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Selection of evaluation point locations based on proximity effects model amplitudes for correcting proximity effects in a fabrication layout

  • US 6,453,457 B1
  • Filed: 09/29/2000
  • Issued: 09/17/2002
  • Est. Priority Date: 09/29/2000
  • Status: Active Grant
First Claim
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1. A method of correcting for proximity effects associated with an edge in a layout corresponding to a design layer, the method comprising:

  • determining an evaluation point for the edge based on a profile of amplitudes output from a proximity effects model along a transect including a target edge in the design layer corresponding to the edge; and

    determining how to correct at least a portion of the edge for proximity effects based on an analysis at the evaluation point.

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