DRAM technology compatible processor/memory chips

• US 6,452,856 B1
• Filed: 02/26/1999
• Issued: 09/17/2002
• Est. Priority Date: 02/26/1999
• Status: Expired due to Term

• Current Assignee: Round Rock Research LLC
• Original Assignee: Micron Technology, Inc.
• Inventors: Forbes, Leonard, Noble, Wendell P., Cloud, Eugene H.
• Primary Examiner(s): Nelms, David
• Assistant Examiner(s): YOHA, CONNIE C
• Application Number:
  US09/261,598
• Publication Number:
  US 20020027825A1
• Time in Patent Office: 1,299 Days
• Field of Search: 365/230.06, 365/185.17, 365/149, 326/105, 326/106
• US Class Current: 365/230.06
• CPC Class Codes: G11C 16/0416 comprising cells containing a single floating gate transistor and no select transistor, e.g. UV EPROM
• CPC Class Codes: G11C 16/08 Address circuits; Decoders; Word-line control circuits
• CPC Class Codes: G11C 7/1006 Data managing, e.g. manipulating data before writing or reading out, data bus switches or control circuits therefor
• CPC Class Codes: H01L 29/66825 with a floating gate H01L29/6684 takes precedence
• CPC Class Codes: H03K 19/17716 with synchronous operation, i.e. using clock signals, e.g. of I/O or coupling register H03K19/17712 takes precedence
• CPC Class Codes: H10B 12/033 the capacitor extending over the transistor
• CPC Class Codes: H10B 12/09 with simultaneous manufacture of the peripheral circuit region and memory cells
• CPC Class Codes: H10B 99/00 Subject matter not provided for in other groups of this subclass

Abstract

The present invention includes an address decoder for a memory device. The address decoder includes a number of address lines and a number of output lines. The address lines, and the output lines form an array. A number of non-volatile memory cells are disposed at intersections of output lines and address lines. Each non-volatile memory cell includes a metal oxide semiconductor field effect transistor (MOSFET), a stacked capacitor formed according to a dynamic random access memory (DRAM) process, and an electrical contact that couples the stacked capacitor to a gate of the MOSFET. The non-volatile memory cells are selectively programmed such that the non-volatile memory cells implement a logic function that selects an output line responsive to an address provided to the address lines.

Methods, integrated circuits, and electronic systems are similarly provided and included within the scope of the present invention.

Claims

1. An address decoder for a memory device, the address decoder comprising:

a number of address lines;

a number of output lines;

wherein the address lines, and the output lines form an array;

a number of non-volatile memory cells that are disposed at intersections of output lines and address lines, wherein at least one non-volatile memory cell includes a metal oxide semiconductor field effect transistor (MOSFET), a stacked capacitor formed according to a dynamic random access memory (DRAM) process, the capacitor providing a coupling ratio greater than 1.0, and an electrical contact that couples the stacked capacitor to a gate of the MOSFET; and

wherein the non-volatile memory cells are selectively programmed such that the non-volatile memory cells implement a logic function that selects an output line responsive to an address provided to the address lines.

2. The address decoder of claim 1, wherein the number of address lines includes a number of complementary address lines that are disposed in the array.

3. The address decoder of claim 1, wherein the decoder is operatively coupled to a dynamic random access memory (DRAM) device.

4. The address decoder of claim 1, wherein the array includes N address lines and 2^N output lines.

5. The address decoder of claim 1, wherein the number of address lines includes a number of complementary address lines that are each coupled to one of the address lines through an inverter and are disposed in the array.

6. An address decoder for a memory device, the address decoder comprising:

a number of address lines;

a number of output lines;

wherein the address lines, and the output lines form an array;

a number of non-volatile memory cells that are disposed at intersections of output lines and address lines, wherein at least one non-volatile memory cell includes a metal oxide semiconductor field effect transistor (MOSFET), a stacked capacitor formed according to a dynamic random access memory (DRAM) process, the capacitor providing a coupling ratio greater than 1.0, and an electrical contact that couples the stacked capacitor to a gate of the MOSFET;

wherein the non-volatile memory cells are selectively programmed such that the non-volatile memory cells implement a logic function that selects an output line responsive to an address provided to the address lines; and

wherein the decoder is operatively coupled to a dynamic random access memory (DRAM) device.

7. The address decoder of claim 6, wherein the number of address lines includes a number of complementary address lines that are disposed in the array.

8. The address decoder of claim 6, wherein the array includes N address lines and 2^N output lines.

9. The address decoder of claim 6, wherein the number of address lines includes a number of complementary address lines that are each coupled to one of the address lines through an inverter and are disposed in the array.

10. The address decoder of claim 6, wherein the electrical contact includes a polysilicon plug.

11. The address decoder of claim 6, wherein the stacked capacitor includes a fin type capacitor.

12. The address decoder of claim 6, wherein the stacked capacitor includes a storage node, a capacitor dielectric, and a plate conductor and wherein the electrical contact couples the storage node of the stacked capacitor to the gate of the MOSFET.

