Micromachined optomechanical switching cell with parallel plate actuator and on-chip power monitoring

• US 6,453,083 B1
• Filed: 01/13/2000
• Issued: 09/17/2002
• Est. Priority Date: 05/28/1999
• Status: Expired due to Fees

• Current Assignee: Joseph E. Ford
• Original Assignee: Omx Incorporated (The ODP Corporation)
• Inventors: Fan, Li, Husain, Anis
• Primary Examiner(s): NGO, HUNG NHAT
• Application Number:
  US09/483,276
• Time in Patent Office: 978 Days
• Field of Search: 385/16-21
• US Class Current: 385/17
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B
• CPC Class Codes: G02B 26/085 the reflecting means being moved or deformed by electromagnetic means
• CPC Class Codes: G02B 6/3514 the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
• CPC Class Codes: G02B 6/352 the reflective optical element having a shaped reflective surface, e.g. a reflective element comprising several reflective surfaces or facets that function together
• CPC Class Codes: G02B 6/3546 NxM switch, i.e. a regular array of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/3576 Temperature or heat actuation thermal forces controlling reflecting elements in general G02B26/0866; thermo-optic devices G02F1/0147
• CPC Class Codes: G02B 6/3586 Control or adjustment details, e.g. calibrating testing optical equipment G01M11/00
• CPC Class Codes: H04Q 11/0005 Switch and router aspects
• CPC Class Codes: H04Q 2011/003 using switches based on microelectro-mechanical systems [MEMS]
• CPC Class Codes: H04Q 2011/0049 Crosstalk reduction; Noise; Power budget

Abstract

A number of micromachined optomechanical switching cells and matrix switches including such switching cells are disclosed herein. One optomechanical switching cell of the present invention includes a parallel plate actuator positioned on a substrate. A mirror coupled to the actuator is disposed to selectively redirect an incident optical beam. The present invention also contemplates an optomechanical matrix switch including a substrate and a plurality of optomechanical switching cells coupled thereto. The matrix switch further includes an arrangement for monitoring the optical power incident upon, and output by, the matrix switch.

Claims

1. An optomechanical matrix switch, comprising:

a substrate;

a plurality of optomechanical switching cells coupled to the substrate, each of the plurality of optomechanical switching cells including a mirror and an actuator capable of receiving a signal;

an optical power monitor, disposed upon the substrate, for monitoring optical power incident upon the matrix switch;

wherein the mirror is capable of being displaced substantially within a single plane in response to a signal applied to the actuator.

2. The optomechanical matrix switch of claim 1 wherein the mirror is capable of selectively vertically displacing substantially within a single plane.

3. An optomechaincal matrix switch, comprising:

a substrate;

a plurality of optomechaincal switching cells coupled to said substrate, each of said plurality of optomechaincal switching cells including a mirror and an actuator capable of receiving a signal;

means, disposed upon the substrate, for monitoring the optical power incident upon the matrix switch;

wherein said mirror is coupled to the actuator at a fixed angle with respect to the actuator arm such that said mirror is capable of being selectively displaced in response to a signal applied to said actuator; and

wherein said mirror is capable of being selectively displaced substantially within a single plane.

4. The optomechanical matrix switch of claim 3, wherein said means includes a first beam splitter and a first photodetector.

5. The optomechanical matrix switch of claim 4, wherein said first beam splitter splits a beam in a plane that is substantially parallel to said substrate.

6. The optomechanical matrix switch of claim 5, wherein said first beam splitter splits a beam in a plane that is substantially perpendicular to said substrate.

7. The optomechanical matrix switch of claim 4, wherein said means includes a second beam splitter and a second photodetector.

8. The optomechanical matrix switch of claim 3 further including means, disposed upon the substrate, for monitoring the optical power output by the matrix switch.

9. The optomechanical matrix switch of claim 3 wherein said mirror is capable of selectively vertically displacing substantially within a single plane.

10. An optomechaincal matrix switch, comprising:

a substrate;

a plurality of optomechaincal switching cells coupled to the substrate, each of the plurality of optomechaincal switching cells including a mirror and an actuator capable of receiving a signal;

an optical power monitor, disposed upon the substrate, for monitoring the optical power incident upon the matrix switch;

wherein the mirror is capable of displacing substantially within a single plane.

11. The optomechanical matrix switch of claim 10, wherein the optical power monitor includes a first beam splitter and a first photodetector.

12. The optomechanical matrix switch of claim 11, wherein the first beam splitter splits a beam in a plane that is substantially parallel to the substrate.

13. The optomechanical matrix switch of claim 12, wherein the first beam splitter splits a beam in a plane that is substantially perpendicular to the substrate.

14. The optomechanical matrix switch of claim 11, wherein the optical power monitor includes a second beam splitter and a second photodetector.

15. The optomechanical matrix switch of claim 10 further including an optical power output monitor, such that the optical power output monitor is capable of monitoring the output power of the matrix switch.

16. The optomechanical matrix switch of claim 10 wherein the mirror is capable of selectively vertically displacing substantially within a single plane.

17. The optomechaincal matrix switch of claim 10 wherein the actuator is coupled to receive an electrical signal, and wherein the mirror is capable of being displaced in response to the electrical signal applied to the actuator.