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Optical translation measurement

  • US 6,452,683 B1
  • Filed: 03/08/1999
  • Issued: 09/17/2002
  • Est. Priority Date: 03/09/1998
  • Status: Expired due to Term
First Claim
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1. A method for determining the relative motion of a surface with respect to a measurement device, comprising:

  • illuminating the surface with incident illumination, having a coherence length, such that the illumination is reflected from portions of the surface, wherein at least part of at least one of the incident and reflected illumination passes through a partially transmitting object that is part of the measuring device;

    detecting the illumination reflected from the surface, to generate a detected signal; and

    determining the relative motion of the surface parallel to the surface, from the detected signal, wherein the object and the surface are situated within a distance that is less than the coherence length of the detected illumination.

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