13. An address decoder for a memory device, the address decoder comprising:

a number of address lines;

a number of output lines;

wherein the address lines, and the output lines form an array;

a number of non-volatile memory cells that are disposed at intersections of output lines and address lines, wherein at least one non-volatile memory cell includes a metal oxide semiconductor field effect transistor (MOSFET), a cup-shaped stacked capacitor formed according to a dynamic random access memory (DRAM) process, the capacitor providing a coupling ratio greater than 1.0, and an electrical contact that couples the stacked capacitor to a gate of the MOSFET; and

wherein the non-volatile memory cells are selectively programmed such that the non-volatile memory cells implement a logic function that selects an output line responsive to an address provided to the address lines.

14. The address decoder of claim 13, wherein the number of address lines includes a number of complementary address lines that are disposed in the array.

15. The address decoder of claim 13, wherein the decoder is operatively coupled to a dynamic random access memory (DRAM) device.

16. The address decoder of claim 13, wherein the array includes N address lines and 2^N output lines.

17. The address decoder of claim 13, wherein the number of address lines includes a number of complementary address lines that are each coupled to one of the address lines through an inverter and are disposed in the array.

18. An address decoder for a memory device, the address decoder comprising:

a number of address lines;

a number of output lines;

wherein the address lines, and the output lines form an array;

a number of non-volatile memory cells that are disposed at intersections of output lines and address lines, wherein at least one non-volatile memory cell includes a metal oxide semiconductor field effect transistor (MOSFET) comprising a gate and a channel region separated by a gate oxide, a capacitor formed according to a dynamic random access memory (DRAM) process, the capacitor providing a coupling ratio greater than 1.0, and an electrical contact that couples the stacked capacitor to a gate of the MOSFET; and

wherein the non-volatile memory cells are selectively programmed such that the non-volatile memory cells implement a logic function that selects an output line responsive to an address provided to the address lines.

19. The address decoder of claim 18, wherein the gate oxide has a thickness of less than 100 angstroms.

20. The address decoder of claim 19, wherein the gate oxide acts as a tunneling oxide.

21. The address decoder of claim 18, wherein the number of address lines includes a number of complementary address lines that are disposed in the array.

22. The address decoder of claim 18, wherein the decoder is operatively coupled to a dynamic random access memory (DRAM) device.

23. The address decoder of claim 18, wherein the array includes N address lines and 2^N output lines.

24. The address decoder of claim 18, wherein the number of address lines includes a number of complementary address lines that are each coupled to one of the address lines through an inverter and are disposed in the array.

25. An address decoder for a memory device, the address comprising:

a number of address lines;

a number of output lines;

wherein the address lines, and the output lines form an array;

a number of non-volatile memory cells that are disposed at intersections of output lines and address lines, wherein at least one non-volatile memory cell includes a metal oxide semiconductor field effect transistor (MOSFET) comprising a gate and a channel region separated by a gate oxide, a cup-shaped capacitor formed according to a dynamic random access memory (DRAM) process, the capacitor providing a coupling ratio greater than 1.0, and an electrical contact that couples the stacked capacitor to a gate of the MOSFET; and

wherein the non-volatile memory cells are selectively programmed such that the non-volatile memory cells implement a logic function that selects an output line responsive to an address provided to the address lines.

26. The address decoder of claim 25, wherein the gate oxide has a thickness of less than 100 angstroms.

27. The address decoder of claim 26, wherein the gate oxide acts as a tunneling oxide.

28. The address decoder of claim 25, wherein the number of address lines includes a number of complementary address lines that are disposed in the array.

29. The address decoder of claim 25, wherein the decoder is operatively coupled to a dynamic random access memory (DRAM) device.

30. The address decoder of claim 25, wherein the array includes N address lines and 2^N output lines.

31. The address decoder of claim 25, wherein the number of address lines includes a number of complementary address lines that are each coupled to one of the address lines through an inverter and are disposed in the array.

32. An address decoder for a memory device, the address decoder comprising:

a number of address lines;

a number of output lines;

wherein the address lines, and the output lines form an array;

a number of non-volatile memory cells that are disposed at intersections of output lines and address lines, wherein at least one non-volatile memory cell includes a metal oxide semiconductor field effect transistor (MOSFET), a stacked capacitor formed according to a dynamic random access memory (DRAM) process, the capacitor providing a coupling ratio greater than 1.0, the capacitor including a bottom plate and a top plate separated by a capacitor dielectric, wherein an electrical contact couples the bottom plate of the capacitor to a gate of the MOSFET; and

wherein the non-volatile memory cells are selectively programmed such that the non-volatile memory cells implement a logic function that selects an output line responsive to an address provided to the address lines.

33. The address decoder of claim 32, wherein the bottom plate serves as a storage node.

34. The address decoder of claim 32, wherein the bottom plate comprises a floating gate for the at least one non-volatile memory cell.

35. The address decoder of claim 32, wherein the number of address lines includes a number of complementary address lines that are disposed in the array.

36. The address decoder of claim 32, wherein the decoder is operatively coupled to a dynamic random access memory (DRAM) device.

