type impurities.

24. The method of claim 21 wherein said implanting impurities into the surface of the substrate, using the second gate as a mask, forming lightly doped diffusion regions self-aligned with said second gate comprises implanting boron as an impurity source.

25. The method of claim 21 wherein said implanting impurities comprising boron into the surface of the substrate, using the second gate as a mask, forming lightly doped diffusion regions self-aligned with said second gate comprises boron (BF₂) with an implantation energy within the range of between about 1 to 10 keV and a dose within the range of between about 1e14 to 5e15 atoms/cm².

26. The method of claim 21 wherein said implanting impurities into the surface of the substrate, using the first and second conductive gates and the sidewall spacers thereon as a mask, to form source and drain implantations for said first and second conductive gates comprises:

implanting n-type impurities using said first conductive gates and the sidewall spacers thereon as a mask; and

implanting p-type impurities using said second conductive gates and the sidewall spacers thereon as a mask.

27. The method of claim 21 wherein said layer of oxide liner is deposited to a thickness of between about 100 and 500 Angstrom.

28. The method of claim 21 wherein said layer of nitride is deposited to a thickness of between about 2000 and 3000 Angstrom.

29. The method of claim 21 wherein said first layer of top oxide is deposited to a thickness between about 1000 and 5000 Angstrom.

30. The method of claim 21 wherein said second layer of top oxide is deposited to a thickness between about 1000 and 5000 Angstrom.

31. The method of claim 21 with the additional step of annealing said source and drain implantations, said additional step to be performed before said step of removing said first oxide sidewall gate spacers from above said layer of nitride.

32. The method of claim 31 wherein said annealing said source and drain implantations comprises rapid thermal annealing in a temperature range of between about 600 and 800 degrees C. for a time between about 20 and 40 seconds at a pressure below about 10⁻

6 Torr.

33. A method of creating a CMOS semiconductor device having at least one NMOS device and at least one PMOS device, comprising the steps of:

providing a semiconductor substrate;

forming at least one NMOS gate electrode over the surface of said substrate and at least one PMOS gate electrode over the surface of said substrate, said least one NMOS gate electrode being separated from said least one PMOS gate electrode by a region of electrical insulation in the surface of said substrate;

selectively implanting a first n-type dopant into an NMOS device active region of the substrate self aligned with the NMOS gate electrode to form a first n-doped region in the NMOS active region;

depositing a layer of oxide liner over the surface of the substrate including exposed surfaces of the NMOS and PMOS gate electrodes;

depositing a layer of etch stop material over the surface of the layer of oxide liner;

forming first spacers on sidewalls of the NMOS gate and first spacers on sidewalls of the PMOS gate, using said layer of etch stop material as an etch stop;

selectively implanting a second n-type dopant into the NMOS active region using the first NMOS spacer as a mask, the second n-type dopant implantation forming, in the NMOS active region, a second n-doped region deeper than the first n-doped region;

selectively implanting a first p-type dopant into the PMOS active region using the first PMOS spacer as a mask, the first p-type dopant implantation forming, in the NMOS active region, a first p-doped region;

heating the substrate at a first temperature;

removing said first spacers from sidewalls of the NMOS gate and first spacers from sidewalls of the PMOS gate, using said layer of nitride as an etch stop layer;

selectively implanting as second p-type dopant into the PMOS active region using the first PMOS spacer as a mask, the second p-type dopant implantation forming, in the NMOS active region, a second p-doped region, said second p-doped region being less deep than said first p-doped region;

forming second spacers on sidewalls of the NMOS gate and first spacers on sidewalls of the PMOS gate, using said layer of nitride as an etch stop; and

removing said layer of nitride from above the surface of the NMOS gate electrode and from above the surface of the PMOS gate electrode, further removing the layer of nitride from above the surface of the substrate where said layer of nitride is exposed, using said layer of oxide liner as an etch stop.

34. The method of claim 33 wherein said layer of oxide liner is deposited to a thickness of between about 100 and 500 Angstrom.

35. The method of claim 33 wherein said layer of etch stop material comprises nitride, deposited to a thickness of between about 2000 and 3000 Angstrom.

36. The method of claim 33 wherein said selectively implanting a second p-type dopant into the PMQS active region using the first PMQS spacer as a mask comprises implanting boron (BF₂) with an implantation energy within the range of between about 1 to 10 keV and a dose within the range of between about 1e14 to 5e15 atoms /cm².

37. The method of claim 33 wherein said heating the substrate at a first temperature comprises rapid thermal annealing in a temperature range of between about 600 and 800 degrees C. for a time between about 20 and 40 seconds at a pressure below about 10⁻

6 Torr.

38. The method of claim 33 with the additional step of annealing said first n-type dopant selectively implanted into an NMOS device active region, said annealing to be performed prior to said depositing a layer of oxide liner.

39. The method of claim 33 with the additional step of annealing said second p-type dopant selectively implanted into the PMOS active region using the first PMOS spacer as a mask, said step to be performed prior to said step of forming second spacers on sidewalls of the NMOS gate and first spacers on sidewalls of the PMOS gate.

40. The method of claim 33 wherein said step of selectively implanting as second p-type dopant into the PMOS active region using the first PMOS spacer as a mask comprises forming a lightly doped region of less than 1500 Angstrom thick.

41. The method of claim 33 wherein said forming first spacers on sidewalls of the NMOS gate and first spacers on sidewalls of the PMOS gate, using said layer of etch stop material as an etch stop. comprises the steps of depositing a first layer of top oxide over the surface of said layer of etch stop material, etching said first layer of top oxide using said layer of etch stop material as an etch stop layer.

42. The method of claim 41 wherein said first layer of top oxide is deposited to a thickness between about 1000 and 5000 Angstrom.

43. The method of claim 33 wherein said forming second spacers on sidewalls of the NMOS gate and first spacers on sidewalls of the PMOS gate comprises the steps of depositing a second layer of top oxide over the surface of said layer of etch stop material, etching said second layer of top oxide using said layer of etch stop material as an etch stop layer.

44. The method of claim 43 wherein said second layer of top oxide is deposited to a thickness between about 1000 and 5000 Angstrom.