37. The address decoder of claim 32, wherein the array includes N address lines and 2^N output lines.

38. The address decoder of claim 32, wherein the number of address lines includes a number of complementary address lines that are each coupled to one of the address lines through an inverter and are disposed in the array.

39. An address decoder for a memory device, the address decoder comprising:

a number of address lines;

a number of output lines;

wherein the address lines, and the output lines form an array;

a number of non-volatile memory cells that are disposed at intersections of output lines and address lines, wherein at least one non-volatile memory cell includes a metal oxide semiconductor field effect transistor (MOSFET), a cup-shaped stacked capacitor formed according to a dynamic random access memory (DRAM) process, the capacitor providing a coupling ratio greater than 1.0, the capacitor including a bottom plate and a top plate separated by a capacitor dielectric, wherein an electrical contact couples the bottom plate of the capacitor to a gate of the MOSFET; and

wherein the non-volatile memory cells are selectively programmed such that the non-volatile memory cells implement a logic function that selects an output line responsive to an address provided to the address lines.

40. The address decoder of claim 39, wherein the bottom plate serves as a storage node.

41. The address decoder of claim 39, wherein the bottom plate comprises a floating gate for the at least one non-volatile memory cell.

42. The address decoder of claim 39, wherein the number of address lines includes a number of complementary address lines that are disposed in the array.

43. The address decoder of claim 39, wherein the the decoder is operatively coupled to a dynamic random access memory (DRAM) device.

44. The address decoder of claim 39, wherein the array includes N address lines and 2^N output lines.

45. The address decoder of claim 39, wherein the number of address lines includes a number of complementary address lines that are each coupled to one of the address lines through an inverter and are disposed in the array.

46. An address decoder for a memory device, the address decoder comprising:

a number of address lines;

a number of output lines;

wherein the address lines, and the output lines form an array;

a number of non-volatile memory cells that are disposed at intersections of output lines and address lines, wherein at least one non-volatile memory cell includes a metal oxide semiconductor field effect transistor (MOSFET) comprising a gate and a channel region separated by a gate oxide, a cup-shaped stacked capacitor formed according to a dynamic random access memory (DRAM) process, the capacitor providing a coupling ratio greater than 1.0, the capacitor including a bottom plate and a top plate separated by a capacitor dielectric, wherein an electrical contact couples the bottom plate of the capacitor to a gate of the MOSFET; and

wherein the non-volatile memory cells are selectively programmed such that the non-volatile memory cells implement a logic function that selects an output line responsive to an address provided to the address lines.

47. The address decoder of claim 46, wherein the gate oxide has a thickness of less than 100 angstroms.

48. The address decoder of claim 47, wherein the gate oxide acts as a tunneling oxide.

49. The address decoder of claim 46, wherein the bottom plate serves as a storage node.

50. The address decoder of claim 46, wherein the bottom plate comprises a floating gate for the at least one non-volatile memory cell.

51. The address decoder of claim 46, wherein the number of address lines includes a number of complementary address lines that are disposed in the array.

52. The address decoder of claim 46, wherein the decoder is operatively coupled to a dynamic random access memory (DRAM) device.

53. The address decoder of claim 46, wherein the array includes N address lines and 2^N output lines.

54. The address decoder of claim 46, wherein the number of address lines includes a number of complementary address lines that are each coupled to one of the address lines through an inverter and are disposed in the array.

55. An address decoder for a memory device, the address decoder comprising:

a number of address lines;

a number of output lines;

wherein the address lines, and the output lines form an array;

a number of non-volatile memory cells that are disposed at intersections of output lines and address lines, wherein at least one non-volatile memory cell includes a metal oxide semiconductor field effect transistor (MOSFET) comprising a gate and a channel region separated by a gate oxide, a stacked capacitor formed according to a dynamic random access memory (DRAM) process, the capacitor providing a coupling ratio greater than 1.0, the capacitor including a bottom plate and a top plate separated by a capacitor dielectric, wherein an electrical contact couples the bottom plate of the capacitor to a gate of the MOSFET; and

wherein the non-volatile memory cells are selectively programmed such that the non-volatile memory cells implement a logic function that selects an output line responsive to an address provided to the address lines.

56. The address decoder of claim 55, wherein the gate oxide has a thickness of less than 100 angstroms.

57. The address decoder of claim 56, wherein the gate oxide acts as a tunneling oxide.

58. The address decoder of claim 55, wherein the bottom plate serves as a storage node.

59. The address decoder of claim 55, wherein the bottom plate comprises a floating gate for the at least one non-volatile memory cell.

60. The address decoder of claim 55, wherein the number of address lines includes a number of complementary address lines that are disposed in the array.

61. The address decoder of claim 55, wherein the decoder is operatively coupled to a dynamic random access memory (DRAM) device.

62. The address decoder of claim 55, wherein the array includes N address lines and 2^N output lines.

63. The address decoder of claim 55, wherein the number of address lines includes a number of complementary address lines that are each coupled to one of the address lines through an inverter and are disposed in the array.